JPH02136761A - Inspecting device for liquid crystal display panel - Google Patents

Abstract

PURPOSE:To apply a prescribed voltage to all gate signal lines by controlling a gate drive IC connected to a liquid crystal display panel. CONSTITUTION:A liquid crystal display panel 10 is placed on a placing table 11 and positioned, an output terminal of an IC control means 31 is connected to a gate control IC 35, and a signal measuring means 32 is connected to each signal line of the panel 10. Subsequently, a control means 33 sends a positioning signal to a light irradiating means 30, and the means 30 is positioned so as to irradiated a phototransistor (PT) 29 of a source signal line 24 of the utmost end and sends a positioning completion signal to the means 33. Also, the means 31 generates a gate clock to the IC 35, based on a control signal from the means 33, and applies a turn-on/turn-off voltage to a gate signal line 21. In this state, when the means 33 sends an irradiating signal to the means 30, the means 30 irradiates the PT 29 by a laser light, the means 33 sends a measurement start signal to the means 32, the means 32 sends measuring data for showing whether a voltage and a current generated by the IC 35 are superposed on the signal line 24 or not to the means 33, and the means 33 detects whether a defect is generated or not and a defect mode.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a liquid crystal display panel inspection device for inspecting the quality of active matrix type liquid crystal display panels.

Conventional technology In recent years, as the number of picture elements in liquid crystal display devices has increased, the number of scanning lines has increased, and in the conventional simple matrix type liquid crystal display panel, the display contrast and response speed have decreased, so switching is required for each picture element. Active matrix type liquid crystal display panels in which elements are arranged are being used. The liquid crystal display panel has tens of thousands of thin film transistors (
(hereinafter referred to as TPT). With the current technology, it is difficult to form all the TPTs without defects, so after forming the liquid crystal display panel, it is necessary to perform an inspection to determine whether it is good or bad.

In addition, the LCD panel, which can be repaired, detects the defect mode and defect location and processes it using lasers and other tools. In view of the above, there is a need for a liquid crystal display panel inspection apparatus that can inspect liquid crystal display panels at high speed and detect defect modes and defect locations.

Hereinafter, a conventional liquid crystal display panel inspection apparatus will be described with reference to the drawings.

First, the liquid crystal display panel and the state of the panel at the time of inspection will be described. FIG. 11(a) is a plan view of the liquid crystal display panel during the inspection process. Figure 11 (G)) is the 11th
FIG. 3 is a cross-sectional view taken along line AA' in FIG. Figure 11(a)
, @), l is an insulating substrate such as glass, 2 is TPT
3 is a loading section for an IC (hereinafter referred to as a gate drive IC) that controls the gate of the TPT (hereinafter referred to as a gate drive IC); 3 is a loading section for an IC that generates a signal to the source terminal of the TPT (hereinafter referred to as a signal drive IC); 4 is an ITO loading section; 5 is a sealing resin for sealing the liquid crystal, 6 is a display area of the liquid crystal display panel, and 7 is an element forming part such as a TFT (hereinafter referred to as TPT forming part). , )8 is a counter electrode. In the drawings, parts unnecessary for explanation are omitted, and some parts are enlarged or reduced. The above also applies to the following drawings.

12 is a partially enlarged plan view within the dotted line indicated by A in FIG. 11(a), and FIG. 13 is a partially enlarged plan view within the dotted line indicated by I in FIG. 11(a). Note that these drawings are drawn in a fairly simple manner, and the number of lead-out terminals and the number of signal lines are very small.The same applies to the following drawings. Figure 12.

In FIG. 13, 21 is a gate signal line, 22 is an extraction electrode for connecting to the terminal electrode of the gate drive IC, 2
3 is an IC control signal line (hereinafter referred to as gate control signal line) for transmitting a signal to control the gate drive IC.
, 24 is a source signal line, 25 is an extraction terminal for connecting to the terminal electrode of the signal drive IC, and 26 is an lcl# control signal line (hereinafter referred to as a signal control signal line) for transmitting a signal to control the signal drive IC. call, ).

