JPH0195614A - 圧電共振子の空洞形成方法 - Google Patents

圧電共振子の空洞形成方法

Info

Publication number
JPH0195614A
JPH0195614A JP25508387A JP25508387A JPH0195614A JP H0195614 A JPH0195614 A JP H0195614A JP 25508387 A JP25508387 A JP 25508387A JP 25508387 A JP25508387 A JP 25508387A JP H0195614 A JPH0195614 A JP H0195614A
Authority
JP
Japan
Prior art keywords
resin layer
resin
cavity
area
high energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25508387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545090B2 (enExample
Inventor
Shunjiro Imagawa
今川　俊次郎
Makoto Miyazaki
信 宮崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP25508387A priority Critical patent/JPH0195614A/ja
Publication of JPH0195614A publication Critical patent/JPH0195614A/ja
Publication of JPH0545090B2 publication Critical patent/JPH0545090B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP25508387A 1987-10-08 1987-10-08 圧電共振子の空洞形成方法 Granted JPH0195614A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25508387A JPH0195614A (ja) 1987-10-08 1987-10-08 圧電共振子の空洞形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25508387A JPH0195614A (ja) 1987-10-08 1987-10-08 圧電共振子の空洞形成方法

Publications (2)

Publication Number Publication Date
JPH0195614A true JPH0195614A (ja) 1989-04-13
JPH0545090B2 JPH0545090B2 (enExample) 1993-07-08

Family

ID=17273895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25508387A Granted JPH0195614A (ja) 1987-10-08 1987-10-08 圧電共振子の空洞形成方法

Country Status (1)

Country Link
JP (1) JPH0195614A (enExample)

Also Published As

Publication number Publication date
JPH0545090B2 (enExample) 1993-07-08

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