JPH0211790B2 - - Google Patents
Info
- Publication number
- JPH0211790B2 JPH0211790B2 JP59058553A JP5855384A JPH0211790B2 JP H0211790 B2 JPH0211790 B2 JP H0211790B2 JP 59058553 A JP59058553 A JP 59058553A JP 5855384 A JP5855384 A JP 5855384A JP H0211790 B2 JPH0211790 B2 JP H0211790B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- oxides
- groups
- densely sintered
- aluminum nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 9
- 239000000654 additive Substances 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 5
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical group O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- 150000002910 rare earth metals Chemical class 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 2
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims description 2
- 230000000996 additive effect Effects 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 5
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 5
- 238000005245 sintering Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 231100000206 health hazard Toxicity 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/0305—Selection of materials for the tube or the coatings thereon
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Ceramic Products (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
発明の分野
本発明は緻密に焼結されたセラミツク材料から
なるレーザー管部材に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to laser tube members made of densely sintered ceramic material.
従来技術
良好な熱伝導性と大きな電気抵抗をもつために
酸化アルミニウムは管部材として使用され、必要
条件が酸化アルミニウムセラミツクによつてはも
はや満されない場合には管部材用に緻密に焼結さ
れた酸化ベリリウムが使用される（ウルマン・エ
ンシクロペデイア・デル・テヒニツシエン・ヘミ
ー第４版、1979年、17巻、525−527頁）。Prior Art Due to its good thermal conductivity and high electrical resistance, aluminum oxide is used as tube parts and densely sintered for tube parts when the requirements are no longer met by aluminum oxide ceramics. Beryllium oxide is used (Ullmann Encyclopédia der Technicien Chemie 4th edition, 1979, Vol. 17, pp. 525-527).
緻密に焼結された酸化ベリリウムは非常に良好
な諸性質をもつが、高価であり且つ酸化ベリリウ
ム紛末が有毒であるために、広く使用されるには
至つていない。 Although densely sintered beryllium oxide has very good properties, it has not been widely used because it is expensive and beryllium oxide powder is toxic.
発明の目的
本発明の目的は緻密に焼結した酸化ベリリウム
と同様な良好な諸性質をもち、しかもコスト的に
有利で健康上の危害なく製造、加工できるレーザ
ー管部材用材料を見出すにある。OBJECTS OF THE INVENTION The object of the present invention is to find a material for laser tube members that has the same good properties as densely sintered beryllium oxide, is cost-effective, and can be manufactured and processed without causing health hazards.
発明の概要
この本発明の目的はアルカリ土類金属の酸化
物、希土類金属の酸化物、周期表族、族およ
び族の遷移元素の酸化物、酸化アルミニウムま
たは酸化ケイ素から選択された１種または２種以
上の酸化物添加物を0.1〜10重量％含む緻密に焼
結された窒化アルミニウムからなるレーザー管部
材により達成される。SUMMARY OF THE INVENTION The object of the present invention is to provide one or two selected from oxides of alkaline earth metals, oxides of rare earth metals, oxides of transition elements of groups, groups and groups of the periodic table, aluminum oxide or silicon oxide. This is accomplished with a laser tube component made of densely sintered aluminum nitride containing 0.1-10% by weight of one or more oxide additives.
本発明による緻密に焼結された窒化アルミニウ
ムからなる管部材は高強度、良好な温度変化安定
性、高電気抵抗及び良好な誘電特性をもつ。緻密
に焼結された窒化アルミニウム管部材は酸化ベリ
リウムからなる管部材と異つて高温度においても
良好な熱伝導性を保持するから、この部材はレー
ザー管に特に適する。 The tube member made of densely sintered aluminum nitride according to the present invention has high strength, good temperature change stability, high electrical resistance and good dielectric properties. Densely sintered aluminum nitride tubes, unlike tubes made of beryllium oxide, retain good thermal conductivity even at high temperatures, making them particularly suitable for laser tubes.