FIG. 10 is a bronch diagram of a conventional liquid crystal display panel inspection apparatus. In FIG. 1O, 10 is the liquid crystal display panel shown in FIG. 11, 11 is a loading stand for the liquid crystal display panel, and 12
．． 13 is a probe, 14.15 is a probe positioning means for positioning the probe, which is composed of an XY stage, etc., 16.17 is a probe control means for controlling the probe positioning means, 1 is a resistance (11! measurement means, 19 is a control means for controlling the probe positioning means and the resistance value measuring means; 20 is a gate signal line formed on the liquid crystal display panel; 21 is a source signal line;
a and 20b are connection wirings. Note that an extraction electrode (not shown) is formed at the end of the signal line.

The operation of the liquid crystal display panel inspection apparatus configured as described above will be explained. First, the liquid crystal display panel IQ is placed on a loading table 1, and its angle 1 position and other positions are adjusted and positioned. Next, the control means 19 transfers positioning data such as X:Y marks to the probe control means 16 and 17. The probe control means 16, 17 sends positioning pulses to the motor of the probe positioning means based on the positioning data. The probe positioning means moves based on the positioning pulse. The probe 12 is connected to the extraction electrode 22 of the gate signal line 21 of the liquid crystal display panel 10.
, connect the probe 13 to the extraction electrode 2 of the source signal line 24.
Position at 5. When the positioning is completed, a positioning completion signal is generated, and the positioning completion signal is transmitted to the control means 19.
sent to.

When the control means 19 recognizes the positioning completion signal, it sends a resistance value measurement signal to the resistance value measurement means. The resistance value measuring means measures the resistance value between 12.13 and the probe through the connecting wires 20a and 20b.'/M The determined resistance value is sent to the control means 19, and the resistance value is displayed on the liquid crystal display panel according to the resistance value. It is determined whether a defect has occurred.

By the same operation as above, the probe is pressed against all the gate signal lines and source signal lines, and the liquid crystal display panel is inspected. Hereinafter, in order to explain in detail the operation 2 usage method of the conventional liquid crystal display panel inspection apparatus, referring to FIG. 14, it will be described. FIG. 14 is an explanatory diagram of an inspection method using a conventional liquid crystal display panel inspection apparatus. In Figure 14, 0
1 to Gs are gate signal lines, S and -S are source signal lines,
T,,%T4. is T F T , P u ~P 4
4 is a picture element electrode, 27a and 27b are probes, and 28 is a short circuit that occurs at the intersection of the gate signal line and the source signal line (hereinafter referred to as a cross short).As an inspection method, the gate signal line G1 is Press the probe 27a and press the probe 27b to the source signal line S1.Measure the resistance between the probes 12 and 13 using the resistance measuring means 18.The probe 27a is fixed, and the probe 27a is fixed.
7b sequentially from source signal line s2 to S. However, n is an integer in pressure contact, and the resistance value in each pressure contact state is measured. After completing the measurement of the resistance value between each source signal line with respect to the gate signal line G, the probe 27a is pressed against the gate signal line G2,
Similarly, the probe 27b is connected to the source signal lines Sl to S. The resistance value at each pressure contact state is measured. By performing the above operation on all gate signal lines and source signal lines, the resistance value at each intersection is measured. 14th
Since a cross short 28 has occurred in the liquid crystal display panel shown in the figure, when the probe 27a is pressed against the gate signal line G2 and the probe 27b is pressed against the source signal line S, a voltage lower than normal is measured by the resistance value measuring means. By doing so, the cross short 28 can be detected.

Problems to be Solved by the Invention In recent years, the spacing between signal lines in liquid crystal display panels has tended to become finer, to 200 IJm or less, and the number of signal lines has tended to increase to several hundred or more. Therefore, if an attempt is made to perform an inspection using a conventional liquid crystal display panel inspection apparatus, the following problems arise. First of all, since the spacing between signal lines on a liquid crystal display panel is becoming finer, the lead-out electrodes of the signal lines also tend to be finer, making it difficult to accurately position the electrodes. In order to perform the above positioning, a highly accurate positioning device is required, and the positioning time also takes a long time. Second, since the number of signal lines in liquid crystal display panels has been increasing, the number of press-contacting probes has increased, and an enormous amount of time is required for inspection.

