Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP55142910ApriorityCriticalpatent/JPS5769534A/ja
Publication of JPS5769534ApublicationCriticalpatent/JPS5769534A/ja
Publication of JPH0210491B2publicationCriticalpatent/JPH0210491B2/ja
Opto-electronic system for determining a deviation between the actual position of a radiation-reflecting plane in an optical imaging system and the desired position of said plane