JPH0210145A - Measuring instrument for thermal diffusivity - Google Patents
Measuring instrument for thermal diffusivityInfo
- Publication number
- JPH0210145A JPH0210145A JP16149788A JP16149788A JPH0210145A JP H0210145 A JPH0210145 A JP H0210145A JP 16149788 A JP16149788 A JP 16149788A JP 16149788 A JP16149788 A JP 16149788A JP H0210145 A JPH0210145 A JP H0210145A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- thermal diffusivity
- light source
- infrared light
- heat source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000009529 body temperature measurement Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000003466 welding Methods 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000009897 systematic effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は厚さが０．５ｍｍ以下の肉薄の板状試料の、厚
さと直行方向の熱拡散率を求める断続加熱による熱拡散
率測定装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention is a thermal diffusivity measurement device using intermittent heating for determining the thermal diffusivity in a direction perpendicular to the thickness of a thin plate-like sample with a thickness of 0.5 mm or less. It is related to.
近年、エレクトロニクスの技術の進歩にともない、多く
の薄膜材料が利用されるようになり、これらの薄膜材料
の熱的性質を知ることが必要となってきた。In recent years, with advances in electronics technology, many thin film materials have come into use, and it has become necessary to know the thermal properties of these thin film materials.
こうした薄膜材料の熱拡散率測定方法及び装置としては
特公昭６０−１５５９５０号公報「断続加熱による熱拡
散率測定方法及び装置」に記載のものが知られている。As a method and apparatus for measuring thermal diffusivity of such a thin film material, the one described in Japanese Patent Publication No. 155950/1988 "Method and apparatus for measuring thermal diffusivity by intermittent heating" is known.
前記公報記載の熱拡散率測定方法は、厚さが一定の板状
試料の片面の一部を多い部材で覆った状態でその片面に
一定振幅の熱エネルギを交流周波数ｆで断続的に照射し
、試料の被遮蔽部における前記覆い部材の端部からの種
々の距離の点の交流温度Ｔ ａｃを測定し、その距離り
を変数とする交流温度Ｔ ａａ特性線の匂配Ｋを求め、
次式
％式％）
より試料面方向への熱拡散率りを求めることを特徴とし
ている。これに基づいた熱拡散率測定装置の構成第１９
図及び第２図に示す。同図において（１）は厚さが例え
ば０．１〜０．５ｍｍ程度の薄い板状試料で、この試料
（１）の上部には試料（１）の片面の一部を覆う覆い板
（２）を試料（１）の面に沿って移動自在に配置し、更
に覆い板（２）の上部にチョッパ（３）を付設した例え
はタングステンやハロゲンランプのような光源（４）で
構成される熱源が配置されている。チョッパ（３）は第
２図に示すように円弧の中心で回転自在に軸支され、所
定の回転数て回転される半円形板からなっている。（５
）は前記の覆い板（２）と連結されたマイクロメータ、
（６）は覆い板（２）で光源（４）の熱エネルギの照射
から遮蔽される試料（１）の面における、覆い板（２）
の端部からの距離りの点に点溶接した熱電対で、この熱
電対（６）を例えばフォトトランジスタからなるセンサ
（７）の出力を参照信号とするロックイン増幅器（８）
に接続し、このロックイン増幅器（８）により熱電対（
６）の交流出力を増幅するものである。The method for measuring thermal diffusivity described in the above publication involves intermittently irradiating one side of a plate-shaped sample with a constant thickness with thermal energy of a constant amplitude at an alternating current frequency f while a portion of one side of the sample is covered with a large number of materials. , measure the AC temperature T ac at various distances from the end of the cover member in the shielded part of the sample, and determine the distribution K of the AC temperature T aa characteristic line with the distance as a variable;
It is characterized by calculating the thermal diffusivity in the direction of the sample surface using the following formula (% formula %). Configuration 19 of thermal diffusivity measuring device based on this
As shown in Fig. and Fig. 2. In the same figure, (1) is a thin plate-like sample with a thickness of, for example, about 0.1 to 0.5 mm, and a cover plate (2 ) are arranged movably along the surface of the sample (1), and a chopper (3) is attached to the top of the cover plate (2).The example is a light source (4) such as a tungsten or halogen lamp. A heat source is located. As shown in FIG. 2, the chopper (3) consists of a semicircular plate that is rotatably supported at the center of an arc and rotated at a predetermined number of rotations. (5
) is a micrometer connected to the cover plate (2);
(6) is the cover plate (2) on the surface of the sample (1) that is shielded from the thermal energy irradiation of the light source (4) by the cover plate (2).
A thermocouple spot-welded at a distance from the end of the thermocouple (6) is connected to a lock-in amplifier (8) that uses the output of a sensor (7) made of, for example, a phototransistor as a reference signal.
This lock-in amplifier (8) connects the thermocouple (
6) is used to amplify the AC output.
