JPS6420724U - - Google Patents
Info
- Publication number
- JPS6420724U JPS6420724U JP11541587U JP11541587U JPS6420724U JP S6420724 U JPS6420724 U JP S6420724U JP 11541587 U JP11541587 U JP 11541587U JP 11541587 U JP11541587 U JP 11541587U JP S6420724 U JPS6420724 U JP S6420724U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- semiconductor wafer
- vacuum state
- pot
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11541587U JPS6420724U (en, 2012) | 1987-07-27 | 1987-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11541587U JPS6420724U (en, 2012) | 1987-07-27 | 1987-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6420724U true JPS6420724U (en, 2012) | 1989-02-01 |
Family
ID=31357051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11541587U Pending JPS6420724U (en, 2012) | 1987-07-27 | 1987-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6420724U (en, 2012) |
-
1987
- 1987-07-27 JP JP11541587U patent/JPS6420724U/ja active Pending