For the above reasons, when testing LCD panels using conventional LCD panel inspection equipment to detect defect modes and defect positions, it takes more than an hour per panel even with 200x200 signal lines. It could not be used in the manufacturing process.

Means for Solving the Problems In order to solve the above problems, the liquid crystal display panel inspection apparatus of the present invention includes a table for mounting liquid crystal display panels, and a signal drive for applying a signal to a source signal line formed on the liquid crystal display panel. an IC control means for controlling at least one of the IC and a gate drive IC that applies a signal to a gate signal line; a light irradiation means for irradiating light to an optical switching element formed on a signal line of a liquid crystal display panel; The apparatus includes a measuring means connected to one terminal of the optical switching element and measuring a signal applied to the signal line.

Function: One method of using the liquid crystal display panel inspection device of the present invention is to connect a gate drive IC on the liquid crystal display panel,
By controlling the gate drive IC, a predetermined voltage can be applied to all gate signal lines at once. Therefore, there is no need for blowing the gate signal line, and a phototransistor is formed on the source signal line of the liquid crystal display panel, and an ammeter is connected to one end of the plurality of transistors, which are made common. Next, the phototransistor is irradiated with a laser beam from the light irradiation means, which is one of the components of the inspection device of the present invention, and turned on, thereby selectively guiding the current flowing through an arbitrary source signal line to the ammeter. It can be omitted. Therefore, it is not necessary to perform blowby on all the source signal lines, but it is sufficient to make several dozen of the source signal lines common and perform blowby on the common terminals.

EXAMPLE Hereinafter, a liquid crystal display panel inspection apparatus of the present invention will be explained with reference to the drawings.

First, a description will be given of the liquid crystal display panel and the state of the panel when inspecting using the liquid crystal display panel inspection apparatus of the present invention.

FIG. 2(C) is a plan view of the liquid crystal display panel during the inspection process. Further, FIG. 2(b) is a cross-sectional view taken along line BB' in FIG. 2(a), FIG. 3 is an enlarged view within the dotted line indicated by A in FIG. 2(a), and FIG. FIG. 2 is an enlarged view of the dotted line indicated by A in FIG. 2(a). In FIG. 2(a), Φ), 35 is a gate drive IC. The difference from the liquid crystal display panel shown in FIG. 11 is that a gate drive IC is mounted on the liquid crystal display panel, and the drive IC is made operable. The drive IC applies a control B signal to the gate control signal line to generate a voltage (hereinafter referred to as an on-voltage) that turns on the gate of the TPT or a voltage that turns on the gate of the TPT on an arbitrary signal line.
A voltage that turns off the gate (hereinafter referred to as an off voltage) can be applied. Note that the on voltage is a positive voltage, and the off voltage is a negative voltage. Further, a phototransistor is formed as an optical switching element on the source signal line of the liquid crystal display panel. The phototransistors are formed using amorphous silicon or the like, and are formed in a line to facilitate light irradiation, and each gate terminal and several dozen emitter or drain terminals are common. An example of the structure of the above-mentioned liquid crystal display panel or matrix array is described in Japanese Patent Application Laid-open No. 80060/1983.

FIG. 1 is a block diagram of a liquid crystal display panel inspection apparatus according to a first practical example of the present invention. In FIG. 1, 31 is a tC control means for applying a signal to the gate control signal line 23 etc. to control an IC such as a gate drive IC, and 32 is a connection means such as a probe or a connector for connecting to a signal line of a liquid crystal display panel. It is a signal measuring means for measuring a signal applied to a signal line. An example of the measuring means is a picoampere meter. 30 is a light irradiation means for irradiating light onto a phototransistor formed in a source signal line of a liquid crystal display panel, and specifically, the laser is a YAG laser/N6H.

