JPH02120744U - - Google Patents

Info

Publication number
JPH02120744U
JPH02120744U JP3009589U JP3009589U JPH02120744U JP H02120744 U JPH02120744 U JP H02120744U JP 3009589 U JP3009589 U JP 3009589U JP 3009589 U JP3009589 U JP 3009589U JP H02120744 U JPH02120744 U JP H02120744U
Authority
JP
Japan
Prior art keywords
steerers
horizontal
vertical
microbeam
collimator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3009589U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3009589U priority Critical patent/JPH02120744U/ja
Publication of JPH02120744U publication Critical patent/JPH02120744U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案の実施例を示す配置図、第２
図は第１図の作用を示す流れ図、第３図は従来例
の配置図である。 １……加速器、３……分析電磁石、５……垂直
ステアラ、６……水平ステアラ、７，８……コリ
メータ、９……集束レンズ、１１……スリツト、
１２……フアラデイカツプ。 Figure 1 is a layout diagram showing an embodiment of this invention;
The figure is a flowchart showing the operation of FIG. 1, and FIG. 3 is a layout diagram of a conventional example. DESCRIPTION OF SYMBOLS 1...Accelerator, 3...Analysis electromagnet, 5...Vertical steerer, 6...Horizontal steerer, 7, 8...Collimator, 9...Focusing lens, 11...Slit,
12...Fuaraday Cup.

Claims (1)

【実用新案登録請求の範囲】 加速器と、前記加速器によつて加速されたビー
ムを偏向する分析電磁石と、前記偏向電磁石によ
つて偏向されたビームを偏向する垂直、水平ステ
アラと、マイクロビーム化するコリメータおよび
集束レンズとを備えてなるマイクロビーム装置に
おいて、 前記垂直、水平ステアラとコリメータとの間に
、スリツトと、前記スリツトを通過したビームが
入射されるフアラデカツプとを、ビームライン軸
に沿つて配置するとともに、前記フアラデカツプ
に入射するビーム電流が最大値となるように、前
記垂直、水平ステアラによるビーム偏向を調整す
る制御装置を備えてなるマイクロビーム装置。[Claims for Utility Model Registration] An accelerator, an analysis electromagnet for deflecting a beam accelerated by the accelerator, vertical and horizontal steerers for deflecting the beam deflected by the deflection electromagnet, and converting it into a microbeam. In a microbeam device comprising a collimator and a focusing lens, a slit and a Farade cup into which the beam passing through the slit is incident are arranged along the beam line axis between the vertical and horizontal steerers and the collimator. The microbeam device further comprises a control device for adjusting beam deflection by the vertical and horizontal steerers so that the beam current incident on the Faraday cup reaches a maximum value.
JP3009589U 1989-03-16 1989-03-16 Pending JPH02120744U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3009589U JPH02120744U (en) 1989-03-16 1989-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3009589U JPH02120744U (en) 1989-03-16 1989-03-16

Publications (1)

Publication Number Publication Date
JPH02120744U true JPH02120744U (en) 1990-09-28

Family

ID=31254854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3009589U Pending JPH02120744U (en) 1989-03-16 1989-03-16

Country Status (1)

Country Link
JP (1) JPH02120744U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009540528A (en) * 2006-06-12 2009-11-19 アクセリス テクノロジーズ， インコーポレイテッド Beam angle adjustment in ion implanter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009540528A (en) * 2006-06-12 2009-11-19 アクセリス テクノロジーズ， インコーポレイテッド Beam angle adjustment in ion implanter

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