KR100786633B1 - METHOD FOR MANUFACTURING Bi-Te BASED THERMOELECTRIC MATERIALS - Google Patents
METHOD FOR MANUFACTURING Bi-Te BASED THERMOELECTRIC MATERIALS Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 16
- 229910002909 Bi-Te Inorganic materials 0.000 title claims abstract description 15
- 239000000843 powder Substances 0.000 claims abstract description 93
- 238000002156 mixing Methods 0.000 claims abstract description 38
- 238000005245 sintering Methods 0.000 claims abstract description 20
- 239000001257 hydrogen Substances 0.000 claims abstract description 19
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 19
- 239000010453 quartz Substances 0.000 claims abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000000203 mixture Substances 0.000 claims abstract description 8
- 229910052711 selenium Inorganic materials 0.000 claims abstract description 5
- 239000002019 doping agent Substances 0.000 claims abstract description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 11
- 238000000227 grinding Methods 0.000 claims description 9
- 238000003756 stirring Methods 0.000 claims description 7
- 230000009467 reduction Effects 0.000 claims description 6
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 claims description 5
- 239000003708 ampul Substances 0.000 claims description 5
- 239000005297 pyrex Substances 0.000 claims description 5
- 238000005538 encapsulation Methods 0.000 claims description 4
- 150000002431 hydrogen Chemical class 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 239000012300 argon atmosphere Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 7
- 238000000280 densification Methods 0.000 abstract description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 230000008859 change Effects 0.000 description 23
- 230000007423 decrease Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 238000006722 reduction reaction Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 230000005619 thermoelectricity Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/105—Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
- B22F3/1007—Atmosphere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/16—Making metallic powder or suspensions thereof using chemical processes
- B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
- B22F9/20—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds
- B22F9/22—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds using gaseous reductors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
- B22F2009/043—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by ball milling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2201/00—Treatment under specific atmosphere
- B22F2201/02—Nitrogen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2201/00—Treatment under specific atmosphere
- B22F2201/10—Inert gases
- B22F2201/11—Argon
Abstract
본 발명은 Bi-Te계 n형 열전재료의 제조방법에 관한 것으로, 그 목적은 조대분말과 미세분말을 소정의 혼합비로 혼합한 뒤, 수분내의 짧은 시간에 소결이 가능한 방전플라즈마 소결공정을 통해 소결하여 결정학적 배향성을 향상시키고, 조직의 치밀화 및 제어를 용이하게 함으로써 기계적 강도가 우수하고, 성능 및 제조단가 면에서 유리한 Bi-Te계 n형 열전재료의 제조방법을 제공함에 있다. 이를 위한 본 발명은 Bi, Te, Se 원소 및 SbI3 도펀트를 n형 조성에 맞도록 칭량하여 석영관에 장입한 후 진공봉입하여 교반로에 투입하여 잉고트를 제조하고, 제조된 잉코트를 파쇄한 뒤, 200~300㎛의 조대분말과, 45㎛ 이하의 미세분말로 분급하며, 분급된 분말의 수소를 환원시킨 다음 조대분말과 미세분말의 소정의 혼합비로 혼합하여 방전플라즈마 소결공정을 이용해 소결하는 것으로 이루어진 Bi-Te계 n형 열전재료의 제조방법에 관한 것을 그 기술적 요지로 한다.The present invention relates to a method of manufacturing a Bi-Te-based n-type thermoelectric material, and an object thereof is to mix coarse powder and fine powder at a predetermined mixing ratio, and then sinter through a discharge plasma sintering process capable of sintering in a short time in a few minutes. Therefore, the