JPH0199837U - - Google Patents
Info
- Publication number
- JPH0199837U JPH0199837U JP19276687U JP19276687U JPH0199837U JP H0199837 U JPH0199837 U JP H0199837U JP 19276687 U JP19276687 U JP 19276687U JP 19276687 U JP19276687 U JP 19276687U JP H0199837 U JPH0199837 U JP H0199837U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chuck
- holding
- rotating
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19276687U JPH0199837U (en, 2012) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19276687U JPH0199837U (en, 2012) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199837U true JPH0199837U (en, 2012) | 1989-07-04 |
Family
ID=31483606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19276687U Pending JPH0199837U (en, 2012) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199837U (en, 2012) |
-
1987
- 1987-12-21 JP JP19276687U patent/JPH0199837U/ja active Pending