JPH02122496U - - Google Patents
Info
- Publication number
- JPH02122496U JPH02122496U JP3111189U JP3111189U JPH02122496U JP H02122496 U JPH02122496 U JP H02122496U JP 3111189 U JP3111189 U JP 3111189U JP 3111189 U JP3111189 U JP 3111189U JP H02122496 U JPH02122496 U JP H02122496U
- Authority
- JP
- Japan
- Prior art keywords
- heat dissipation
- dissipation sheet
- diamond
- silicon
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000017525 heat dissipation Effects 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3111189U JPH02122496U (enrdf_load_stackoverflow) | 1989-03-17 | 1989-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3111189U JPH02122496U (enrdf_load_stackoverflow) | 1989-03-17 | 1989-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122496U true JPH02122496U (enrdf_load_stackoverflow) | 1990-10-08 |
Family
ID=31256727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3111189U Pending JPH02122496U (enrdf_load_stackoverflow) | 1989-03-17 | 1989-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122496U (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59137686A (ja) * | 1982-09-22 | 1984-08-07 | ダンフオス・エ−・エス | 空気力式の調整装置 |
-
1989
- 1989-03-17 JP JP3111189U patent/JPH02122496U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59137686A (ja) * | 1982-09-22 | 1984-08-07 | ダンフオス・エ−・エス | 空気力式の調整装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0631185B2 (ja) | 炭化珪素発熱体の製造方法 | |
| JP2001023759A (ja) | 熱分解窒化ホウ素放射ヒーター | |
| JP2002146540A (ja) | 基板加熱装置 | |
| EP0658066B1 (en) | Diamond heater | |
| JPH02122496U (enrdf_load_stackoverflow) | ||
| KR970009470A (ko) | 박막형 전열기 | |
| JPH04160788A (ja) | カーボンヒータ | |
| JPH0521871Y2 (enrdf_load_stackoverflow) | ||
| JPH1174068A5 (enrdf_load_stackoverflow) | ||
| JPH0561754B2 (enrdf_load_stackoverflow) | ||
| JPH0864874A (ja) | 熱電素子 | |
| JPH036862U (enrdf_load_stackoverflow) | ||
| JP3812600B2 (ja) | 静電吸着機能を有するウエハ加熱装置 | |
| JPH01214194A (ja) | 熱伝導性基板 | |
| JPH01127295U (enrdf_load_stackoverflow) | ||
| JPH0745918Y2 (ja) | 調理用セラミックヒーター | |
| JPH0374636U (enrdf_load_stackoverflow) | ||
| JPH0482839U (enrdf_load_stackoverflow) | ||
| KR950021341A (ko) | 정전척크 부착 세라믹 히터 | |
| JPS61147275U (enrdf_load_stackoverflow) | ||
| JPS60119743U (ja) | 化学的気相付着装置 | |
| JPH08227882A (ja) | ウエハの焼付装置 | |
| JPH0573262B2 (enrdf_load_stackoverflow) | ||
| JPH01123352U (enrdf_load_stackoverflow) | ||
| JPH10335321A (ja) | ホットプレート装置 |