present invention provides a method for producing a Bi-Te-based n-type thermoelectric material which is excellent in mechanical strength and advantageous in terms of performance and manufacturing cost by improving crystallographic orientation and facilitating densification and control of tissues. To this end, the present invention weighs Bi, Te, Se elements and SbI 3 dopants to fit into n-type composition, loads them into quartz tubes, loads them in a vacuum furnace, prepares ingots, and breaks the manufactured ingots. Afterwards, the coarse powder of 200 ~ 300㎛ and fine powder of 45㎛ or less, classify the reduced powder of hydrogen, and then mixed in a predetermined mixing ratio of coarse powder and fine powder to sinter using the discharge plasma sintering process The technical gist of the method for manufacturing a Bi-Te-based n-type thermoelectric material consisting of
방전플라즈마 소결, 배향성, 열전재료, 조대분말, 미세분말 Discharge Plasma Sintering, Orientation, Thermoelectric Materials, Coarse Powder, Fine Powder
Description
도 1 은 본 발명의 실시 예에 의해 제조된 n형 열전재료의 미세분말 혼합비의 변화에 따른 상대밀도 변화를 나타낸 그래프,1 is a graph showing the change in relative density according to the change of the fine powder mixing ratio of the n-type thermoelectric material prepared by the embodiment of the present invention,
도 2 는 본 발명의 실시 예에 의해 제도된 n형 열전재료의 (0 0 6)면의 극점도(pole figure),2 is a pole figure of the (0 0 6) plane of an n-type thermoelectric material drawn by an embodiment of the present invention,
도 3 은 본 발명의 실시 예에 의해 제조된 n형 열전재료의 미세분말 혼합비의 변화에 따른 굽힘강도의 변화를 나타낸 그래프,3 is a graph showing the change in bending strength according to the change of the fine powder mixing ratio of the n-type thermoelectric material prepared by the embodiment of the present invention,
도 4 는 본 발명의 실시 예에 의해 제조된 n형 열전재료의 미세분말 혼합비의 변화에 따른 열전능의 변화를 나타낸 그래프,4 is a graph showing a change in thermoelectricity according to the change of the fine powder mixing ratio of the n-type thermoelectric material prepared by the embodiment of the present invention,
도 5 는 본 발명의 실시 예에 의해 제조된 n형 열전재료의 미세분말 혼합비의 변화에 따른 홀계수의 측정을 통하여 환산된 캐리어 농도 및 이동도의 변화를 나타낸 그래프,5 is a graph showing a change in carrier concentration and mobility converted through measurement of the Hall coefficient according to the change of the fine powder mixing ratio of the n-type thermoelectric material prepared by the embodiment of the present invention,
도 6 은 본 발명의 실시 예에 의해 제조된 n형 열전재료의 미세분말 혼합비의 변화에 따른 전기비저항의 변화를 나타낸 그래프,6 is a graph showing a change in electrical resistivity according to the change of the fine powder mixing ratio of the n-type thermoelectric material prepared by the embodiment of the present invention,
도 7 은 본 발명의 실시 예에 의해 제조된 n형 열전재료의 미세분말 혼합비의 변화에 따른 열전도도의 변화를 나타낸 그래프,7 is a graph showing a change in thermal conductivity according to the change of the fine powder mixing ratio of the n-type thermoelectric material prepared by the embodiment of the present invention,
도 8 은 본 발명의 실시 예에 의해 제조된 n형 열전재료의 미세분말 혼합비의 변화에 따른 성능지수의 변화를 나타낸 그래프.8 is a graph showing a change in the performance index according to the change of the fine powder mixing ratio of the n-type thermoelectric material prepared by the embodiment of the present invention.
본 발명은 Bi-Te계 n형 열전재료의 제조방법에 관한 것으로, 특히 조대분말과 미세분말을 소정의 혼합비로 혼합하여 방전플라즈마 소결정정을 통해 소결함으로써 열전재료를 제조하는 Bi-Te계 n형 열전재료의 제조방법에 관한 것이다.The present invention relates to a method for manufacturing a Bi-Te-based n-type thermoelectric material, and in particular, to prepare a thermoelectric material by mixing coarse powder and fine powder in a predetermined mixing ratio and sintering through a discharge plasma small crystal crystal. It relates to a method for producing a thermoelectric material.