Examples include lasers. In order to irradiate a predetermined phototransistor with laser light, there is a method in which the laser light source is mounted on an XY stage and the light is focused on the phototransistor using a lens, etc., and a method in which the laser light from the laser light source is directed to a polygon mirror. Examples include a method of guiding the laser beam by reflecting it on the mirror. It is desirable that the wavelength of the laser light be relatively short, such as N, H, etc., as it can excite the transistor made of amorphous silicon more efficiently. 29 is a liquid crystal display, and is equipped with an auto-focusing mechanism, so that even if the liquid crystal display panel becomes large, it is possible to accurately irradiate the phototransistors formed at both ends of the panel with laser light.29 is a liquid crystal display. These are phototransistor formation parts formed one by one on the source signal lines of the panel. 34 is light irradiated from a light irradiation means, specifically a laser beam. 33 is a light irradiation means, signal measurement It is a control means for controlling the means and the IC81111 means.

The operation of the liquid crystal display panel inspection apparatus of the present invention formed as described above will be explained. First, the liquid crystal display panel IO is placed on the loading table 11, and its angle, position, etc. are adjusted and positioned. At this time, in order to perform accurate positioning, seven alignment marks are formed at the corners of the liquid crystal display panel, and the positions are determined by capturing the marks with a camera (not shown) and performing image processing. Next I
The control signal output terminal (not shown) of the C control I means and the gate control signal line are electrically connected using a connector or the like. On the other hand, the signal measuring means uses a plurality of probes, and the zero-order control means 3 connects the probes to each signal line of the common liquid crystal display panel by pressure-contacting the probes and electrically connecting them.
3 is a light irradiation means 3 for transmitting positioning signals such as X-Y coordinates, etc.
0, and the light irradiation means 30 is set to
The stage is moved and the laser beam is focused on the phototransistor.

When the positioning is completed, the light irradiation means 30 generates a positioning completion signal, and the signal is sent to the control n means 33.

Further, the +citdllB means generates a data clock for the gate drive IC based on a control signal from the control means 33, and applies an on voltage or an off voltage to the gate signal line. When the control means 33 recognizes the positioning completion signal, it sends a laser light irradiation signal to the light irradiation means 30, and the light irradiation means 30 irradiates the positioned phototransistor with laser light. Sends a measurement start signal to. Signal measuring means 32
is a gate drive IC on the source signal line of the liquid crystal display panel.
Measure whether the on-voltage or off-voltage or the accompanying current are superimposed. When the measurement is completed, the measured data is sent to the control means 33. Control means 3
3 detects the presence or absence of a defect and the defect mode based on the magnitude and polarity of the signal.0 As a normal inspection method, the on-voltage applied to the gate signal line is changed, and the phototransistor to be turned on is also changed, and the Inspection will be performed using the measurement data.

Hereinafter, in order to explain in detail the operation and usage method of the liquid crystal display panel inspection apparatus according to the first embodiment of the present invention, the fourth embodiment will be explained in detail.
This will be explained using figures. FIG. 4 is an explanatory diagram of an inspection method using the liquid crystal display panel inspection apparatus according to the first embodiment of the present invention. In Figure 4, 36 is the gate generated in TPT.
Drain-to-drain short circuit defect (hereinafter referred to as G-D short)
H.T.

~HT4 is a phototransistor formed on each source signal line, and the gate terminal of each phototransistor is shared and connected to the a terminal.

First of all, cross! A method for detecting I-128 will be explained. First, the signal measuring means 32 is connected to a terminal (hereinafter referred to as a common terminal) in which one terminal of the phototransistor is shared. Although FIG. 4 shows that all the source signal lines are shared and used as a common terminal, the present invention is not limited to this.

1cltill again? 11 means 31 operates the gate drive IC 31 and applies a predetermined voltage to the gate signal line. The predetermined voltage is an on voltage or an off voltage. The predetermined voltage is 0, which can control the on-voltage position applied to the gate signal line by a shift pulse signal applied to the gate drive IC 35, and is normally 0 in order from gate signal line G1.
1 (where m is an integer), the on-voltage position is moved to perform the inspection, and the light irradiation means 30 transmits the laser beam 34 from the phototransistor HT to the phototransistor HT (where n is an integer).
is irradiated, turned on, and connected to the signal measuring means 32.

