GB2140458A - Tubular components of densely sintered ceramic materials - Google Patents

Tubular components of densely sintered ceramic materials Download PDF

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Publication number
GB2140458A
GB2140458A GB08406819A GB8406819A GB2140458A GB 2140458 A GB2140458 A GB 2140458A GB 08406819 A GB08406819 A GB 08406819A GB 8406819 A GB8406819 A GB 8406819A GB 2140458 A GB2140458 A GB 2140458A
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GB
United Kingdom
Prior art keywords
densely sintered
oxide
aluminium nitride
component
satisfactory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08406819A
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GB2140458B (en
GB8406819D0 (en
Inventor
Waltraud Werdecker
Fritz Aldinger
Rainer Nitsche
Klaus-Ludwig Schiff
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WC Heraus GmbH and Co KG
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WC Heraus GmbH and Co KG
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Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Publication of GB8406819D0 publication Critical patent/GB8406819D0/en
Publication of GB2140458A publication Critical patent/GB2140458A/en
Application granted granted Critical
Publication of GB2140458B publication Critical patent/GB2140458B/en
Expired legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/0305Selection of materials for the tube or the coatings thereon

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Rigid Pipes And Flexible Pipes (AREA)
  • Lasers (AREA)

Abstract

Tubular components made from densely sintered aluminium nitride which has a satisfactory thermal conductivity, a high electrical resistance, satisfactory dielectric properties, as well as high strength. Advantageously one or more oxidic materials may be added to the aluminium nitride. Preferably yttrium oxide is used as an additive although the additives may consist generally of oxides of alkaline earth metals or of rare earth metals or of transition elements of the IVth, Vth or VIth groups of the periodic system or they may consist of aluminium oxide or silicon oxide. The invention is particularly useful for making laser tube components.

Description

SPECIFICATION Tubular components of densely sintered ceramic materials The present invention relates to tubular components of densely sintered ceramic materials.
Due to their satisfactory thermal conductivity and their high electrical resistance, use has hitherto been made for tubular components, or densely sintered aluminium oxide but if aluminium oxide ceramics do not fulfil the requirements, then densely sintered beryllium oxide is utilised (see Ullmanns Encyklopä- die der Technischen Chemie, 4th Edition, 1979, volume 17, pages 525-527).
Although densely sintered beryllium oxide has very satisfactory qualities, its high cost and the toxicity of the beryllium oxide dust militate against an extensive application of this material.
The invention consequently has as an object a tubular component made from a material that has satisfactory qualities analogous to those of densely sintered beryllium oxide, but which may be produced more economically and in a manner not injurious to health, and processed in like manner.
Accordingly the invention consists in a tubular component made of densely sintered aluminium nitride. This material meets the requirements hereinabove set forth.
Tube components of densely sintered aluminium nitride thus possess high strength, satisfactory resistance to sudden changes in temperature, high electrical resistance and satisfactory dielectric properties. Since, by contrast to those made of beryllium oxide, they retain their satisfactory thermal conductivity even at high temperatures, these components are particularly appropriate for laser tubes.
In view of the comparatively great coefficient of thermal expansion of the densely sintered aluminium nitride, the tube components in accordance with the invention may be joined satisfactorily to metals.
Pulverulent mixtures of aluminium nitride and 0.1 - 10% by weight of an oxidic additive, preferably form the initial material for the production of the tube components. These mixtures are processed by pressing in the cold state into green mouldings which are densely sintered in an inert atmosphere, preferably under nitrogen.
The coefficient of thermal expansion and the thermal conductivity of the densely sintered aluminium nitride may be affected in required manner by the nature and quantity of the oxidic additive.
One or more of the oxides of the alkaline earth metals, of the rare earth metals (scandium, yttrium and lanthanum up to lutetium), of the transition elements of the IVth, Vth and Vlth group of the periodic system, aluminium oxide and silicon oxide, may be utilised as oxidic additives.
Yttrium oxide proved to be particularly satisfactory.
Densely sintered aluminium nitride which contains yttrium oxide is unexpectedly extremely stable against humidity.
The production of tube components in accordance with the invention may advantageously be performed as described in the following example.
Example 5000 grammes of a mixture of 99% by weight of pulverulent aluminium nitride and 1% byweightof pulverulent yttrium oxide are ground for 40 hours in a ball mill containing ceramic grinding elements and under argon as a protective gas, and then passed through a screen having a mesh size of 100 micrometres.
A tubular pressing is produced by isostatic cold pressing (2500 bar pressure) from the powder having a grain size of less than 100 micrometres obtained by screening, and placed in an electrically heated sintering furnace. After evacuation down to 10-5 mbar, nitrogen is fed into the sintering furnace until the pressure amounts to 5 mbar. The sintering furnace is then heated whilst maintaining this pressure, until a temperature of 1200 C is reached within 3 hours. The nitrogen pressure is then raised to 140 mbar, and the temperature is raised to 1 850 C within an hour, when the nitrogen pressure amounts to 180 mbar.
This temperature and pressure are maintained for 2 hours, after which a cooling operation is performed.
The densely sintered tube components are extracted after venting the sintering furnace.
The tubular component produced in this manner has a coefficient of thermal expansion of 4 x 1 O-6K-', a thermal conductivity of 200 W/m K and a flexural strength of 320 N/mm2.
1. A tubular component of densely sintered aluminium nitride.
2. A component as claimed in claim 1, wherein one or more oxidic materials are added to the aluminium nitride.
3. A component as claimed in claim 2, wherein the additives are oxides of alkaline earth metals, of rare earth metals, of the transition elements of the IVth, Vth or Vlth group of the periodic system, or aluminium oxide or silicon oxide.
4. A component as claimed in claim 2 or 3, wherein the proportion of oxidic additives amounts to 0.1 to 10% by weight.
5. A component as claimed in claim 2,3 or 4, wherein the oxidic additive is yttrium oxide.
6. A method of making a tubular component substantially as hereinbefore described with reference to the specific Example.
7. A lasertube component whenever made from a component as claimed in any of the preceding claims.
**WARNING** end of DESC field may overlap start of CLMS **.