일반적으로 Bi-Te계 열전재료는 상온 근방에서의 우수한 열전성능으로 인하여 고집적 소자 및 각종 센서 등의 방열문제를 해결하기 위한 수단으로써 사용되고 있으며, 주로 일방향응고법이나 단결정성장법에 의해 제조되고 있다. 그러나 일방향응고법 또는 단결정성장법 등 주조법에 의한 열전소자는 우수한 열전성능에도 불구하고 단위정이 능면체로써 Te-Te 결합이 원자결합 중에서 결합력이 가장 약한 Van der waals 결합으로 이루어져 있기 때문에 그 기저면이 벽개면으로 가공 및 모듈의 제조시 회수율감소에 의한 제조단가의 상승으로 인하여 고비용이 드는 단점을 갖고 있다. 아울러 이러한 성질은 Bi2Te3계 열전재료에 있어서 기계적, 전기적 특성에 강한 이방성을 갖게 하여 전기전도도의 경우 a축과 c축간의 값 차이가 약 3배까 지 나타나게 된다. 또한 이방성에 기인하여 에너지 변환효율을 향상시키기 위해서는 a축 방향에서 사용해야 하지만 단결정의 경우 재료가 벽개면을 따라 쉽게 쪼개지기 때문에 가공상의 난점이 있으며, 재료의 적지 않는 손실이 수반된다.In general, Bi-Te-based thermoelectric materials are used as a means for solving the heat dissipation problems of high-integration devices and various sensors due to their excellent thermoelectric performance in the vicinity of room temperature, and are mainly manufactured by unidirectional solidification or single crystal growth. However, the thermoelectric element by casting method such as unidirectional solidification method or single crystal growth method is a unit crystal rhombohedron despite its excellent thermoelectric performance.Te-Te bond is composed of Van der waals bond with the weakest bonding force among atomic bonds. Due to the increase in manufacturing cost due to the reduced recovery rate during processing and manufacturing of the module has a disadvantage of high cost. In addition, this property has a strong anisotropy in the mechanical and electrical properties of Bi 2 Te 3 system thermoelectric material, and the electrical conductivity is about three times the difference between the a-axis and c-axis. In addition, due to the anisotropy, in order to improve the energy conversion efficiency, it should be used in the a-axis direction, but in the case of single crystal, since the material is easily broken along the cleaved surface, there is a difficulty in processing, and there is a considerable loss of material.
상기와 같은 단결정의 문제점을 극복하기 위하여 기계적 강도가 우수하며, 성능 및 제조단가면에서 유리할 것으로 기대되는 분말야금공정에 대한 연구가 활발히 진행되고 있으나, 통상적인 장시간의 소결방법으로는 성분원소의 휘발, 결정립의 크기 및 결정학적 이방성 등의 조직제어와 이에 따른 열전성의 제어가 곤란한 문제점이 발생되었다.In order to overcome the problems of the single crystal as described above, the research on powder metallurgy, which is excellent in mechanical strength and expected to be advantageous in terms of performance and manufacturing cost, is being actively conducted. In this paper, there is a problem in that it is difficult to control the organization of the grains such as grain size and crystallographic anisotropy and thus control of thermoelectricity.
본 발명은 상기와 같은 문제점을 고려하여 이루어진 것으로, 본 발명의 목적은 조대분말과 미세분말을 소정의 혼합비로 혼합한 뒤, 수분내의 짧은 시간에 소결이 가능한 방전플라즈마 소결공정을 통해 소결하여 결정학적 배향성을 향상시키고, 조직의 치밀화 및 제어를 용이하게 함으로써 기계적 강도가 우수하고, 성능 및 제조단가 면에서 유리한 Bi-Te계 n형 열전재료의 제조방법을 제공함에 있다.The present invention has been made in consideration of the above problems, and an object of the present invention is to crystallize by mixing coarse powder and fine powder in a predetermined mixing ratio, and then sintering through a discharge plasma sintering process capable of sintering in a short time in water. The present invention provides a method for producing a Bi-Te-based n-type thermoelectric material which is excellent in mechanical strength and advantageous in terms of performance and manufacturing cost by improving orientation and facilitating densification and control of tissues.