The specific inspection method is to first apply an off voltage to all gate signal lines, turn on phototransistors HT to HTn in turn, and measure whether an off voltage is superimposed on the source signal line at each point in time. do. When the off-voltage is detected, the on-voltage is applied to the gate signal line G while the phototransistor at that time remains in the on-state, and the on-voltage position is sequentially shifted to GIll. When the signal detected by the signal detecting means 32 changes from an off voltage to an on voltage when shifted, a defective address can be known. Now, when I turn on the phototransistor HT8, a cross! l) Since 2B has occurred,
The off-voltage is detected by the signal measuring means 32. Next, while keeping the phototransistor HT8 in the on state, the on-voltage position is sequentially shifted from the gate signal line G1 to the gate signal line G.

When an on-voltage is applied to the gate signal line G3, the on-voltage is detected by the signal measuring means 32, thereby making it possible to detect that a cross short has occurred at the intersection of the gate signal line G3 and the source signal line S3. .

The above operation is performed by the laser beam 34 generated by the light irradiation means 30.
This is done by sequentially turning on the phototransistors formed in all the signal lines formed in the source signal line.

Further, the method for detecting a G-D short is the same as that for the cross short described above, except that in this case, an on voltage is applied to the gate signal line and the fact that the TPT is turned on is utilized. For example, the G-D short 36 of Tfi of the TFT applies an on-voltage to the gate signal line G2 and turns on the TPT connected to the signal line. Therefore G
2→G-D short 36→P, →T, →S2→HT2 current paths are generated, and the GD stain) 36 can be detected. Note that the above-mentioned cross short and GD short can be easily distinguished from each other by the magnitude of the detected signal. After inspection, the liquid crystal display panel is CC'
Each source signal line is separated by a line, and when driving a liquid crystal display panel, the phototransistor is used by applying an on voltage to terminal a. Alternatively, each phototransistor may be separated by a DD' line.

FIG. 5 is a block diagram of a liquid crystal display panel inspection apparatus according to a second embodiment of the present invention. The difference from the first embodiment is fc
The difference is that +Ijli11 means 31 controls a signal drive IC connected to the source signal line of the liquid crystal display panel. Other configurations and operations are similar to those of the first embodiment.

FIG. 6 is a plan view of a liquid crystal display panel when inspected using a liquid crystal display panel inspection apparatus according to a second embodiment of the present invention. Figure 7 is an enlarged view of the dotted line shown in Figure 6;
FIG. 8 is an enlarged view of the dotted line indicated by A in FIG. 6. 6th
In FIGS. 8 to 8, 37 is a signal drive IC 138a;
38b is a pull-out electric rod. As is clear from FIGS. 7 and 8, every other source signal line of the liquid crystal display panel is drawn out, and the signal drive IC is connected only to the even-numbered or odd-numbered source signal lines. Further, the signal control signal line for controlling the signal drive IC 37 is connected to +cl? using a connector or the like. It is electrically connected to a control signal output terminal (not shown) of the I means 31.

Also, as shown in Figure 8, every other source signal line 2
A phototransistor forming portion 41 is formed in 4, and one end of the phototransistor forming portion 41 is formed so as to be shared by a connecting portion 42. The light irradiation means establishes an electrical connection by press-contacting a probe or the like to the connecting portion 42.

The operation and usage of the liquid crystal display panel according to the second embodiment of the present invention will be described in detail below with reference to FIG. 9. FIG. 9 is an explanatory diagram of an inspection method using a liquid crystal display panel inspection apparatus according to a second embodiment of the present invention. 9th
The liquid crystal display panel shown in the figure shows a case where two TPTs are formed in one picture element. In Figure 9, 39 is TPT
Source-drain short (hereinafter referred to as S-D
), 40 is a G-D short.

