JPH02129098A - 不純物添加半導体結晶の製造方法 - Google Patents
不純物添加半導体結晶の製造方法Info
- Publication number
- JPH02129098A JPH02129098A JP28047888A JP28047888A JPH02129098A JP H02129098 A JPH02129098 A JP H02129098A JP 28047888 A JP28047888 A JP 28047888A JP 28047888 A JP28047888 A JP 28047888A JP H02129098 A JPH02129098 A JP H02129098A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- impurity
- semiconductor crystal
- heat treatment
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28047888A JPH02129098A (ja) | 1988-11-08 | 1988-11-08 | 不純物添加半導体結晶の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28047888A JPH02129098A (ja) | 1988-11-08 | 1988-11-08 | 不純物添加半導体結晶の製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19576093A Division JPH06293600A (ja) | 1993-08-06 | 1993-08-06 | 不純物添加半導体結晶の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02129098A true JPH02129098A (ja) | 1990-05-17 |
JPH0367998B2 JPH0367998B2 (enrdf_load_stackoverflow) | 1991-10-24 |
Family
ID=17625638
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28047888A Granted JPH02129098A (ja) | 1988-11-08 | 1988-11-08 | 不純物添加半導体結晶の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02129098A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06293600A (ja) * | 1993-08-06 | 1994-10-21 | Stanley Electric Co Ltd | 不純物添加半導体結晶の製造方法 |
US5535699A (en) * | 1993-05-31 | 1996-07-16 | Mitsubishi Denki Kabushiki Kaisha | Method of making II-VI semiconductor infrared light detector |
JP2009161401A (ja) * | 2008-01-08 | 2009-07-23 | Mitsubishi Chemicals Corp | 単結晶中の不純物元素含有量の制御方法、単結晶および半導体デバイス |
-
1988
- 1988-11-08 JP JP28047888A patent/JPH02129098A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5535699A (en) * | 1993-05-31 | 1996-07-16 | Mitsubishi Denki Kabushiki Kaisha | Method of making II-VI semiconductor infrared light detector |
JPH06293600A (ja) * | 1993-08-06 | 1994-10-21 | Stanley Electric Co Ltd | 不純物添加半導体結晶の製造方法 |
JP2009161401A (ja) * | 2008-01-08 | 2009-07-23 | Mitsubishi Chemicals Corp | 単結晶中の不純物元素含有量の制御方法、単結晶および半導体デバイス |
Also Published As
Publication number | Publication date |
---|---|
JPH0367998B2 (enrdf_load_stackoverflow) | 1991-10-24 |
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