상기한 바와 같은 목적을 달성하고 종래의 결점을 제거하기 위한 과제를 수행하는 본 발명의 Bi-Te계 n형 열전재료의 제조방법은 Bi, Te, Se 원소 및 SbI3 도 펀트를 n형 조성에 맞도록 칭량하여 석영관에 장입한 후 진공봉입하는 진공봉입단계(S1);Bi-Te-based n-type thermoelectric material of the present invention to achieve the object as described above and to perform the problem to eliminate the conventional defects, Bi, Te, Se element and SbI 3 dopant in the n-type composition A vacuum sealing step (S1) which is weighed to fit and charged in a quartz tube and then vacuum sealed;
상기 봉입단계(S1)를 거쳐 봉입된 석영관을 교반로에 투입하여 교반한 후, 노냉하여 잉고트를 제조하는 잉고트 제조단계(S2);An ingot manufacturing step (S2) of adding a quartz tube encapsulated through the encapsulation step (S1) into a stirring furnace and stirring the furnace to produce an ingot;
상기 잉고트 제조단계(S2)를 단계를 거쳐 제조된 잉고트를 파쇄하는 파쇄단계(S3);A shredding step (S3) of shredding the ingot manufactured through the step of manufacturing the ingot (S2);
상기 파쇄단계(S3)를 거쳐 파쇄된 분말을 분쇄하는 분쇄단계(S4);Grinding step (S4) for grinding the crushed powder through the crushing step (S3);
상기 분쇄단계를 거쳐 분쇄된 분말을 입경 200~300㎛의 조대분말과, 입경 20~45㎛의 미세분말로 분리하는 분급단계(S5);A classification step (S5) of separating the powder ground through the grinding step into a coarse powder having a particle diameter of 200 to 300 µm and a fine powder having a particle diameter of 20 to 45 µm;
상기 분급단계(S5)를 거쳐 분급된 분말을 파이렉스 튜브에 장입하고, 수소를 채워 봉입한 다음, 340~380℃의 온도로 가열 및 유지하여 분말의 수소를 환원시키는 수소환원단계(S6);Charging the powder classified through the classification step (S5) into a Pyrex tube, filled with hydrogen, sealed, and then heated and maintained at a temperature of 340 to 380 ° C. to reduce hydrogen of the powder (S6);
상기 수소환원단계(S6)를 거친 60~80wt.%의 조대분말과 20~40wt.%의 미세분말을 혼합하여 앰플에 장입하고, 진공봉입한 후, 3차원 혼합기를 이용하여 혼합하는 혼합단계(S7);Mixing step of mixing 60 ~ 80wt.% Coarse powder and 20 ~ 40wt.% Coarse powder through the hydrogen reduction step (S6) into an ampoule, charged in an ampoule, and then mixing using a three-dimensional mixer ( S7);
상기 혼합단계(S7)를 거쳐 혼합된 분말을 방전플라즈마 소결장비를 이용해 소결하는 소결단계(S8);로 이루어진다.
상기 진공봉입단계(S1)는 잉고트를 제조하기 위한 준비단계로써, 순도 99.999%의 Bi, Te, Se 등의 원소 및 SbI3 도펀트를 열전재료의 n형 조성에 맞도록 칭량하여 석영관에 장입한 후, 용해시 성분원소의 산화 억제를 위해 10-4 torr 이하로 진공봉입하게 된다. 한편, 상기 n형 조성으로는 특정한 조성비에 구애받지 아니하며 Bi-Te계 열전재료의 모든 조성이 그 대상으로 될 수 있으나, 바람직하게는 Bi2Te2.85Se0.15로 이루어진다.It consists of a sintering step (S8) for sintering the powder mixed through the mixing step (S7) using the discharge plasma sintering equipment.
The vacuum encapsulation step (S1) is a preparatory step for manufacturing an ingot, and an element such as Bi, Te, Se, etc. having a purity of 99.999% and SbI 3 dopant are weighed to fit the n-type composition of the thermoelectric material and loaded into a quartz tube. After dissolution, vacuum sealing is carried out at 10 −4 torr or less to suppress oxidation of component elements. On the other hand, the n-type composition is not limited to a specific composition ratio and all the composition of the Bi-Te-based thermoelectric material may be the object, but preferably made of Bi 2 Te 2.85 Se 0.15 .
삭제delete
상기 잉고트 제조단계(S2)는 준비된 재료를 이용하여 잉고트를 제조하는 단계로써, 상기 원소들이 장입되어 봉입된 석영관을 교반로에 투입하여 잉코트를 제조하게 된다. 이러한 잉고트 제조단계(S2)는 700~750℃에서 10회/분의 속도로 2시간 동안 교반한 후, 노냉하는 것으로 진행된다. Bi2Te2 .85Se0 .15의 용융온도 범위는 590~595℃이며 이의 제조온도는 일반적으로 용융온도 범위보다 100~150℃ 높은 온도에서 이루어진다. 그 보다 높은 온도에서는 성분원소의 휘발이 증가되는 문제점이 발생되며, 용융 시간은 길수록 유리하나 대략 2시간정도면 충분한 것으로 나타났다.The ingot manufacturing step (S2) is a step of manufacturing an ingot using a prepared material, and the ingot is manufactured by injecting a quartz tube filled with the elements into a stirring furnace. This ingot manufacturing step (S2) is stirred for 2 hours at a rate of 10 times / min at 700 ~ 750 ℃, then proceeds to the furnace cooling. Bi 2 Te melt temperature range of 0 .15 2 .85 Se is performed at 590 ~ 595 ℃ and the preparation temperature is generally 100 ~ 150 ℃ higher than the melting point temperature range. At higher temperatures, the volatilization of the element is increased, and the longer the melting time is, the more favorable it is.
상기 파쇄단계(S3)는 고형화된 잉고트를 파쇄하는 단계로써, 분말의 산화를 최대한 방지하기 위해하여 질소(불활성) 분위기하의 그로브박스내에서 알루미나 유발을 이용하여 파쇄가 이루어지게 된다.The crushing step (S3) is a step of crushing the solidified ingots, the crushing is made by using alumina induction in the grove box in a nitrogen (inert) atmosphere to prevent the oxidation of the powder to the maximum.
상기 분쇄단계(S4)는 파쇄된 잉고트를 아르곤 분위기에서 볼밀을 이용하여 분쇄하게 되며, 이때 분쇄되는 분말이 300㎛ 이하의 입경을 갖도록 분쇄하게 된다.The grinding step (S4) is to crush the crushed ingot using a ball mill in an argon atmosphere, wherein the powder to be pulverized to have a particle size of 300㎛ or less.
상기 분급단계(S5)는 분쇄된 분말을 조대분말과 미세분말로 분리하는 단계로써, 입경 200~300㎛의 조대분말과, 입경 20~45㎛ 이하의 미세분말로 분급하게 된다. 이때 조대분말은 결정학적 배향성을 증가시키기 위한 것으로, 분말의 형태가 얇은 판상형태를 유지한 채로 200~300㎛의 입경을 갖는 분말들로 이루어지는 것이 바람직하며, 미세분말은 조직의 치밀화와 밀도향상 및 기계적강도의 증가를 위한 것으로 45㎛ 이하의 것이 바람직하나, 입도가 너무 미세하면 산화영향에 의해 열전소자의 성능이 저하되므로 20~45㎛의 입경을 갖는 분말들로 이루어지게 된다.The classification step (S5) is a step of separating the pulverized powder into coarse powder and fine powder, it is classified into coarse powder having a particle diameter of 200 ~ 300㎛, and fine powder having a particle diameter of 20 ~ 45㎛ or less. At this time, the coarse powder is to increase the crystallographic orientation, it is preferable that the powder is made of powder having a particle size of 200 ~ 300㎛ while maintaining a thin plate-like form, the fine powder is densified and improved density of the tissue and The increase in the mechanical strength is preferably 45㎛ or less, but if the particle size is too fine it is made of powder having a particle size of 20 ~ 45㎛ because the performance of the thermoelectric element is degraded by the oxidation effect.
상기 수소환원단계(S6)는 분급된 분말을 파이렉스 튜브(pyrex tube)에 장입하고, 99.999% 이상의 수소를 300~500torr 정도로 채워 봉입한 후, 340~380℃에서 10~15시간동안 진행함으로써 분말내의 수소를 환원시키게 된다. 여기서 수소량이 부족하면 충분환 환원 반응이 이루어질 수 없고, 수소량이 과다하면 고온에서 팽창하여 폭발할 위험이 있다. 또한 340℃ 미만의 온도에서는 반응에 필요한 활성화 에너지가 작아 매우 장시간의 수소환원이 요구되고, 380℃를 초과하면 수소환원 중 성분원소의 휘발 위험이 있다. 수소환원 공정 시간은 온도에 의존하며, 340~380℃의 온도 영역에서는 10~15 시간이 바람직하다.The hydrogen reduction step (S6) is charged to the classified powder in a pyrex tube, filled with more than 99.999% of
상기 혼합단계(S7)는 분급된 조대분말과 미세분말을 소정의 비율로 혼합하여 앰플에 장입하고, 10-4 torr 이하로 진공봉입한 후 3차원 혼합기를 이용하여 90 rpm에서 2~3시간동안 혼합시키게 된다. 여기서 조대분말의 혼합비율이 증가하면 배향성 증가에 의해 전기적 특성이 좋아지는 반면 재료내부에 결함이 증가하여 열전도 특성이 나빠지게 된다. 한편 미세분말의 혼합비율이 과도하게 증가하면 배향성 감소 및 산화 증가에 의해 전기적 특성이 급격히 감소하므로 60~80wt.%의 조대분말과 20~40wt.%의 미세분말이 혼합됨이 바람직하다. 