JPH0194468U - - Google Patents
Info
- Publication number
- JPH0194468U JPH0194468U JP19086687U JP19086687U JPH0194468U JP H0194468 U JPH0194468 U JP H0194468U JP 19086687 U JP19086687 U JP 19086687U JP 19086687 U JP19086687 U JP 19086687U JP H0194468 U JPH0194468 U JP H0194468U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crucible
- pulling
- cooling cylinder
- czyochralski
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987190866U JPH0523579Y2 (is) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987190866U JPH0523579Y2 (is) | 1987-12-16 | 1987-12-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0194468U true JPH0194468U (is) | 1989-06-21 |
JPH0523579Y2 JPH0523579Y2 (is) | 1993-06-16 |
Family
ID=31481805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987190866U Expired - Lifetime JPH0523579Y2 (is) | 1987-12-16 | 1987-12-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0523579Y2 (is) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS546511A (en) * | 1977-06-17 | 1979-01-18 | Hitachi Ltd | Rotary type magnetic head |
JPS5645894A (en) * | 1979-09-25 | 1981-04-25 | Nippon Telegr & Teleph Corp <Ntt> | Reducing method for defect of silicon single crystal |
JPS5740119A (en) * | 1980-07-18 | 1982-03-05 | Skf Kugellagerfabriken Gmbh | Thin bearing bush made by pressdrawing |
JPS5750759A (en) * | 1980-09-10 | 1982-03-25 | Hitachi Ltd | Charged particle irradiator |
JPS62138385A (ja) * | 1985-12-11 | 1987-06-22 | Shin Etsu Handotai Co Ltd | 半導体単結晶の引上装置 |
-
1987
- 1987-12-16 JP JP1987190866U patent/JPH0523579Y2/ja not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS546511A (en) * | 1977-06-17 | 1979-01-18 | Hitachi Ltd | Rotary type magnetic head |
JPS5645894A (en) * | 1979-09-25 | 1981-04-25 | Nippon Telegr & Teleph Corp <Ntt> | Reducing method for defect of silicon single crystal |
JPS5740119A (en) * | 1980-07-18 | 1982-03-05 | Skf Kugellagerfabriken Gmbh | Thin bearing bush made by pressdrawing |
JPS5750759A (en) * | 1980-09-10 | 1982-03-25 | Hitachi Ltd | Charged particle irradiator |
JPS62138385A (ja) * | 1985-12-11 | 1987-06-22 | Shin Etsu Handotai Co Ltd | 半導体単結晶の引上装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0523579Y2 (is) | 1993-06-16 |
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