JPH0479536B2 - - Google Patents
Info
- Publication number
- JPH0479536B2 JPH0479536B2 JP60054230A JP5423085A JPH0479536B2 JP H0479536 B2 JPH0479536 B2 JP H0479536B2 JP 60054230 A JP60054230 A JP 60054230A JP 5423085 A JP5423085 A JP 5423085A JP H0479536 B2 JPH0479536 B2 JP H0479536B2
- Authority
- JP
- Japan
- Prior art keywords
- sample plate
- cover member
- thermal diffusivity
- measured
- amplitude
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000007707 calorimetry Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、厚さが例えば0.5mm以下の肉薄の試
料板の厚さと直角方向の熱拡散率を求める交流カ
ロリメトリによる熱拡散率測定装置に関する。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a thermal diffusivity measuring device using AC calorimetry for determining the thermal diffusivity in a direction perpendicular to the thickness of a thin sample plate having a thickness of, for example, 0.5 mm or less. .
（従来技術）
従来、熱拡散率の測定には、種々の方法が知ら
れているが、厚さが0.2mm以下の肉薄の試料の厚
さと直角方向の熱拡散率を求めることは不可能で
あつた。しかし近年、エレクトロニクス技術の進
歩に伴ない、薄い電気絶縁物、例えばセラミツク
板の上に半導体材料を0.5mm以下の膜薄に蒸着す
ることが多くなつており、これ等の肉薄板状材料
の熱的性質を知ることが必要になつてきた。(Prior art) Various methods are known for measuring thermal diffusivity, but it is impossible to determine the thermal diffusivity in the direction perpendicular to the thickness of a thin sample with a thickness of 0.2 mm or less. It was hot. However, in recent years, with advances in electronics technology, it has become common for semiconductor materials to be deposited on thin electrical insulators, such as ceramic plates, to a thickness of 0.5 mm or less. It has become necessary to know the nature of
そこで本出願人は先に他の出願人と共にこの要
求を満す交流カロリメトリによる熱拡散率測定方
法及び装置を提案した（特願昭59−7665号）。 Therefore, the present applicant together with other applicants previously proposed a method and apparatus for measuring thermal diffusivity by AC calorimetry that satisfies this requirement (Japanese Patent Application No. 7665/1982).
第１図及び第２図はこの装置の説明線図を示
す。同図において、ａは被測定試料板で、この試
料板ａの片面の一部を覆う覆い板ｂがこれに連結
されたマイクロメータｃにより試料板ａの面に沿
つて移動自在に配置されている。この覆い板ｂの
上部には直径上の中心で回転自在に軸支され、図
示しないモータにより所定の回転数で回点する半
円形板から成るチヨツパｄを付設した例えばタン
グステンランプのような熱源ｅが配置されてい
る。試料板ａの被遮蔽部に点溶接した熱電対ｆは
センサｇの出力を参照信号とするロツクイン増幅
器ｇに接続されている。 1 and 2 show explanatory diagrams of this device. In the figure, a is a sample plate to be measured, and a cover plate b covering a part of one side of the sample plate a is movably arranged along the surface of the sample plate a by a micrometer c connected to the cover plate b. There is. A heat source e, such as a tungsten lamp, is attached to the upper part of the cover plate b, and is equipped with a chopper d, which is a semicircular plate that is rotatably supported at its diametrical center and rotates at a predetermined number of revolutions by a motor (not shown). is located. A thermocouple f spot-welded to the shielded portion of the sample plate a is connected to a lock-in amplifier g which uses the output of the sensor g as a reference signal.
以上の、チヨツパｄを付設した熱源ｅ、試料板
ａに点溶接した熱電対ｆ及びロツクイン増幅器ｇ
は、周知の交流カロリメトリ装置を構成するもの
である。 Above, the heat source e equipped with a chopper d, the thermocouple f spot welded to the sample plate a, and the lock-in amplifier g
constitutes a well-known AC calorimetry device.