또한 혼합시간이 짧으면 분말의 혼 합이 균일하지 못하며, 혼합시간이 너무 길면 분말들 간의 마찰 및 충돌에 의해 분말이 분쇄되어 입도가 감소되므로 2~3시간이 바람직하며, 혼합속도는 용량에 의존하므로 조건에 따라 달라질 수 있다.The mixing step (S7) is to mix the coarse powder and the fine powder in a predetermined ratio to charge in an ampoule, and vacuum-packed to 10 -4 torr or less, and then using a three-dimensional mixer for 2 to 3 hours at 90 rpm It is mixed. In this case, when the mixing ratio of the coarse powder is increased, the electrical properties are improved by the increase of the orientation, while the defects increase in the material, resulting in poor thermal conductivity. On the other hand, if the mixing ratio of the fine powder is excessively increased, the electrical properties are drastically reduced due to the decrease in the orientation and the increase of oxidation, so that the coarse powder of 60 to 80 wt.% And the fine powder of 20 to 40 wt.% Are preferably mixed. In addition, if the mixing time is short, the mixing of the powder is not uniform. If the mixing time is too long, the powder is pulverized due to friction and collision between the powders, so the particle size is reduced, and 2-3 hours is preferable. It may vary depending on the conditions.
상기 소결단계(S8)는 10-3 torr 이하의 진공중에서 380~460℃의 온도 및 20~40MPa의 압력으로 방전플라스마 소결공정을 진행함으로써 열전재료를 제조하게 된다. 소결압력은 높을수록 유리하지만, 본 실시 예에서는 소결몰드로써 카본몰드를 사용하였으며 카본몰드의 최대압축강도는 40MPa이기 때문에 40MPa로 제한하였다. 소결몰드를 압축강도가 높은 steel 금형 또는 텅스텐 금형 등으로 교체하면 이들 금형의 최대압축강도까지 가압할 수도 있게 된다.The sintering step (S8) is to produce a thermoelectric material by performing a discharge plasma sintering process at a temperature of 380 ~ 460 ℃ and a pressure of 20 ~ 40MPa in a vacuum of 10 -3 torr or less. Higher sintering pressure is advantageous, but in this embodiment, carbon mold was used as the sintering mold, and the maximum compressive strength of the carbon mold was 40 MPa, so it was limited to 40 MPa. If the sintered mold is replaced with a steel mold or tungsten mold with high compressive strength, it may be possible to pressurize to the maximum compressive strength of these molds.
실시예Example
순도 99.999%의 Bi, Te, Se 및 SbI3를 Bi2Te2.85Se0.15 + 0.05wt.% SbI3의 조성을 갖도록 하여 n형 열전재료의 기본 재료를 구성한다. 상기 기본 재료를 석영관에 장입한 후, 2×10-5 torr 로 진공봉입한다. 상기 석영관을 교반로에 투입하여 750℃에서 10회/분의 속도로 2시간 동안 교반한 후, 노냉함으로써 잉고트를 제조한다. 이처럼 제조된 잉고트를 질소분위기하의 그로브박스내에서 알루미나 유발을 이용하여 파쇄한다. 파쇄된 잉고트를 아르곤 분위기에서 볼밀을 이용하여 10시간 동안 분쇄한다. 분쇄된 분말을 200~300㎛의 조대분말과, 20~45㎛의 미세분말로 분급한다. 분급된 분말을 파이렉스 튜브(pyrex tube)에 장입하고, 99.999%의 수소를 380 torr 로 채워 봉입한 후, 380℃에서 10시간동안 진행함으로써 분말내의 수소를 환원시킨다. 분급된 조대분말에 미세분말을 10%씩 증가시켜 앰프에 장입하고, 2×10-5 torr로 진공봉입한 후 3차원 혼합기를 이용하여 90 rpm에서 3시간동안 혼합시킨다. 혼합된 분말을 1×10-3 torr의 진공중에서 420℃의 온도 및 40MPa의 압력으로 방전플라스마 소결공정을 진행함으로써 Φ20×8㎣의 Bi-Te계 n형의 열전재료를 제조한다.Bi, Te, Se and SbI 3 having a purity of 99.999% have a composition of Bi 2 Te 2.85 Se 0.15 + 0.05 wt.% SbI 3 to form a base material of the n-type thermoelectric material. The base material was charged into a quartz tube and then vacuum sealed at 2 × 10 −5 torr. The quartz tube was put in a stirring furnace, stirred at a rate of 10 times / minute at 750 ° C. for 2 hours, and then cooled to prepare an ingot. The ingot prepared as described above is crushed using alumina induction in a grove box under a nitrogen atmosphere. The crushed