JPH02110812U - - Google Patents

Info

Publication number
JPH02110812U
JPH02110812U JP1969889U JP1969889U JPH02110812U JP H02110812 U JPH02110812 U JP H02110812U JP 1969889 U JP1969889 U JP 1969889U JP 1969889 U JP1969889 U JP 1969889U JP H02110812 U JPH02110812 U JP H02110812U
Authority
JP
Japan
Prior art keywords
focus error
measured
focus
processing section
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1969889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1969889U priority Critical patent/JPH02110812U/ja
Publication of JPH02110812U publication Critical patent/JPH02110812U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Optical Distance (AREA)
JP1969889U 1989-02-22 1989-02-22 Pending JPH02110812U (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1969889U JPH02110812U (nl) 1989-02-22 1989-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1969889U JPH02110812U (nl) 1989-02-22 1989-02-22

Publications (1)

Publication Number Publication Date
JPH02110812U true JPH02110812U (nl) 1990-09-05

Family

ID=31235438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1969889U Pending JPH02110812U (nl) 1989-02-22 1989-02-22

Country Status (1)

Country Link
JP (1) JPH02110812U (nl)

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