交流カロリメトリは、図示しない熱浴（大きな
熱容量をもち一定温度に保たれている中空の金属
などのブロツク）中に、熱浴に対して所定の熱抵
抗で接続された状態で配置された被測定試料板１
にチヨツパなどで一定周波数の熱波を与えて該試
料板１を交流的に加熱したとき、該試料板１の温
度波の振幅が該試料板１の比熱に逆比例するとい
う原理により該試料板１の比熱を求める方法であ
り、被測定試料板１の厚さは、熱波の波長に対し
て著しく短く選定されている。 In AC calorimetry, the object to be measured is placed in a heat bath (not shown) (a hollow metal block that has a large heat capacity and is kept at a constant temperature) and is connected to the heat bath with a predetermined thermal resistance. Sample plate 1
When the sample plate 1 is heated in an alternating current manner by applying a heat wave of a constant frequency to the sample plate 1, the amplitude of the temperature wave on the sample plate 1 is inversely proportional to the specific heat of the sample plate 1. The thickness of the sample plate 1 to be measured is selected to be significantly shorter than the wavelength of the heat wave.
以上の構成において、ロツクイン増幅器ｇの出
力から測定される試料板ａの熱電対ｆの溶接点の
温度波の振幅とこの溶接点から覆い板ｂの端縁ま
での距離Ｌとの間には
log1Tac1＝logＱ／2Wed−KL
但し、ｆ（＝ｗ／2π）はチヨツパによる熱エネ
ルギＱの交流周波数
ｃは試料板ａの単位体積当りの比熱
ｄは試料板ａの厚さ
ｋは熱拡散長の逆数で、
ｋ＝√
Ｄは試料板ａの面方向への熱拡散率なる１次式
の関係が成立つ。 In the above configuration, the difference between the amplitude of the temperature wave at the welding point of thermocouple f of sample plate a measured from the output of lock-in amplifier g and the distance L from this welding point to the edge of cover plate b is log1Tac1 =logQ/2Wed-KL However, f (=w/2π) is the AC frequency of thermal energy Q due to the chopper, c is the specific heat per unit volume of sample plate a, d is the thickness of sample plate a, and k is the reciprocal of the thermal diffusion length. Then, k=√D is the thermal diffusivity in the surface direction of the sample plate a, which is a linear relationship.
かくてマイクロメータＣによつて覆い板ｂを多
数回に亘つて微動させ、その度毎の温度波の振幅
Tacをロツクイン増幅器ｇの出力から求めて種々
の距離Ｌにいおける温度波の振幅Tacの対数をプ
ロツトすると直線が得られ、この直線の勾配から
ｋ、更には熱拡散率Ｄが得られる。 In this way, the cover plate b is slightly moved many times by the micrometer C, and the amplitude of the temperature wave is measured each time.
If Tac is determined from the output of the lock-in amplifier g and the logarithm of the amplitude Tac of the temperature wave at various distances L is plotted, a straight line is obtained, and from the slope of this straight line k and further the thermal diffusivity D can be obtained.
尚被測定試料板ａは図示しないが熱浴中に配置
され、試料板ａから外へ熱が逃げるときの熱抵抗
が大きくなつている。 Although the sample plate a to be measured is not shown, it is placed in a heat bath, and the thermal resistance when heat escapes from the sample plate a to the outside is large.
この装置を用いて高温及び定温下の被測定試料
板ａの熱拡散率を測定する場合、試料板ａと共に
加熱炉又はクライオスタツトに入れた覆い板ｂを
外部から操作するために覆い板ｂに延長棒を直結
することが考えられる。 When using this device to measure the thermal diffusivity of sample plate a to be measured at high and constant temperatures, cover plate b is placed in a heating furnace or cryostat together with sample plate a, and cover plate b is attached to cover plate b for external operation. It is possible to connect an extension rod directly.
しかし、この場合、覆い板ｂ又は延長棒が熱膨
張又は熱収縮して熱電対ｆから覆い板ｂの端縁ま
での距離が変動することが避けられないから、熱
拡散率の測定に誤差が生ずる不都合を伴う。また
炉体又はクライオスタツトに孔を明けなければな
らず、構造が複雑で高価になり更に操作性も悪い
不都合も伴う。 However, in this case, it is inevitable that the distance from the thermocouple f to the edge of the cover plate b will change due to thermal expansion or contraction of the cover plate b or the extension rod, resulting in an error in the measurement of the thermal diffusivity. with some inconvenience. Further, it is necessary to make holes in the furnace body or cryostat, resulting in a complicated and expensive structure and also having the disadvantages of poor operability.