First, the method for detecting G-D short is to
Then, the laser beam 34 is sequentially irradiated from the light irradiation means 30 to the phototransistors HT and HT. After measuring all six phototransistors to detect whether there is an output signal on the source signal line, apply a shift pulse signal to the gate drive IC 35. Similarly, the phototransistors are sequentially turned on, and one or more operations for detecting whether there is an output signal on the source signal line are performed on all gate signal lines and source signal lines.

Since the G-D seat 40 is currently occurring, when the on-voltage is applied to the gate signal line G, TPT T M 3
3 becomes on state, G1 →G-D short 440-4T, →S, -IH
A current path T3 is generated. Therefore, GD:>yaw) 40 can be detected. In addition, the TS of TFT...
If a G-D short occurs in the transistor, it can be detected because the following current path occurs. However, it is now assumed that a GD short has occurred in the TS of the TPT. In the above case, when a negative voltage is applied to the gate signal vAG3, the TFTs TM, , turn on, and the current paths HT, →T~→P1→TS, →G-D seat→G2 are generated. can be detected.

The S-D short detection method is the same as the -D short detection method. However, in the S-D short detection method, IC!lI?11 Means 31 Signal line drive IC
37 and sequentially applying a voltage to one predetermined source signal line.The signal application position is applied to all even-numbered source signal lines in order from S2. First, apply an ON voltage only to the gate signal line G, and apply a signal to the source signal line S2.Next, turn on the phototransistor 1-IT, and check whether a signal is applied to the source signal line S. is detected by the signal measuring means 32. Also, the phototransistor HT3 is turned on, and the source signal S is detected by the signal measuring means 32.
Detect whether a signal is applied to 3. Next, a signal is applied only to the source signal line S4, and 11T3 and HT,
are sequentially turned on, and the signal detection means 32 detects whether a signal is applied to the source signal lines S3 and S. The above operation is now performed by applying an ON voltage only to the gate signal line G2. The above operation is performed for all gate signal lines and source signal lines. Since the S-D short 39 occurs in the liquid crystal display panel shown in FIG.
Applying a signal to the source signal line S2, the game day language vAG2
When an on-voltage is applied to and the phototransistor HT is turned on, S-43-D short 39→P →TS, →S8→
Since a signal path of PS3→HT occurs, 5-D
7 Yot 39 can be detected. After the inspection process is completed, the source signal lines are cut and each source signal line is separated in the same manner as in FIG.

Effects of the Invention The liquid crystal display panel inspection apparatus of the present invention includes an IC control means, and by controlling the IC control means, a predetermined voltage can be applied to all gate signal lines. Therefore, there is no need for blowing the gate signal line in the inspection process, and the source signal line irradiates the phototransistor formed at one end of the signal line with laser light by the light irradiation means 34, which is one component of the present invention. By doing so, the signals superimposed on each source signal line can be taken out. Therefore, inspection can be performed without contact except for connecting the signal measuring means 32 to the source signal line. From the above, by using the inspection apparatus of the present invention, even a liquid crystal display panel in which the distance between signal lines is formed to be 100 μm or less can be easily inspected.

