JPH02110812U - - Google Patents
Info
- Publication number
- JPH02110812U JPH02110812U JP1969889U JP1969889U JPH02110812U JP H02110812 U JPH02110812 U JP H02110812U JP 1969889 U JP1969889 U JP 1969889U JP 1969889 U JP1969889 U JP 1969889U JP H02110812 U JPH02110812 U JP H02110812U
- Authority
- JP
- Japan
- Prior art keywords
- focus error
- measured
- focus
- processing section
- reflected light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1969889U JPH02110812U (cs) | 1989-02-22 | 1989-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1969889U JPH02110812U (cs) | 1989-02-22 | 1989-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02110812U true JPH02110812U (cs) | 1990-09-05 |
Family
ID=31235438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1969889U Pending JPH02110812U (cs) | 1989-02-22 | 1989-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02110812U (cs) |
-
1989
- 1989-02-22 JP JP1969889U patent/JPH02110812U/ja active Pending
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