（解決しようとする問題点）
本発明は、上述のような不都合の無い熱拡散率
測定装置を得ることをその目的とする。(Problems to be Solved) An object of the present invention is to obtain a thermal diffusivity measuring device that does not have the above-mentioned disadvantages.
（問題点を解決するための手段）
本発明は、厚さが一定の被測定試料板の片面の
一部を遮蔽した状態で該片面に熱源から一定振幅
の熱エネルギを断続照射し、被測定試料板の被遮
蔽部におけるその端縁から種々の距離の点の温度
波の振幅を測定し、距離と温度波の振幅との関係
から被測定試料板の熱拡散率を得る交流カロリメ
トリによる熱拡散率測定装置において、被測定試
料板を加熱又は冷却する加熱装置又は冷却装置の
外に配設され熱源として光源からの光線を試料板
に対して遮蔽する移動自在の覆い部材を備え、該
覆い部材の移動により試料板上に結ばれる覆い部
材の実像を移動するようにしたことを特徴とす
る。(Means for Solving the Problems) The present invention provides a method for intermittently irradiating thermal energy of a constant amplitude from a heat source to one side of a sample plate to be measured with a certain thickness shielded. Thermal diffusion by AC calorimetry measures the amplitude of temperature waves at various distances from the edge of the shielded part of the sample plate, and obtains the thermal diffusivity of the sample plate from the relationship between the distance and the amplitude of the temperature wave. The rate measuring device includes a movable cover member that is disposed outside a heating device or a cooling device that heats or cools a sample plate to be measured and that blocks light from a light source as a heat source from the sample plate, and the cover member The present invention is characterized in that the actual image of the cover member tied onto the sample plate is moved by the movement of the cover member.
（実施例）
本発明の実施例を図面につき説明する。第３図
において、１は被測定試料板で、この試料板１は
例えば赤外線加熱炉２の中に配設し、その透光窓
３から後述の光源４からの光線の照射を受けられ
るようにし、また図示しないが熱浴中に配置し試
料板１から外へ熱が逃げるときの熱抵抗を大とし
た。光源４は従来例と同じようにチヨツパを付設
した例えばタングステンランプから構成され、一
定振幅の断続的な光線を放射するものとした。５
１，５2はそれぞれ移動自在の覆い部材及び固定覆
い部材で、両者で開口部６を形成し、覆い部材５
１の移動によれば光線を通過する面積が変化する
ようにした。この覆い部材５1はマイクロメータ
７の可動部に連結し、直流モータ８で移動自在と
した。９は直流モータ８の回転数を検出し覆い部
材５1の移動量の測定に利用するエンコーダであ
る。１０はアクロマートレンズ（色消しレンズ）
で、このレンズ１０により光源４から前記開口部
６を通過した光線を試料板１上に集束させ、覆い
部材５1の実像が試料板１上に結ばれるようにし
た。(Example) An example of the present invention will be described with reference to the drawings. In FIG. 3, reference numeral 1 denotes a sample plate to be measured, and this sample plate 1 is placed in, for example, an infrared heating furnace 2, so that it can be irradiated with light from a light source 4, which will be described later, through a transparent window 3. Although not shown, the sample plate 1 was placed in a heat bath to increase the thermal resistance when heat escapes from the sample plate 1 to the outside. The light source 4 is composed of, for example, a tungsten lamp equipped with a chopper, as in the conventional example, and emits an intermittent light beam of constant amplitude. 5
1 and 5 2 are a movable cover member and a fixed cover member, respectively, and both form an opening 6, and the cover member 5
According to the movement of 1 , the area through which the light beam passes changes. This cover member 51 was connected to the movable part of the micrometer 7, and was made movable by a DC motor 8. Reference numeral 9 denotes an encoder used to detect the rotational speed of the DC motor 8 and measure the amount of movement of the cover member 51 . 10 is an achromatic lens (achromatic lens)
The lens 10 focuses the light beam from the light source 4 that has passed through the aperture 6 onto the sample plate 1, so that a real image of the cover member 51 is focused on the sample plate 1.
