JPH019163Y2 - - Google Patents

Info

Publication number
JPH019163Y2
JPH019163Y2 JP11547384U JP11547384U JPH019163Y2 JP H019163 Y2 JPH019163 Y2 JP H019163Y2 JP 11547384 U JP11547384 U JP 11547384U JP 11547384 U JP11547384 U JP 11547384U JP H019163 Y2 JPH019163 Y2 JP H019163Y2
Authority
JP
Japan
Prior art keywords
carrier
horizontal
engagement
side frames
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11547384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6133442U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11547384U priority Critical patent/JPS6133442U/ja
Publication of JPS6133442U publication Critical patent/JPS6133442U/ja
Application granted granted Critical
Publication of JPH019163Y2 publication Critical patent/JPH019163Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP11547384U 1984-07-28 1984-07-28 ウエハ用キヤリヤのハンドリング治具 Granted JPS6133442U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11547384U JPS6133442U (ja) 1984-07-28 1984-07-28 ウエハ用キヤリヤのハンドリング治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11547384U JPS6133442U (ja) 1984-07-28 1984-07-28 ウエハ用キヤリヤのハンドリング治具

Publications (2)

Publication Number Publication Date
JPS6133442U JPS6133442U (ja) 1986-02-28
JPH019163Y2 true JPH019163Y2 (enrdf_load_stackoverflow) 1989-03-13

Family

ID=30674443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11547384U Granted JPS6133442U (ja) 1984-07-28 1984-07-28 ウエハ用キヤリヤのハンドリング治具

Country Status (1)

Country Link
JP (1) JPS6133442U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6133442U (ja) 1986-02-28

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