〔発明が解決しようとする課題〕
以上に述べた構成に基づいた熱拡散率測定装置において
は熱源としてハロゲンランプが用いられている。ここで
、ハロゲンランプのスペクトルは第３図に示されるよう
に約１μｍ付近に極大のあるなだらかな分布であり、熱
源としては効率的とは言えない。そのため測定に際して
は試料の熱源側の片面にカーボンを塗布して黒化して熱
の吸収を高める操作が必要とされている。[Problems to be Solved by the Invention] A halogen lamp is used as a heat source in the thermal diffusivity measuring device based on the configuration described above. Here, the spectrum of the halogen lamp has a gentle distribution with a maximum near about 1 μm, as shown in FIG. 3, and cannot be said to be efficient as a heat source. Therefore, during measurement, it is necessary to apply carbon to one side of the sample on the heat source side to blacken it and increase heat absorption.
カーボンを塗布して熱拡散率を測定する場合、得られる
熱拡散率ＤＭは、試料及び塗布したカーホンの熱拡散率
を各々Ｄｓ、Ｄｃ、厚さを各々ｄｓ、ｄｃとすると次式
で与えられる。When measuring the thermal diffusivity by applying carbon, the obtained thermal diffusivity DM is given by the following formula, where the thermal diffusivity of the sample and the applied carbon are Ds and Dc, respectively, and the thickness is ds and dc, respectively. .
ＤＭ ” （Ｄｓ ｄｓ＋Ｄｃ ｄａ ）
／（ｄｓ＋ ｄｃ）よって、厚さが数１０μｍ程度の
ごく薄い試料では塗布したカーボンの厚さが無視できな
くなり、高分子のように、塗布したカーボンより熱拡散
率の小さい試料の場合、塗布したカーボンの影響により
熱拡散率が大きいために測定されてしまうという欠点が
あった。DM” (Ds ds+Dc da)
/(ds+dc) Therefore, in the case of very thin samples with a thickness of several tens of micrometers, the thickness of the applied carbon cannot be ignored, and in the case of samples such as polymers, which have a smaller thermal diffusivity than the applied carbon, the applied There was a drawback that the thermal diffusivity was large due to the influence of carbon, so it was measured.
本発明の目的は、このような系統誤差を生じせしめる試
料の黒化を行わずに熱拡散率の測定を行うことを可能と
する装置を提供することにある。An object of the present invention is to provide an apparatus that makes it possible to measure thermal diffusivity without darkening the sample, which causes such systematic errors.
本発明は、厚さが一定の薄い板状試料の片面の一部を覆
う覆い部材と、この覆い部材の上部から一定振幅の熱エ
ネルギを試料の片面の断続照射する熱源と、試料被遮蔽
部に固着されな熱電対と、覆い部材の端部と温度測定点
との距離を決定するマイクロメータと、熱電対の交流出
力を増幅するロックイン増幅器とから構成された断続加
熱による熱拡散率測定装置において、熱源として赤外光
源を用いることを特徴としている。The present invention includes a covering member that covers a part of one side of a thin plate-shaped sample having a constant thickness, a heat source that intermittently irradiates one side of the sample with thermal energy of a constant amplitude from the top of the covering member, and a shielded part of the sample. Thermal diffusivity measurement using intermittent heating consists of a thermocouple fixed to the surface, a micrometer that determines the distance between the end of the cover member and the temperature measurement point, and a lock-in amplifier that amplifies the AC output of the thermocouple. The device is characterized by using an infrared light source as a heat source.
本発明においては、熱源に赤外光源を用いることにより
試料の加熱効率を高めている。このために熱の吸収を目
的とした試料の黒化を行わなくてよく、熱拡散率測定上
の系統誤差の原因を除くことが出来る。In the present invention, the heating efficiency of the sample is increased by using an infrared light source as a heat source. Therefore, it is not necessary to blacken the sample for the purpose of absorbing heat, and the cause of systematic errors in thermal diffusivity measurement can be eliminated.