同図において、１１は試料板１の遮蔽部に点溶
接された熱電対で、この熱電対１１は図示しない
断続光線のセンサの出力を参照信号とするロツク
イン増幅器１２に接続した。 In the figure, reference numeral 11 denotes a thermocouple spot-welded to the shielding portion of the sample plate 1, and this thermocouple 11 is connected to a lock-in amplifier 12 which uses the output of an intermittent light sensor (not shown) as a reference signal.
以上の、チヨツパを付設した熱源４、試料板１
に点溶接した熱電対１１及びロツクイン増幅器１
２は、前記した従来のものと同様、交流カロメト
リ装置を構成する。 The above heat source 4 with a chipper and sample plate 1
Thermocouple 11 and lock-in amplifier 1 spot welded to
2 constitutes an AC calometry device similar to the conventional one described above.
上記実施例は高温下の試料の熱拡散率測定装置
であつたが、低温下の試料の熱拡散率測定装置に
も本発明は適用できる。 Although the above embodiment is an apparatus for measuring thermal diffusivity of a sample under high temperature, the present invention can also be applied to an apparatus for measuring thermal diffusivity of a sample under low temperature.
この装置は試料１をクライオスタツトに収容す
る以外上記実施例と同じである。 This apparatus is the same as the above embodiment except that sample 1 is housed in a cryostat.
（作用）
第３図示のものにおいて、直流モータ８を回転
させて覆い部材５1を低速度で移動させると、試
料板１に結ばれる覆い部材５1の実像の端縁から
熱電対１１の位置までの距離がそれに対応して変
化する。この距離はエンコーダ９の出力から求め
られる。この距離の変化に対応したその時々の試
料板１の温度波の振幅は熱電対１１の出力を増幅
するロツクイン増幅器１２の出力から得られる。
この距離と温度波の振幅の対数とは前述のように
１次式の関係が成立ち、その勾配から試料板１の
両方向への熱拡散率が得られる。(Function) In the device shown in FIG. 3, when the DC motor 8 is rotated and the cover member 5 1 is moved at a low speed, the thermocouple 11 is positioned from the edge of the real image of the cover member 5 1 connected to the sample plate 1. The distance to will change accordingly. This distance is determined from the output of encoder 9. The amplitude of the temperature wave on the sample plate 1 at any given time corresponding to this change in distance is obtained from the output of the lock-in amplifier 12 which amplifies the output of the thermocouple 11.
This distance and the logarithm of the amplitude of the temperature wave have a linear relationship as described above, and the thermal diffusivity in both directions of the sample plate 1 can be obtained from the slope thereof.
加熱炉２の温度を変えれば、種々の高温度下に
ある試料板１の面方向の熱拡散率が得られる。こ
のような測定条件において、覆い部材５1及びマ
イクロメータ６は加熱炉２から離れているので、
常に室温下にあつて温度変化がなく、そのため覆
い部材５1及びマイクロメータ６は熱膨張の変化
を受けない。 By changing the temperature of the heating furnace 2, the thermal diffusivity in the plane direction of the sample plate 1 at various high temperatures can be obtained. Under such measurement conditions, since the cover member 5 1 and the micrometer 6 are separated from the heating furnace 2,
The cover member 51 and the micrometer 6 are not affected by changes in thermal expansion because they are always at room temperature and do not change in temperature.
また覆い部材５1の実像の端縁は従来の覆い板
による試料板１上の影の端縁よりクリアにでき
る。以上の理由により試料板１の端縁と熱電対１
０の設置点間の距離の測定に誤差が生じない。 Further, the edge of the real image of the cover member 51 can be made clearer than the edge of the shadow on the sample plate 1 caused by the conventional cover plate. For the above reasons, the edge of sample plate 1 and thermocouple 1
No error occurs in measuring the distance between the zero installation points.