本発明による管部材は緻密に焼結された窒化ア
ルミニウム比較的大きい熱膨張率をもつために金
属とよく結合する。 The tube member according to the present invention is made of densely sintered aluminum nitride and has a relatively high coefficient of thermal expansion, so it bonds well with metal.
本発明による管部材を製造するための原料は好
ましくは窒化アルミニウムと0.1〜10重量％の酸
化物添化物との紛未状混合物である。この混合物
を冷間プレスにより生成形体を造り、この生成形
体を不活性雰囲気、好ましくは窒素雰囲気下で緻
密焼結体に焼結する。 The raw material for producing the tubular member according to the invention is preferably a neat mixture of aluminum nitride and 0.1 to 10% by weight of oxide additives. This mixture is cold pressed to form a green body, and this green body is sintered into a dense sintered body under an inert atmosphere, preferably a nitrogen atmosphere.
緻密に焼結された窒化アルミニウムの熱膨張係
数及び熱伝導性は酸化物添加物の種類及び量によ
つて所望のように変えることができる。 The coefficient of thermal expansion and thermal conductivity of densely sintered aluminum nitride can be varied as desired by the type and amount of oxide additives.
酸化物添加物としてはアルカリ土類金属の酸化
物、希土類金属（スカンジウム、イツトリウム、
及びランタンないしルテシウムの金属）の酸化
物、周期表第族、第族及び第族の遷移金属
の酸化物、酸化アルミニウム及び酸化ケイ素を単
独または複数種使用できる。 Oxide additives include alkaline earth metal oxides, rare earth metals (scandium, yttrium,
and lanthanum or lutetium), oxides of transition metals of Groups 1 and 3 of the periodic table, aluminum oxide, and silicon oxide may be used singly or in combination.
特に酸化イツトリウムが好適である。 Yttrium oxide is particularly suitable.
酸化イツトリウムを含有する緻密に焼結された
窒化アルミニウムは意外にも湿気に対して特に安
定である。 Densely sintered aluminum nitride containing yttrium oxide is surprisingly particularly stable against moisture.
本発明による管部材は有利には下記の実施例に
記載のようにして行われる。 The tube element according to the invention is advantageously produced as described in the examples below.
実施例
紛末状窒化アルミニウム99重量％と紛末状酸化
イツトリウム１重量％とからなる混合物5000ｇを
ボールミル中で磁器磨砕材を用いて保護ガスとし
てアルゴンを用いて40時間磨砕し、次いで100μ
のふるい目のふるいで分級した。EXAMPLE 5000 g of a mixture consisting of 99% by weight of powdered aluminum nitride and 1% by weight of powdered yttrium oxide were milled in a ball mill with a porcelain grinding material for 40 hours using argon as protective gas, and then 100μ
It was classified using a sieve with a mesh size.
分級により得た100μ未満の粒子寸法の紛末を
等圧冷間プレス（圧力2500バール）により管状圧
さく体を造り、電熱焼結炉中に置いた。10-5ミリ
バール（mbar）に減圧後に焼結炉中に窒素を圧
力５ミリバールになるまで導入した。この圧力を
保ちながら焼結炉を３時間以内に1200℃に達する
まで加熱した。次いで窒素圧力を140ミリバール
に、温度を１時間以内に1850℃に高めた。この時
点で窒素圧力は180ミリバールに高まつた。 The powder with particle size less than 100μ obtained by classification was made into tubular compacts by isobaric cold pressing (pressure 2500 bar) and placed in an electric sintering furnace. After reducing the pressure to 10 -5 mbar, nitrogen was introduced into the sintering furnace until a pressure of 5 mbar was reached. While maintaining this pressure, the sintering furnace was heated to 1200° C. within 3 hours. The nitrogen pressure was then increased to 140 mbar and the temperature to 1850° C. within 1 hour. At this point the nitrogen pressure increased to 180 mbar.
この温度と圧力を２時間にわたつて保ち、次い
で冷却した。焼結炉を換気後、緻密に焼結した管
部材を取出した。 This temperature and pressure was maintained for 2 hours and then cooled. After ventilating the sintering furnace, the densely sintered pipe member was taken out.
こうして製造した管部材は熱膨張係数が４×
10-6／キログラム(K)で、熱伝導率が200W／ｍＫ
で、曲げ強さが320N／mm2であつた。 The tube member manufactured in this way has a coefficient of thermal expansion of 4×
10 -6 / kilogram (K), thermal conductivity is 200W/mK
The bending strength was 320N/ mm2 .
Claims (1)
化物、周期表族、族および族の遷移元素の
酸化物、酸化アルミニウムまたは酸化ケイ素から
選択された１種または２種以上の酸化物添加物を
0.1〜10重量％含む緻密に焼結された窒化アルミ
ニウムからなるレーザー管部材。 ２ 酸化物添加物が酸化イツトリウムである特許
請求の範囲第１項記載のレーザー管部材。[Scope of Claims] 1. One or more selected from oxides of alkaline earth metals, oxides of rare earth metals, oxides of transition elements of groups, groups, and groups of the periodic table, aluminum oxide, or silicon oxide. oxide additives
Laser tube member made of densely sintered aluminum nitride containing 0.1 to 10% by weight. 2. The laser tube member according to claim 1, wherein the oxide additive is yttrium oxide.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3313836.2 | 1983-04-16 | ||
| DE19833313836 DE3313836C2 (en) | 1983-04-16 | 1983-04-16 | Use of aluminum nitride for laser tube components |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59194183A JPS59194183A (en) | 1984-11-02 |
| JPH0211790B2 true JPH0211790B2 (en) | 1990-03-15 |
Family
ID=6196574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59058553A Granted JPS59194183A (en) | 1983-04-16 | 1984-03-28 | Pipe member |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS59194183A (en) |
| CH (1) | CH658855A5 (en) |
| DE (1) | DE3313836C2 (en) |
| FR (1) | FR2544305B1 (en) |
| GB (1) | GB2140458B (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3247985C2 (en) * | 1982-12-24 | 1992-04-16 | W.C. Heraeus Gmbh, 6450 Hanau | Ceramic carrier |
| US4547471A (en) * | 1983-11-18 | 1985-10-15 | General Electric Company | High thermal conductivity aluminum nitride ceramic body |
| US4578234A (en) * | 1984-10-01 | 1986-03-25 | General Electric Company | Process of pressureless sintering to produce dense high thermal conductivity ceramic body of deoxidized aluminum nitride |
| US4578233A (en) * | 1984-11-01 | 1986-03-25 | General Electric Company | Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride |
| JPH0649613B2 (en) * | 1984-11-08 | 1994-06-29 | 株式会社東芝 | Aluminum nitride sintered body and manufacturing method thereof |
| US4746637A (en) * | 1984-11-08 | 1988-05-24 | Kabushiki Kaisha Toshiba | Aluminum nitride sintered body and process for producing the same |
| US4578365A (en) * | 1984-11-26 | 1986-03-25 | General Electric Company | High thermal conductivity ceramic body of aluminum nitride |
| US4578364A (en) * | 1984-12-07 | 1986-03-25 | General Electric Company | High thermal conductivity ceramic body of aluminum nitride |
| US4578232A (en) * | 1984-12-17 | 1986-03-25 | General Electric Company | Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride |
| DE3627317A1 (en) * | 1985-08-13 | 1987-02-19 | Tokuyama Soda Kk | SINTERABLE ALUMINUM NITRIDE COMPOSITION, SINTER BODY FROM THIS COMPOSITION AND METHOD FOR THE PRODUCTION THEREOF |
| GB2213500B (en) * | 1985-08-13 | 1990-05-30 | Tokuyama Soda Kk | Sinterable aluminum nitride composition |
