JPH02113502A - Film resistance of integrated circuit - Google Patents

Abstract

PURPOSE:To enable high precision trimming by providing trimming start position aligning and stop position aligning patterns integrally with a resistance value adjusting patterns and supplying trimming start position and stop position information for laser light to a trimming device as an input. CONSTITUTION:A trimming start position aligning pattern 4 is formed in a projecting shape at the trimming start position of a resistance value adjusting pattern 2, and a trimming stop position aligning pattern 5 is formed in a projecting shape at the position on the extension of the trimming stop position, determined by the trimming movement amount in the trimming direction, outside the resistance value adjusting pattern 2. Laser light is applied to a position at a distance of several tens of mum before the input position in the trimming start position aligning pattern 4, and this laser light is moved by a distance determined by the trimming movement amount positioned in the trimming stop position aligning pattern 5 to form a trimming trace 6 to adjust the resistance value of the resistance value adjusting pattern 2. Thus, position setting with a smaller error can be achieved and high precision trimming is enabled.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the structure of a film resistor formed on an insulating substrate such as an integrated circuit.

[Prior Art] Generally, a film resistor formed on an insulating substrate such as an integrated circuit is composed of a resistance value adjustment pattern which is the main part of the resistance, and a pair of electrode patterns connected to the resistance value adjustment pattern. Then, by trimming this resistance value adjustment pattern using a laser beam or the like, the resistance value is adjusted to an arbitrary value.

Conventionally, in this type of film resistor, one or several alignment patterns are formed at arbitrary positions along with resistance value adjustment patterns and electrode patterns, and trimming is performed using these alignment patterns. There is. That is,
When resistance adjustment is required, the position of the corresponding resistance value adjustment pattern is measured on the drawing, and the trimming position is input to the trimming device as position information. Based on this positional information, the trimming device determines the irradiation position of the laser beam with respect to the resistance adjustment pattern while detecting the alignment pattern.

Another method is to move the beam positioner of the trimming device to a rough laser beam irradiation start position using a joystick or the like of the trimming device, and then input position information using a switch or the like.

[Problem to be solved by the invention]

In the conventional film resistor configuration described above, when trimming is performed on a plurality of resistance value adjustment patterns, the position at which trimming is started differs depending on the product type. For this reason, the method of measuring the position on the drawing has a problem in that it is cumbersome to read the coordinates on the drawing and input them into the trimming device. Furthermore, in the method of inputting position information using a joystick, accurate position cannot be input, and a position error of several tens of μm is likely to occur. Particularly, trimming defects are likely to occur in patterns that are becoming finer as patterns become more dense.

An object of the present invention is to provide a film resistor for an integrated circuit that can easily be trimmed with high precision.

[Means to solve the problem]

The film resistor of the integrated circuit of the present invention has a small number of resistance value liwJ patterns (both a trimming start alignment pattern provided at one location and an extension in a direction perpendicular to the trimming direction) whose resistance value is adjusted by trimming with a laser beam. A trimming stop alignment pattern provided at at least one location on the line is formed integrally with each resistance value adjustment pattern.

[Effect]

With the above-described configuration, it is possible to input information on the trimming start position and stop position of the laser beam to the trimming device by using the trimming start alignment pattern and the trimming stop alignment pattern.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a plan view of one embodiment of the present invention. In the figure, a plurality of film resistors are arranged in a required area on the surface of an insulating substrate 1 of an integrated circuit. Each film resistor consists of a resistance value adjustment pattern 2 and a pair of electrode patterns 3 formed in a state where the resistance value adjustment pattern 2 is electrically connected to two locations.
It is equipped with

Furthermore, in the present invention, trimming start alignment patterns 4 and 4 are provided at a plurality of locations of the resistance value adjustment pattern 2, respectively. A trimming stop alignment pattern 5 is integrally formed.

That is, the trimming start alignment pattern 4 is formed as a convex pattern at the trimming start position of the resistance value adjustment pattern 2.

Further, the trimming stop alignment pattern 5 is located on an extension line of the trimming stop position determined by the amount of trimming movement in a direction perpendicular to the trimming direction, and is formed as a convex pattern on the outside of the resistance adjustment pattern 2.

Note that the trimming start positioning pattern 4 and the trimming stop positioning pattern 5 are formed of the same film as the resistance value adjustment pattern 2.

A method of performing trimming using a film resistor having this configuration will be described with reference to FIG. 2. In FIG. 2, one film resistor is used as an example, and the trimming is performed by irradiating a laser beam to a position several tens of μm before the position inputted by the trimming start positioning pattern 4, and then irradiating this laser beam with the trimming stop positioning pattern 5. The resistance value of the resistance value adjustment pattern 2 is adjusted by moving the trimming trace 6 by a distance determined by the trimming movement amount located at .

Therefore, during this trimming, use a joystick or the like to move the beam positioner to the trimming start alignment pattern 4 and the trimming stop alignment pattern 5.
It becomes possible to set the trimming by moving each position to the trimming device and inputting each position as position information to the trimming device. Therefore, position setting with little error is possible, and highly accurate resistance value adjustment can be achieved.

〔Effect of the invention〕

As explained above, in the present invention, the trimming start alignment pattern and the trimming stop alignment pattern are formed integrally with the resistance value adjustment pattern, so these patterns are used to determine the trimming start position and the trimming stop position of the laser beam. It becomes possible to input information on the stop position to the trimming device. Thereby, positional information can be input to the trimming device using a joystick or the like, and inputting positional information to the trimming device can be greatly simplified. Furthermore, it is possible to input highly accurate positional information even for high-density patterns, and there is an effect that products will not be defective during trimming work. .

[Brief explanation of drawings]

FIG. 1 is a plan view of one embodiment of the membrane resistor of the present invention, and FIG. 2 is an enlarged plan view of one membrane resistor to show a trimming method. 1... Insulating substrate, 2... Resistance value adjustment pattern, 3
... Electrode pattern, 4... Trimming start alignment pattern, 5... Trimming stop alignment pattern, 6... Trimming trace. Second

Claims (1)

[Claims] 1. In a film resistor whose resistance value is adjusted by trimming a resistance value adjustment pattern with a laser beam, a trimming start alignment pattern provided at at least one location of the resistance value adjustment pattern and an extension line in a direction perpendicular to the trimming direction. A film resistor for an integrated circuit, characterized in that a trimming stop alignment pattern provided at at least one location of the resistor is formed integrally with the resistance value adjusting pattern.