Claims (7)

**WARNING** start of CLMS field may overlap end of DESC **. SPECIFICATION Tubular components of densely sintered ceramic materials The present invention relates to tubular components of densely sintered ceramic materials. Due to their satisfactory thermal conductivity and their high electrical resistance, use has hitherto been made for tubular components, or densely sintered aluminium oxide but if aluminium oxide ceramics do not fulfil the requirements, then densely sintered beryllium oxide is utilised (see Ullmanns Encyklopä- die der Technischen Chemie, 4th Edition, 1979, volume 17, pages 525-527). Although densely sintered beryllium oxide has very satisfactory qualities, its high cost and the toxicity of the beryllium oxide dust militate against an extensive application of this material. The invention consequently has as an object a tubular component made from a material that has satisfactory qualities analogous to those of densely sintered beryllium oxide, but which may be produced more economically and in a manner not injurious to health, and processed in like manner. Accordingly the invention consists in a tubular component made of densely sintered aluminium nitride. This material meets the requirements hereinabove set forth. Tube components of densely sintered aluminium nitride thus possess high strength, satisfactory resistance to sudden changes in temperature, high electrical resistance and satisfactory dielectric properties. Since, by contrast to those made of beryllium oxide, they retain their satisfactory thermal conductivity even at high temperatures, these components are particularly appropriate for laser tubes. In view of the comparatively great coefficient of thermal expansion of the densely sintered aluminium nitride, the tube components in accordance with the invention may be joined satisfactorily to metals. Pulverulent mixtures of aluminium nitride and 0.1 - 10% by weight of an oxidic additive, preferably form the initial material for the production of the tube components. These mixtures are processed by pressing in the cold state into green mouldings which are densely sintered in an inert atmosphere, preferably under nitrogen. The coefficient of thermal expansion and the thermal conductivity of the densely sintered aluminium nitride may be affected in required manner by the nature and quantity of the oxidic additive. One or more of the oxides of the alkaline earth metals, of the rare earth metals (scandium, yttrium and lanthanum up to lutetium), of the transition elements of the IVth, Vth and Vlth group of the periodic system, aluminium oxide and silicon oxide, may be utilised as oxidic additives. Yttrium oxide proved to be particularly satisfactory. Densely sintered aluminium nitride which contains yttrium oxide is unexpectedly extremely stable against humidity. The production of tube components in accordance with the invention may advantageously be performed as described in the following example. Example 5000 grammes of a mixture of 99% by weight of pulverulent aluminium nitride and 1% byweightof pulverulent yttrium oxide are ground for 40 hours in a ball mill containing ceramic grinding elements and under argon as a protective gas, and then passed through a screen having a mesh size of 100 micrometres. A tubular pressing is produced by isostatic cold pressing (2500 bar pressure) from the powder having a grain size of less than 100 micrometres obtained by screening, and placed in an electrically heated sintering furnace. After evacuation down to 10-5 mbar, nitrogen is fed into the sintering furnace until the pressure amounts to 5 mbar. The sintering furnace is then heated whilst maintaining this pressure, until a temperature of 1200 C is reached within 3 hours. The nitrogen pressure is then raised to 140 mbar, and the temperature is raised to 1 850 C within an hour, when the nitrogen pressure amounts to 180 mbar. This temperature and pressure are maintained for 2 hours, after which a cooling operation is performed. The densely sintered tube components are extracted after venting the sintering furnace. The tubular component produced in this manner has a coefficient of thermal expansion of 4 x 1 O-6K-', a thermal conductivity of 200 W/m K and a flexural strength of 320 N/mm2. CLAIMS
1. A tubular component of densely sintered aluminium nitride.
2. A component as claimed in claim 1, wherein one or more oxidic materials are added to the aluminium nitride.
3. A component as claimed in claim 2, wherein the additives are oxides of alkaline earth metals, of rare earth metals, of the transition elements of the IVth, Vth or Vlth group of the periodic system, or aluminium oxide or silicon oxide.
4. A component as claimed in claim 2 or 3, wherein the proportion of oxidic additives amounts to 0.1 to 10% by weight.
5. A component as claimed in claim 2,3 or 4, wherein the oxidic additive is yttrium oxide.
6. A method of making a tubular component substantially as hereinbefore described with reference to the specific Example.
7. A lasertube component whenever made from a component as claimed in any of the preceding claims.
GB08406819A 1983-04-16 1984-03-15 Tubular components of densely sintered ceramic materials Expired GB2140458B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833313836 DE3313836C2 (en) 1983-04-16 1983-04-16 Use of aluminum nitride for laser tube components