Furthermore, since the number of connection means such as probes can be significantly reduced compared to conventional inspection devices, there is no need to replace the probes, and the lifespan of the inspection device can be extended and the cost of the inspection device can be significantly reduced.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a liquid crystal display panel inspection apparatus according to a first embodiment of the present invention, FIGS.
Figures (a) and (b) are a plan view and a cross-sectional view of the liquid crystal display panel; Figures 3, 7, 8, 12, 5, and 13 are partially enlarged views of the liquid crystal display panel; The figure is an explanatory diagram of the inspection method using the liquid crystal display panel inspection apparatus according to the first embodiment of the present invention, FIG. 5 is a block diagram of the liquid crystal display panel inspection apparatus according to the second embodiment of the present invention, and FIG. FIG. 9 is a plan view of the display panel, and FIG.
FIG. 14 is a block diagram of a conventional liquid crystal display panel inspection apparatus, and FIG. 14 is an explanatory diagram of an inspection method using the conventional liquid crystal display panel inspection apparatus. 1... Board, 2.3... Drive IC
Loading section, 4...Counter electrode substrate, 5...
Sealing resin, 6...display area, 7...T
FT forming part, 8... Counter electrode, 9...
Liquid crystal, 10...Liquid crystal display panel, 11...
...Loading platform, 12.13...Probe, 14.
15... Probe positioning means, 16.17.
... Probe control means, 18 ... Resistance value measuring means, 19 ... Control 1 means, 20a, 20
b... Connection wiring, 21... Gate signal line, 22.25... Extraction electrode, 23...
... C control signal line for gate dry, 24 ... Source signal line, 26 ... Signal drive] C control signal line, 27a, 27b ... Probe, 2 days ...
...Cross short, 29...Phototransistor, 30 Light irradiation means, 31...5 Lfi control means, 32... Signal measurement means, 33... Control means , 34... light, 35......
Gate drive IC, 36, 40...G-D short, 37...Signal drive IC138a
38b... Extraction electrode, 39...
S-D short, 41...Phototransistor formation part, 42...Connection part, G1-G4...
・Gate signal line, S1~S,... Source signal line, Tll~Taa, TM++~TMs
s, T S + +~TS,...TFT,
HT, ~HT4...Phototransistor. Name of agent Patent attorney Shigetaka Awano Figure 35 - Kate Y Life IC No. 3 10-- 11-- 21-- 24-- 2? - 32...- 33...- The sequence shown by Kosei is shown in the order fltL right page 1i1. Eaves j, H IC Sairi Shinwa Te r2 Hama 9 Drama Yi Te η Kite n+i 1 4[] 36"-Gate PSl-PSl 5Sr-5S3 L Gochozu~HT4 Train Short Sai 41↓ Bay 5 Hands too FT- Shitotransisgua?ta ~ Master number Dry Life IC 38--31 Udashi scolding 38b-・-Drawing=Denden tongue 41- Nontotrasocisk formation part 42- Provocation (V 10 ゛- Sacrificial display Pakiru - 1 cut 7 + 213 -' - Gro 21 - - 2 r' - Toi Niki Goju, O 8 - Ice stake ii Gekiseihaha l? - Shiri C riff 1J bow mi zOl, 2Db --?It tE 謹7t Yu
Beni] II II II 11' H
II i II II l 11
11 11>, + ] 4 pieces 27, ゛ 2ri b Flow 2B-70 Sunko 1 0i~G4・-K) signal, conduction St~S4-゛Source signal should be T++~T4t-T FT f'u z Pa4 Fueled by search

Claims (7)

[Claims] (1) IC that controls at least one of a table on which a liquid crystal display panel is mounted, a signal drive IC that applies a signal to a source signal line formed on the liquid crystal display panel, and a gate drive IC that applies a signal to a gate signal line. control means;
A light irradiating means for irradiating light onto an optical switching element formed on a signal line of a liquid crystal display panel, and a measuring means connected to one terminal of the optical switching element and measuring a signal applied to the signal line. A liquid crystal display panel inspection device characterized by: (2) Claim (2) characterized in that the IC control means can control any output terminal of the gate drive IC to a predetermined voltage.
1) The liquid crystal display panel inspection device described above. (3) Claim (1) characterized in that the light irradiation means includes a laser light generation means, and is capable of irradiating the optical switching element of any signal line with the laser light from the laser light generation means.
) liquid crystal display panel inspection device. (4) Measurement means include current magnitude, polarity and voltage magnitude,
2. The liquid crystal display panel inspection device according to claim 1, wherein at least one of the polarities can be measured. (5) The liquid crystal display panel inspection device according to claim (3), wherein the wavelength of the laser beam is 1.5 μm or less. (6) The liquid crystal display panel inspection apparatus according to claim (5), wherein the laser beam is a YAG laser beam. (7) The liquid crystal display panel inspection apparatus according to claim (5), wherein the laser light is an N_e/H_e laser light.