| US4897372A (en) * | 1985-12-18 | 1990-01-30 | General Electric Company | High thermal conductivity ceramic body |
| FR2595876A1 (en) * | 1986-03-13 | 1987-09-18 | Roulot Maurice | Tube for a laser generator of the ionised gas type |
| US4764321A (en) * | 1986-03-28 | 1988-08-16 | General Electric Company | High thermal conductivity ceramic body |
| US4818455A (en) * | 1986-05-30 | 1989-04-04 | General Electric Company | High thermal conductivity ceramic body |
| US5242872A (en) * | 1986-07-18 | 1993-09-07 | Tokuyama Soda Kabushiki Kaisha | Process for producing aluminum nitride sintered body |
| JPH0717455B2 (en) * | 1986-07-18 | 1995-03-01 | 株式会社トクヤマ | Method for manufacturing aluminum nitride sintered body |
| JP2524185B2 (en) * | 1988-02-29 | 1996-08-14 | 京セラ株式会社 | Aluminum nitride sintered body and manufacturing method thereof |
| JPH0226872A (en) * | 1988-07-12 | 1990-01-29 | Sumitomo Electric Ind Ltd | Window for transmitting high-frequency wave |
| JP2962466B2 (en) * | 1997-01-06 | 1999-10-12 | 株式会社東芝 | Aluminum nitride sintered body |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5554793A (en) * | 1978-10-12 | 1980-04-22 | Campbell Frank Jun | Shaped piece of refractory ceramic fibers |
| JPS57179080A (en) * | 1981-04-27 | 1982-11-04 | Nippon Kagaku Togyo Kk | Sintered ceramic pipe end sealing method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3108887A (en) * | 1959-05-06 | 1963-10-29 | Carborundum Co | Refractory articles and method of making same |
| DE1209409B (en) * | 1959-12-24 | 1966-01-20 | Deutsche Edelstahlwerke Ag | Hot press mold |
| BE620323A (en) * | 1961-07-21 | |||
| US3436179A (en) * | 1964-07-27 | 1969-04-01 | Tokyo Shibaura Electric Co | Method of preparing sintered masses of aluminum nitride |
| DE1906522B2 (en) * | 1968-02-10 | 1972-01-13 | Tokyo Shibaura Electric Co. Ltd., Kawasaki, Kanagawa (Japan) | METHOD OF MANUFACTURING A Sintered ALUMINUM NITRIDE YTTRIUM OXIDE ARTICLE |
| JPS48100407A (en) * | 1972-03-31 | 1973-12-18 | ||
| JPS5855377A (en) * | 1981-09-28 | 1983-04-01 | 株式会社東芝 | Manufacture of aluminum nitride sintered body |
| DE3347862C2 (en) * | 1982-09-17 | 1988-05-11 | Tokuyama Soda K.K., Tokuyama, Yamaguchi, Jp |
-
1983
- 1983-04-16 DE DE19833313836 patent/DE3313836C2/en not_active Expired
-
1984
- 1984-02-14 CH CH71484A patent/CH658855A5/en not_active IP Right Cessation
- 1984-03-15 GB GB08406819A patent/GB2140458B/en not_active Expired
- 1984-03-28 JP JP59058553A patent/JPS59194183A/en active Granted
- 1984-04-16 FR FR8405985A patent/FR2544305B1/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5554793A (en) * | 1978-10-12 | 1980-04-22 | Campbell Frank Jun | Shaped piece of refractory ceramic fibers |
| JPS57179080A (en) * | 1981-04-27 | 1982-11-04 | Nippon Kagaku Togyo Kk | Sintered ceramic pipe end sealing method |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2544305B1 (en) | 1990-05-04 |
| DE3313836A1 (en) | 1984-10-18 |
| DE3313836C2 (en) | 1985-08-29 |
| FR2544305A1 (en) | 1984-10-19 |
| GB2140458B (en) | 1986-03-19 |
| CH658855A5 (en) | 1986-12-15 |
| JPS59194183A (en) | 1984-11-02 |
| GB8406819D0 (en) | 1984-04-18 |
| GB2140458A (en) | 1984-11-28 |
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