Publications (3)

Publication Number Publication Date
GB8406819D0 GB8406819D0 (en) 1984-04-18
GB2140458A true GB2140458A (en) 1984-11-28
GB2140458B GB2140458B (en) 1986-03-19

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Family Applications (1)

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GB08406819A Expired GB2140458B (en) 1983-04-16 1984-03-15 Tubular components of densely sintered ceramic materials

Country Status (5)

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JP (1) JPS59194183A (en)
CH (1) CH658855A5 (en)
DE (1) DE3313836C2 (en)
FR (1) FR2544305B1 (en)
GB (1) GB2140458B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2165263A (en) * 1984-10-01 1986-04-09 Gen Electric High thermal conductivity ceramic body
GB2167771A (en) * 1984-11-26 1986-06-04 Gen Electric Sintered high thermal conductivity aluminium nitride ceramic body
GB2168722A (en) * 1984-12-07 1986-06-25 Gen Electric High thermal conductivity ceramic body
GB2179677A (en) * 1985-08-13 1987-03-11 Tokuyama Soda Kk Sintered aluminum nitride
GB2213500A (en) * 1985-08-13 1989-08-16 Tokuyama Soda Kk Sinterable aluminum nitride composition
US5242872A (en) * 1986-07-18 1993-09-07 Tokuyama Soda Kabushiki Kaisha Process for producing aluminum nitride sintered body

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3247985C2 (en) * 1982-12-24 1992-04-16 W.C. Heraeus Gmbh, 6450 Hanau Ceramic carrier
US4547471A (en) * 1983-11-18 1985-10-15 General Electric Company High thermal conductivity aluminum nitride ceramic body
US4578233A (en) * 1984-11-01 1986-03-25 General Electric Company Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride
JPH0649613B2 (en) * 1984-11-08 1994-06-29 株式会社東芝 Aluminum nitride sintered body and manufacturing method thereof
US4746637A (en) * 1984-11-08 1988-05-24 Kabushiki Kaisha Toshiba Aluminum nitride sintered body and process for producing the same
US4578232A (en) * 1984-12-17 1986-03-25 General Electric Company Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride
US4897372A (en) * 1985-12-18 1990-01-30 General Electric Company High thermal conductivity ceramic body
FR2595876A1 (en) * 1986-03-13 1987-09-18 Roulot Maurice Tube for a laser generator of the ionised gas type
US4764321A (en) * 1986-03-28 1988-08-16 General Electric Company High thermal conductivity ceramic body
US4818455A (en) * 1986-05-30 1989-04-04 General Electric Company High thermal conductivity ceramic body
JPH0717455B2 (en) * 1986-07-18 1995-03-01 株式会社トクヤマ Method for manufacturing aluminum nitride sintered body
JP2524185B2 (en) * 1988-02-29 1996-08-14 京セラ株式会社 Aluminum nitride sintered body and manufacturing method thereof
JPH0226872A (en) * 1988-07-12 1990-01-29 Sumitomo Electric Ind Ltd Window for transmitting high-frequency wave
JP2962466B2 (en) * 1997-01-06 1999-10-12 株式会社東芝 Aluminum nitride sintered body