ingots are ground for 10 hours using a ball mill in an argon atmosphere. The pulverized powder is classified into a coarse powder of 200 to 300 µm and a fine powder of 20 to 45 µm. The classified powder is charged into a pyrex tube, filled with 380 torr of 99.999% hydrogen, and then charged at 380 ° C. for 10 hours to reduce the hydrogen in the powder. The fine powder is added to the coarse powder in 10% increments, charged in an amplifier, vacuum-sealed at 2 × 10 -5 torr, and mixed at 90 rpm for 3 hours using a three-dimensional mixer. The mixed powder was subjected to a discharge plasma sintering process at a temperature of 420 ° C. and a pressure of 40 MPa in a vacuum of 1 × 10 −3 torr to produce a Bi-Te-based n-type thermoelectric material of
도 1은 미세분말의 혼합비에 따른 상대밀도의 변화를 나타낸 것으로, 도 1을 참조하면, 20wt.%의 미세분말이 혼합된 경우 97% 이상의 상대밀도를 보였으며, 이러한 결과는 조대분말들의 사이에 발생하는 간극들에 미세분말이 채워지게 됨으로써 소결성이 향상되었기 때문이다.Figure 1 shows the change in relative density according to the mixing ratio of the fine powder, referring to Figure 1, when 20wt.% Of the fine powder is mixed showed a relative density of more than 97%, these results are found between the coarse powder This is because the sinterability is improved by filling the gaps with fine powder.
도 2는 n형 열전재료의 (0 0 6)면의 극점도(pole figure)를 나타내고 있다. 조대분말로만 소결한 2(a)와 미세분말이 20wt.% 혼합된 2(b)는 미세분말로만 소결한 2(c)에 비해 높은 배향성을 나타내었다.2 shows a pole figure of the (0 0 6) plane of the n-type thermoelectric material. 2 (a) sintered only with coarse powder and 2 (b) with 20wt.% Of fine powder showed higher orientation than 2 (c) sintered only with fine powder.
도 3은 미세분말의 혼합비에 따른 굽힙강도의 변화를 나타낸 것으로, 굽힘강도는 미세분말의 혼합비가 증가함에 따라 거의 직선적으로 증가하는 경향을 나타내었으며 미세분말로만 소결한 소결체에서 90.8MPa의 최대값을 나타내었다. 미세분말이 20wt.% 혼합된 경우에도 굽힘강도는 56.4MPa을 나타내어 주조재에 비하여 3배 이상의 향상을 보였다. 여기서 상기 주조재는 약 18MPa의 굽힘강도를 보인다.Figure 3 shows the change in bending strength according to the mixing ratio of the fine powder, the bending strength showed a tendency to increase almost linearly with increasing the mixing ratio of the fine powder and the maximum value of 90.8MPa in the sintered compact sintered only with fine powder Indicated. Even when 20 wt. The cast material here exhibits a bending strength of about 18 MPa.
도 4는 미세분말의 혼합비에 따른 열전능의 변화를 나타낸 것으로, 미세분말의 혼합비가 증가함에 따라 열전능은 감소하였다. 이는 파쇄과정 중에 발생하는 분 말 표면의 산화에 의해 전자가 증가하게 되어 결과적으로 열전능이 감소한 것으로서, 홀계수의 측정결과를 환산한 캐리어 농도의 변화에서 확인할 수 있다(도 5 참조).Figure 4 shows the change in the thermal power according to the mixing ratio of the fine powder, the thermal power was reduced as the mixing ratio of the fine powder increases. This is due to the increase in electrons due to oxidation of the surface of the powder generated during the crushing process, resulting in a decrease in thermoelectricity, which can be confirmed by a change in the carrier concentration in terms of the measurement of the hole coefficient.
