JPH0210373B2 - - Google Patents
Info
- Publication number
- JPH0210373B2 JPH0210373B2 JP670681A JP670681A JPH0210373B2 JP H0210373 B2 JPH0210373 B2 JP H0210373B2 JP 670681 A JP670681 A JP 670681A JP 670681 A JP670681 A JP 670681A JP H0210373 B2 JPH0210373 B2 JP H0210373B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- optical waveguide
- compound semiconductor
- light
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 126
- 150000001875 compounds Chemical class 0.000 claims description 66
- 239000004065 semiconductor Substances 0.000 claims description 66
- 230000003287 optical effect Effects 0.000 claims description 64
- 239000010408 film Substances 0.000 claims description 35
- 238000010521 absorption reaction Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 7
- 230000001902 propagating effect Effects 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 description 16
- 230000008878 coupling Effects 0.000 description 10
- 238000010168 coupling process Methods 0.000 description 10
- 238000005859 coupling reaction Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 230000000644 propagated effect Effects 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP670681A JPS57120844A (en) | 1981-01-20 | 1981-01-20 | Method and apparatus for determination of optical constant of compound semiconductor thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP670681A JPS57120844A (en) | 1981-01-20 | 1981-01-20 | Method and apparatus for determination of optical constant of compound semiconductor thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57120844A JPS57120844A (en) | 1982-07-28 |
JPH0210373B2 true JPH0210373B2 (pl) | 1990-03-07 |
Family
ID=11645742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP670681A Granted JPS57120844A (en) | 1981-01-20 | 1981-01-20 | Method and apparatus for determination of optical constant of compound semiconductor thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57120844A (pl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0414271U (pl) * | 1990-05-29 | 1992-02-05 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105092474A (zh) * | 2015-08-11 | 2015-11-25 | 中山大学 | 水体消光系数测量装置、方法和悬浮物消光系数测量方法 |
-
1981
- 1981-01-20 JP JP670681A patent/JPS57120844A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0414271U (pl) * | 1990-05-29 | 1992-02-05 |
Also Published As
Publication number | Publication date |
---|---|
JPS57120844A (en) | 1982-07-28 |
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