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB899915A (en) * 1959-12-24 1962-06-27 Deutsche Edelstahlwerke Ag Hot pressing die
GB949471A (en) * 1959-05-06 1964-02-12 Carborundum Co Refractory articles and method of making same
GB1001867A (en) * 1961-07-21 1965-08-18 Morganite Res & Dev Ltd Improvements in and relating to making articles of aluminium nitride
GB1100865A (en) * 1964-07-27 1968-01-24 Tokyo Shibaura Electric Co Method of preparing sintered masses of aluminium nitride
EP0075857A2 (en) * 1981-09-28 1983-04-06 Kabushiki Kaisha Toshiba Sintered bodies of aluminum nitride
GB2127390A (en) * 1982-09-17 1984-04-11 Tokuyama Soda Kk Aluminium nitride powder and sintered product

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1906522B2 (en) * 1968-02-10 1972-01-13 Tokyo Shibaura Electric Co. Ltd., Kawasaki, Kanagawa (Japan) METHOD OF MANUFACTURING A Sintered ALUMINUM NITRIDE YTTRIUM OXIDE ARTICLE
JPS48100407A (en) * 1972-03-31 1973-12-18
US4228826A (en) * 1978-10-12 1980-10-21 Campbell Frank Jun Interlocking, laminated refractory for covering a pipe
JPS57179080A (en) * 1981-04-27 1982-11-04 Nippon Kagaku Togyo Kk Sintered ceramic pipe end sealing method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB949471A (en) * 1959-05-06 1964-02-12 Carborundum Co Refractory articles and method of making same
GB899915A (en) * 1959-12-24 1962-06-27 Deutsche Edelstahlwerke Ag Hot pressing die
GB1001867A (en) * 1961-07-21 1965-08-18 Morganite Res & Dev Ltd Improvements in and relating to making articles of aluminium nitride
GB1100865A (en) * 1964-07-27 1968-01-24 Tokyo Shibaura Electric Co Method of preparing sintered masses of aluminium nitride
EP0075857A2 (en) * 1981-09-28 1983-04-06 Kabushiki Kaisha Toshiba Sintered bodies of aluminum nitride
GB2127390A (en) * 1982-09-17 1984-04-11 Tokuyama Soda Kk Aluminium nitride powder and sintered product

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2165263A (en) * 1984-10-01 1986-04-09 Gen Electric High thermal conductivity ceramic body
GB2167771A (en) * 1984-11-26 1986-06-04 Gen Electric Sintered high thermal conductivity aluminium nitride ceramic body
GB2168722A (en) * 1984-12-07 1986-06-25 Gen Electric High thermal conductivity ceramic body
GB2179677A (en) * 1985-08-13 1987-03-11 Tokuyama Soda Kk Sintered aluminum nitride
GB2213500A (en) * 1985-08-13 1989-08-16 Tokuyama Soda Kk Sinterable aluminum nitride composition
GB2179677B (en) * 1985-08-13 1990-05-30 Tokuyama Soda Kk Sinterable aluminum nitride composition
GB2213500B (en) * 1985-08-13 1990-05-30 Tokuyama Soda Kk Sinterable aluminum nitride composition
US5242872A (en) * 1986-07-18 1993-09-07 Tokuyama Soda Kabushiki Kaisha Process for producing aluminum nitride sintered body

Also Published As

Publication number Publication date
GB2140458B (en) 1986-03-19
DE3313836A1 (en) 1984-10-18
CH658855A5 (en) 1986-12-15
FR2544305A1 (en) 1984-10-19
FR2544305B1 (en) 1990-05-04
JPS59194183A (en) 1984-11-02
JPH0211790B2 (en) 1990-03-15
DE3313836C2 (en) 1985-08-29
GB8406819D0 (en) 1984-04-18

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20010315