도 6은 미세분말의 혼합비에 따른 전기비저항의 변화를 나타낸 것으로, 전기비저항의 변화는 미세분말이 20wt.%까지 증가함에 따라 급격하게 감소한 후 이후 완만하게 감소하는 경향을 보였다. 초기에 급격한 비저항의 감소는 도 5에서 볼 수 있는 바와 같이 캐리어 농도와 이동도 모두가 미세분말의 혼합비가 증가함에 따라 증가하기 때문이며, 미세분말이 다량 혼합된 경우 캐리어 이동도의 감소에 의해 전기비저항의 감소율은 둔화되었다.Figure 6 shows the change in the electrical resistivity according to the mixing ratio of the fine powder, the change in the electrical resistivity showed a tendency to decrease gradually after the sharp decrease as the fine powder increases to 20wt.%. As shown in FIG. 5, the rapid decrease in specific resistance is because both carrier concentration and mobility increase as the mixing ratio of the fine powder increases, and when the fine powder is mixed, the electrical resistivity decreases due to the decrease of carrier mobility. The rate of decline slowed down.
도 7은 미세분말의 혼합비에 따른 열전도도의 변화를 나타낸 것으로, 미세분말의 혼합비가 증가함에 따라 미소하게 증가하였다. 열전도도는 캐리어에 의한 기여분과 격자진동에 의한 기여분의 합으로 나타내어지며, 캐리어에 의한 기여분은 Wiedemann-Franz 법칙에 의해 전기비저항에 반비례한다. 한편, 격자진동에 의한 기여분은 캐리어농도에 상관없이 일정하므로 전체 열전도도는 캐리어에 의한 기여분에 의존한다. 따라서 열전도도는 전기비저항에 반비례하는 경향을 나타내었고 이는 도 5의 캐리어농도 및 이동도의 변화 양상으로 알 수 있다.Figure 7 shows the change in thermal conductivity according to the mixing ratio of the fine powder, slightly increased as the mixing ratio of the fine powder. Thermal conductivity is expressed as the sum of the contributions by the carrier and the lattice vibration, and the contributions by the carrier are inversely proportional to the electrical resistivity by the Wiedemann-Franz law. On the other hand, since the contribution by lattice vibration is constant regardless of the carrier concentration, the overall thermal conductivity depends on the contribution by the carrier. Therefore, the thermal conductivity was inversely proportional to the electrical resistivity, which can be seen as a change in carrier concentration and mobility of FIG. 5.
도 8은 미세분말의 혼합비에 따른 성능지수의 변화를 나타낸 것으로, 20wt.%의 미세분말이 혼합된 경우, 2.62×10-3/K로서 최대의 성능지수를 보였고, 이는 조대분말에 의한 배향성 증가 및 미세분말에 의한 소결성 향상이 캐리어 이동도를 증 가시켰기 때문이다.8 shows the change of the performance index according to the mixing ratio of the fine powder, when 20wt.% Of the fine powder is mixed, showed the maximum performance index as 2.62 × 10 -3 / K, which increases the orientation by the coarse powder And the improvement of the sinterability by the fine powder increased the carrier mobility.
본 발명은 상술한 특정의 바람직한 실시 예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변형실시가 가능한 것은 물론이고, 그와 같은 변경은 청구범위 기재의 범위 내에 있게 된다.The present invention is not limited to the above-described specific preferred embodiments, and various modifications can be made by any person having ordinary skill in the art without departing from the gist of the present invention claimed in the claims. Of course, such changes will fall within the scope of the claims.
본 발명은 상술한 바와 같이 결정학적 배향성이 큰 조대분말과 상대적으로 배향성이 적은 미세분말을 소정의 혼합비로 혼합한 뒤 수분내의 짧은 시간에 소결이 가능한 방전플라즈마 소결공정을 이용하여 소결함으로써 열전재료를 제조하도록 구성되어 열전재료 조직의 치밀화와 결정립의 크기 및 열전성능의 제어가 용이하게 되었다. 더욱이 열전재료의 우수한 기계적 강도의 구현이 가능해지며, 성능 및 제조단가면에서도 더욱 유리하게 되었다.The present invention mixes coarse powder with high crystallographic orientation and fine powder with relatively low orientation at a predetermined mixing ratio as described above, and then sinters using a discharge plasma sintering process capable of sintering in a short period of time. It is configured to make it easier to densify the thermoelectric material structure and control the grain size and thermoelectric performance. In addition, it is possible to realize the excellent mechanical strength of the thermoelectric material, it is more advantageous in terms of performance and manufacturing cost.
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