以下、第１図及び第２図を参照して本発明の実施例につ
いて説明する。同図において（１）は厚さが０．５＋ｎ
ｍ以下の薄い板状試料、この試料（１）の上部には試料
（１）の片面の一部を覆う覆い板（２）を試料（１）の
面に沿って移動自在に配置し、更に覆い板（２）の上部
にチョッパ（３）を付設した赤外光源（例えばＹＡＧレ
ーザ、ＣＯ２レーザ等） （４）による熱源が配置され
ている。チョッパ（３）は第２図に示すように円弧の中
心で回転自在に軸支され、所定の回転数で回転される半
円形板がらなっている。（５）は前記覆い板（２）と連
結されたマイクロメータ、（６）は覆い・板（２）で赤
外光源（４）の熱エネルギの照射から遮蔽される試料（
１）の面における、覆い板（２）の端部がら距離りの点
に点溶接しな熱電対で、この熱電対を例えばフォトトラ
ンジスタからなるセンサ（７）の出力を参照信号とする
ロックイン増幅器〈８）に接続し、このロックイン増幅
器（８）により熱電対（６）の交流出力を増幅するもの
である。Embodiments of the present invention will be described below with reference to FIGS. 1 and 2. In the same figure, (1) has a thickness of 0.5+n
A thin plate-like sample with a diameter of less than m, a cover plate (2) covering a part of one side of the sample (1) is arranged on the top of the sample (1) so as to be movable along the surface of the sample (1), and A heat source including an infrared light source (eg, YAG laser, CO2 laser, etc.) (4) with a chopper (3) attached is arranged on the top of the cover plate (2). As shown in FIG. 2, the chopper (3) consists of a semicircular plate that is rotatably supported at the center of an arc and rotated at a predetermined number of rotations. (5) is a micrometer connected to the cover plate (2), and (6) is a sample (6) which is shielded from the thermal energy irradiation of the infrared light source (4) by the cover/plate (2).
A thermocouple is spot-welded at a distance from the end of the cover plate (2) in the plane of 1), and this thermocouple is used for lock-in using the output of a sensor (7) consisting of a phototransistor as a reference signal. It is connected to an amplifier (8), and the AC output of the thermocouple (6) is amplified by this lock-in amplifier (8).
以上、断続加熱による熱拡散率測定装置において、熱源
として赤外光源を用いることにより、試料を黒化せずに
測定することができ、より薄く、熱拡散率の小さな試料
についても正確な熱拡散率測定が可能となる。As described above, by using an infrared light source as the heat source in the thermal diffusivity measuring device using intermittent heating, it is possible to measure the sample without blackening it, and it is possible to accurately measure thermal diffusivity even for thinner samples with small thermal diffusivity. rate measurement becomes possible.
尚、赤外光源にレーザを用いた場合、レーザをパルス発
振させて断続加熱すれば、熱源にはチョッパが不用とな
る。またロックイン増幅器の参照信号に、レーザに供給
するパルス信号を利用すればセンサも不用となる。Note that when a laser is used as the infrared light source, if the laser is pulse-oscillated to perform intermittent heating, a chopper is not required as the heat source. Furthermore, if the pulse signal supplied to the laser is used as the reference signal for the lock-in amplifier, a sensor is also unnecessary.
（６）・・・温度プローブ、（７）・・・センサ、（８
）・・・ロックイン増幅器。(6)...Temperature probe, (7)...Sensor, (8
)...Lock-in amplifier.
Claims (1)
材と、この覆い部材の上部からの一定振幅の熱エネルギ
を試料の片面に断続照射する熱源と、試料被遮蔽部い固
着された熱電対と、覆い部材の端部と温度測定点との距
離を決定するマイクロメータと、熱電対の交流出力を増
幅するロックイン増幅器とから構成されたことを特徴と
する断続加熱による熱拡散率測定装置において熱源とし
て赤外光源を用いることを特徴とした熱拡散率測定装置
。A cover member that covers part of one side of a thin plate-shaped sample with a constant thickness, a heat source that intermittently irradiates one side of the sample with thermal energy of a constant amplitude from the top of the cover member, and a shielded part of the sample that is fixed to the cover member. Thermal diffusion by intermittent heating is characterized in that it is comprised of a thermocouple, a micrometer that determines the distance between the end of the cover member and the temperature measurement point, and a lock-in amplifier that amplifies the alternating current output of the thermocouple. A thermal diffusivity measuring device characterized by using an infrared light source as a heat source in the diffusivity measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16149788A JPH0210145A (en) | 1988-06-28 | 1988-06-28 | Measuring instrument for thermal diffusivity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16149788A JPH0210145A (en) | 1988-06-28 | 1988-06-28 | Measuring instrument for thermal diffusivity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0210145A true JPH0210145A (en) | 1990-01-12 |
Family
ID=15736193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16149788A Pending JPH0210145A (en) | 1988-06-28 | 1988-06-28 | Measuring instrument for thermal diffusivity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210145A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155950A (en) * | 1984-01-19 | 1985-08-16 | Ichiro Hatta | Method and apparatus for measuring heat diffusion by intermittent heating |
| JPS6110751A (en) * | 1984-06-26 | 1986-01-18 | Ichiro Hatta | Measurement for diffusivity of heat by intermittent heating |
-
1988
- 1988-06-28 JP JP16149788A patent/JPH0210145A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155950A (en) * | 1984-01-19 | 1985-08-16 | Ichiro Hatta | Method and apparatus for measuring heat diffusion by intermittent heating |
| JPS6110751A (en) * | 1984-06-26 | 1986-01-18 | Ichiro Hatta | Measurement for diffusivity of heat by intermittent heating |
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