（発明の効果）
本発明によるときは、高温及び低温下にある試
料板の面方向の熱拡散率を正確に測定することが
でき、その構成は、試料板を加熱又は冷却する加
熱炉又はクライオスタツトの外に光源からの光線
を遮蔽する移動自在の覆い部材を設け、試料板上
にこの覆い部材の実像を結ばせるもので簡単であ
り、廉価であつて、また操作性もよい効果を有す
る。(Effects of the Invention) According to the present invention, it is possible to accurately measure the thermal diffusivity in the plane direction of a sample plate under high and low temperatures, and the configuration is such that a heating furnace or a cryostat for heating or cooling the sample plate is used. A movable cover member is provided outside the tattoo to block the light rays from the light source, and a real image of this cover member is formed on the sample plate, which is simple, inexpensive, and has good operability. .
第１図は先に提案した装置の線図、第２図は熱
源及びロツクイン増幅器を除いた第１図、第３図
は本発明の一実施例の線図である。
１……被測定試料板、２……赤外線加熱炉、４
……光源、５1，５2……覆い板、６……開口部、
７……マイクロメータ、８……直流モータ、１０
……レンズ、１１……熱電対、１２……ロツクイ
ン増幅器。
FIG. 1 is a diagram of the previously proposed device, FIG. 2 is a diagram of FIG. 1 excluding the heat source and lock-in amplifier, and FIG. 3 is a diagram of an embodiment of the present invention. 1... Sample plate to be measured, 2... Infrared heating furnace, 4
... light source, 5 1 , 5 2 ... cover plate, 6 ... opening,
7...Micrometer, 8...DC motor, 10
... Lens, 11 ... Thermocouple, 12 ... Lock-in amplifier.
Claims (1)
蔽した状態で該片面に熱源から一定振幅の熱エネ
ルギを断続照射し、被測定試料板の被遮蔽部にお
けるその端縁から種々の距離の点の温度波の振幅
を測定し、距離と温度波の振幅との関係から被測
定試料板の熱拡散率を得る交流カロリメトリによ
る熱拡散率測定装置において、被測定試料板を加
熱又は冷却する加熱装置又は冷却装置の外に配設
され熱源としての光源からの光線を試料板に対し
て遮蔽する移動自在の覆い部材を備え、該覆い部
材の移動により試料板上に結ばれる覆い部材の実
像を移動するようにしたことを特徴とする熱拡散
率測定装置。1. A part of one side of a sample plate to be measured with a constant thickness is shielded, and thermal energy of a constant amplitude is intermittently irradiated from a heat source to that side, and various In a thermal diffusivity measurement device using AC calorimetry, which measures the amplitude of the temperature wave at a distance point and obtains the thermal diffusivity of the sample plate to be measured from the relationship between the distance and the amplitude of the temperature wave, the sample plate to be measured is heated or cooled. A movable cover member is provided outside the heating device or cooling device to shield the sample plate from light rays from a light source serving as a heat source, and the cover member is connected to the sample plate by movement of the cover member. A thermal diffusivity measurement device characterized by a moving real image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5423085A JPS61213759A (en) | 1985-03-20 | 1985-03-20 | Apparatus for measuring heat diffusivity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5423085A JPS61213759A (en) | 1985-03-20 | 1985-03-20 | Apparatus for measuring heat diffusivity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61213759A JPS61213759A (en) | 1986-09-22 |
| JPH0479536B2 true JPH0479536B2 (en) | 1992-12-16 |
Family
ID=12964738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5423085A Granted JPS61213759A (en) | 1985-03-20 | 1985-03-20 | Apparatus for measuring heat diffusivity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61213759A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2688012B2 (en) * | 1995-05-12 | 1997-12-08 | 工業技術院長 | Thermal diffusivity measurement method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163856A (en) * | 1981-11-16 | 1982-10-08 | Showa Denko Kk | Measuring method for thermal diffusivity of material |
-
1985
- 1985-03-20 JP JP5423085A patent/JPS61213759A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163856A (en) * | 1981-11-16 | 1982-10-08 | Showa Denko Kk | Measuring method for thermal diffusivity of material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61213759A (en) | 1986-09-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |