JPH02133472U - - Google Patents

Info

Publication number
JPH02133472U
JPH02133472U JP4297089U JP4297089U JPH02133472U JP H02133472 U JPH02133472 U JP H02133472U JP 4297089 U JP4297089 U JP 4297089U JP 4297089 U JP4297089 U JP 4297089U JP H02133472 U JPH02133472 U JP H02133472U
Authority
JP
Japan
Prior art keywords
resist
bellows pump
pressure detection
detection device
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4297089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4297089U priority Critical patent/JPH02133472U/ja
Publication of JPH02133472U publication Critical patent/JPH02133472U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP4297089U 1989-04-14 1989-04-14 Pending JPH02133472U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4297089U JPH02133472U (US07655688-20100202-C00086.png) 1989-04-14 1989-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4297089U JPH02133472U (US07655688-20100202-C00086.png) 1989-04-14 1989-04-14

Publications (1)

Publication Number Publication Date
JPH02133472U true JPH02133472U (US07655688-20100202-C00086.png) 1990-11-06

Family

ID=31554981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4297089U Pending JPH02133472U (US07655688-20100202-C00086.png) 1989-04-14 1989-04-14

Country Status (1)

Country Link
JP (1) JPH02133472U (US07655688-20100202-C00086.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04324925A (ja) * 1991-04-25 1992-11-13 Nec Corp レジスト塗布装置
JP2002143752A (ja) * 2000-11-13 2002-05-21 Tokyo Electron Ltd 塗布液供給装置及び塗布装置
JP2015066482A (ja) * 2013-09-27 2015-04-13 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04324925A (ja) * 1991-04-25 1992-11-13 Nec Corp レジスト塗布装置
JP2002143752A (ja) * 2000-11-13 2002-05-21 Tokyo Electron Ltd 塗布液供給装置及び塗布装置
JP4646381B2 (ja) * 2000-11-13 2011-03-09 東京エレクトロン株式会社 塗布液供給装置及び塗布装置
JP2015066482A (ja) * 2013-09-27 2015-04-13 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法

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