JPH0214316B2 - - Google Patents
Info
- Publication number
- JPH0214316B2 JPH0214316B2 JP59182438A JP18243884A JPH0214316B2 JP H0214316 B2 JPH0214316 B2 JP H0214316B2 JP 59182438 A JP59182438 A JP 59182438A JP 18243884 A JP18243884 A JP 18243884A JP H0214316 B2 JPH0214316 B2 JP H0214316B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- rod
- external magnet
- partition plate
- predetermined position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 39
- 238000005192 partition Methods 0.000 claims description 31
- 239000002994 raw material Substances 0.000 claims description 21
- 230000007246 mechanism Effects 0.000 claims description 11
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 description 9
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000565 sealant Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000007667 floating Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59182438A JPS6158883A (ja) | 1984-08-31 | 1984-08-31 | 隔板の移動装置 |
| EP84111306A EP0174391B1 (en) | 1984-08-31 | 1984-09-21 | Baffle plate moving device |
| DE8484111306T DE3475536D1 (en) | 1984-08-31 | 1984-09-21 | Baffle plate moving device |
| US06/675,410 US4604262A (en) | 1984-08-31 | 1984-11-27 | Apparatus for positioning and locating a baffle plate in a crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59182438A JPS6158883A (ja) | 1984-08-31 | 1984-08-31 | 隔板の移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6158883A JPS6158883A (ja) | 1986-03-26 |
| JPH0214316B2 true JPH0214316B2 (enExample) | 1990-04-06 |
Family
ID=16118268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59182438A Granted JPS6158883A (ja) | 1984-08-31 | 1984-08-31 | 隔板の移動装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4604262A (enExample) |
| EP (1) | EP0174391B1 (enExample) |
| JP (1) | JPS6158883A (enExample) |
| DE (1) | DE3475536D1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0173764B1 (en) * | 1984-08-31 | 1989-12-13 | Gakei Electric Works Co., Ltd. | Single crystal growing method and apparatus |
| US4971652A (en) * | 1989-12-18 | 1990-11-20 | General Electric Company | Method and apparatus for crystal growth control |
| US5137699A (en) * | 1990-12-17 | 1992-08-11 | General Electric Company | Apparatus and method employing interface heater segment for control of solidification interface shape in a crystal growth process |
| US5132091A (en) * | 1990-12-17 | 1992-07-21 | General Electric Company | Apparatus and method employing focussed radiative heater for control of solidification interface shape in a crystal growth process |
| US5394830A (en) * | 1993-08-27 | 1995-03-07 | General Electric Company | Apparatus and method for growing long single crystals in a liquid encapsulated Czochralski process |
| CN1317058A (zh) | 1998-06-26 | 2001-10-10 | Memc电子材料有限公司 | 用于晶体生长装置的电阻加热器及其使用方法 |
| US6537372B1 (en) | 1999-06-29 | 2003-03-25 | American Crystal Technologies, Inc. | Heater arrangement for crystal growth furnace |
| US6285011B1 (en) | 1999-10-12 | 2001-09-04 | Memc Electronic Materials, Inc. | Electrical resistance heater for crystal growing apparatus |
| US6663709B2 (en) * | 2001-06-26 | 2003-12-16 | Memc Electronic Materials, Inc. | Crystal puller and method for growing monocrystalline silicon ingots |
| CN100338267C (zh) * | 2004-12-23 | 2007-09-19 | 北京有色金属研究总院 | 降低磷化镓单晶尾部位错的方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT193943B (de) * | 1955-08-26 | 1957-12-10 | Siemens Ag | Einrichtung zum Ziehen von Kristallen aus der Schmelze von Verbindungen mit leichtflüchtigen Komponenten |
| DE2306754A1 (de) * | 1973-02-12 | 1974-08-15 | Siemens Ag | Verfahren und vorrichtung zum herstellen von einkristallen aus halbleitenden verbindungen nach dem czochralski-verfahren |
| DE2362825C2 (de) * | 1973-12-18 | 1981-10-08 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Ziehvorrichtung für Kristalle |
| US4167554A (en) * | 1974-10-16 | 1979-09-11 | Metals Research Limited | Crystallization apparatus having floating die member with tapered aperture |
| DE2517849A1 (de) * | 1975-04-22 | 1976-11-11 | Kemmer Josef Dr | Dreh-durchfuehrung |
| JPS5673699A (en) * | 1979-11-14 | 1981-06-18 | Toshiba Corp | 3-5 group compound semiconductor manufacturing apparatus |
| US4284605A (en) * | 1980-05-14 | 1981-08-18 | Ferrofluidics Corporation | Linear drive shaft seal |
| JPS57179099A (en) * | 1981-04-28 | 1982-11-04 | Toshiba Corp | Manufacturing apparatus for silicon single crystal |
| JPS57200286A (en) * | 1981-06-04 | 1982-12-08 | Toshiba Corp | Preparing apparatus of single crystal |
| JPS5932426B2 (ja) * | 1981-11-27 | 1984-08-08 | 日本電気株式会社 | 半導体単結晶育成方法および育成装置 |
| JPS58194793A (ja) * | 1982-05-04 | 1983-11-12 | Nec Corp | 単結晶引き上げ方法 |
-
1984
- 1984-08-31 JP JP59182438A patent/JPS6158883A/ja active Granted
- 1984-09-21 EP EP84111306A patent/EP0174391B1/en not_active Expired
- 1984-09-21 DE DE8484111306T patent/DE3475536D1/de not_active Expired
- 1984-11-27 US US06/675,410 patent/US4604262A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE3475536D1 (en) | 1989-01-12 |
| EP0174391A1 (en) | 1986-03-19 |
| JPS6158883A (ja) | 1986-03-26 |
| EP0174391B1 (en) | 1988-12-07 |
| US4604262A (en) | 1986-08-05 |
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