JPH0214422B2 - - Google Patents

Info

Publication number
JPH0214422B2
JPH0214422B2 JP61206861A JP20686186A JPH0214422B2 JP H0214422 B2 JPH0214422 B2 JP H0214422B2 JP 61206861 A JP61206861 A JP 61206861A JP 20686186 A JP20686186 A JP 20686186A JP H0214422 B2 JPH0214422 B2 JP H0214422B2
Authority
JP
Japan
Prior art keywords
film
nitrogen gas
coating
tin
hcd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61206861A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362865A (ja
Inventor
Wataru Ito
Tooru Ito
Tomoyoshi Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP20686186A priority Critical patent/JPS6362865A/ja
Publication of JPS6362865A publication Critical patent/JPS6362865A/ja
Publication of JPH0214422B2 publication Critical patent/JPH0214422B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20686186A 1986-09-04 1986-09-04 イオンプレ−テイングによるコ−テイング方法 Granted JPS6362865A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20686186A JPS6362865A (ja) 1986-09-04 1986-09-04 イオンプレ−テイングによるコ−テイング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20686186A JPS6362865A (ja) 1986-09-04 1986-09-04 イオンプレ−テイングによるコ−テイング方法

Publications (2)

Publication Number Publication Date
JPS6362865A JPS6362865A (ja) 1988-03-19
JPH0214422B2 true JPH0214422B2 (ko) 1990-04-09

Family

ID=16530256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20686186A Granted JPS6362865A (ja) 1986-09-04 1986-09-04 イオンプレ−テイングによるコ−テイング方法

Country Status (1)

Country Link
JP (1) JPS6362865A (ko)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938442U (ja) * 1982-09-03 1984-03-10 深水 正元 スライドマガジン

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938442U (ja) * 1982-09-03 1984-03-10 深水 正元 スライドマガジン

Also Published As

Publication number Publication date
JPS6362865A (ja) 1988-03-19

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