JPH02127032U - - Google Patents
Info
- Publication number
- JPH02127032U JPH02127032U JP3708889U JP3708889U JPH02127032U JP H02127032 U JPH02127032 U JP H02127032U JP 3708889 U JP3708889 U JP 3708889U JP 3708889 U JP3708889 U JP 3708889U JP H02127032 U JPH02127032 U JP H02127032U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- partition wall
- sample
- processing chamber
- sample processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 3
Description
第１図は本考案に係るプラズマアツシング装置
の模式的正面断面図、第２図は従来のバレル型の
プラズマアツシング装置の模式的正面断面図、第
３図は従来のダウンフロー型のプラズマアツシン
グ装置の模式的正面断面図、第４図は従来の誘電
体被覆線路を利用する方式のプラズマアツシング
装置の模式的正面断面図である。
１３…仕切壁、４…プラズマ生成室、５…試料
処理室、Ｓ…試料。
FIG. 1 is a schematic front sectional view of a plasma ashing device according to the present invention, FIG. 2 is a schematic front sectional view of a conventional barrel-type plasma ashing device, and FIG. 3 is a schematic front sectional view of a conventional down-flow plasma ashing device. FIG. 4 is a schematic front sectional view of a plasma ashing device using a conventional dielectric covered line. 13... Partition wall, 4... Plasma generation chamber, 5... Sample processing chamber, S... Sample.
Claims (1)
との間に、該試料処理室へプラズマを導入する複
数の孔を有する仕切壁を設けたプラズマアツシン
グ装置において、 前記プラズマ導入孔の面積率が、前記仕切壁の
中央部から周辺部に向かうに従つて大きくなるよ
うにしたことを特徴とするプラズマアツシング装
置。[Scope of Claim for Utility Model Registration] A plasma athering device in which a partition wall having a plurality of holes for introducing plasma into the sample processing chamber is provided between a plasma generation chamber and a sample processing chamber for processing a sample, A plasma ashing device characterized in that the area ratio of the plasma introduction holes increases from the center to the periphery of the partition wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3708889U JPH02127032U (en) | 1989-03-28 | 1989-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3708889U JPH02127032U (en) | 1989-03-28 | 1989-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02127032U true JPH02127032U (en) | 1990-10-19 |
Family
ID=31543885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3708889U Pending JPH02127032U (en) | 1989-03-28 | 1989-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02127032U (en) |
-
1989
- 1989-03-28 JP JP3708889U patent/JPH02127032U/ja active Pending
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