JPH02141847U - - Google Patents

Info

Publication number
JPH02141847U
JPH02141847U JP5125989U JP5125989U JPH02141847U JP H02141847 U JPH02141847 U JP H02141847U JP 5125989 U JP5125989 U JP 5125989U JP 5125989 U JP5125989 U JP 5125989U JP H02141847 U JPH02141847 U JP H02141847U
Authority
JP
Japan
Prior art keywords
disk
light
detection means
disk body
light detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5125989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0736271Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989051259U priority Critical patent/JPH0736271Y2/ja
Publication of JPH02141847U publication Critical patent/JPH02141847U/ja
Application granted granted Critical
Publication of JPH0736271Y2 publication Critical patent/JPH0736271Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1989051259U 1989-04-28 1989-04-28 円盤体の欠陥検査装置 Expired - Lifetime JPH0736271Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989051259U JPH0736271Y2 (ja) 1989-04-28 1989-04-28 円盤体の欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989051259U JPH0736271Y2 (ja) 1989-04-28 1989-04-28 円盤体の欠陥検査装置

Publications (2)

Publication Number Publication Date
JPH02141847U true JPH02141847U (cs) 1990-11-29
JPH0736271Y2 JPH0736271Y2 (ja) 1995-08-16

Family

ID=31570534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989051259U Expired - Lifetime JPH0736271Y2 (ja) 1989-04-28 1989-04-28 円盤体の欠陥検査装置

Country Status (1)

Country Link
JP (1) JPH0736271Y2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0564760U (ja) * 1992-01-22 1993-08-27 東京航空計器株式会社 円盤状物品の保持装置
WO2009013887A1 (ja) * 2007-07-25 2009-01-29 Nikon Corporation 端部検査装置
CN106442552A (zh) * 2016-08-29 2017-02-22 宁波永信精密管业有限公司 套筒件外观检测装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258729A (ja) * 1984-06-04 1985-12-20 Hitachi Ltd 磁気デイスク塗膜の検査方法及びその装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258729A (ja) * 1984-06-04 1985-12-20 Hitachi Ltd 磁気デイスク塗膜の検査方法及びその装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0564760U (ja) * 1992-01-22 1993-08-27 東京航空計器株式会社 円盤状物品の保持装置
WO2009013887A1 (ja) * 2007-07-25 2009-01-29 Nikon Corporation 端部検査装置
CN106442552A (zh) * 2016-08-29 2017-02-22 宁波永信精密管业有限公司 套筒件外观检测装置

Also Published As

Publication number Publication date
JPH0736271Y2 (ja) 1995-08-16

Similar Documents

Publication Publication Date Title
JPH0176611U (cs)
JPH02141847U (cs)
JPS62128135A (ja) ウエハ全面検査装置
JPH0517636Y2 (cs)
JPH0292873U (cs)
JPH0269656U (cs)
JP2832751B2 (ja) ディスクチャック機構の駆動機構
JP2507729Y2 (ja) 光学ディスク検査装置
JPH0414282B2 (cs)
JPH01168852U (cs)
JPH02146305U (cs)
JPH0323511A (ja) 磁気テープ装置
JPS63129248U (cs)
JPH064912A (ja) 原盤信号検査装置
JPS6263929U (cs)
JPS61158662U (cs)
JPS587505Y2 (ja) レコ−ドプレ−ヤのクランパ−装置
JPS6370152U (cs)
JPH061586B2 (ja) 原盤記録装置
JPH03106556U (cs)
JPH0270812U (cs)
JPH0388339U (cs)
JPS61158663U (cs)
JPH0323374U (cs)
JPS6186828U (cs)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term