JPS6133442U - ウエハ用キヤリヤのハンドリング治具 - Google Patents

ウエハ用キヤリヤのハンドリング治具

Info

Publication number
JPS6133442U
JPS6133442U JP11547384U JP11547384U JPS6133442U JP S6133442 U JPS6133442 U JP S6133442U JP 11547384 U JP11547384 U JP 11547384U JP 11547384 U JP11547384 U JP 11547384U JP S6133442 U JPS6133442 U JP S6133442U
Authority
JP
Japan
Prior art keywords
rising
wafer carrier
stepped portion
carrier
engagement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11547384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019163Y2 (enrdf_load_stackoverflow
Inventor
理 坪田
Original Assignee
株式会社 ピユア−・クリエイト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 ピユア−・クリエイト filed Critical 株式会社 ピユア−・クリエイト
Priority to JP11547384U priority Critical patent/JPS6133442U/ja
Publication of JPS6133442U publication Critical patent/JPS6133442U/ja
Application granted granted Critical
Publication of JPH019163Y2 publication Critical patent/JPH019163Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP11547384U 1984-07-28 1984-07-28 ウエハ用キヤリヤのハンドリング治具 Granted JPS6133442U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11547384U JPS6133442U (ja) 1984-07-28 1984-07-28 ウエハ用キヤリヤのハンドリング治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11547384U JPS6133442U (ja) 1984-07-28 1984-07-28 ウエハ用キヤリヤのハンドリング治具

Publications (2)

Publication Number Publication Date
JPS6133442U true JPS6133442U (ja) 1986-02-28
JPH019163Y2 JPH019163Y2 (enrdf_load_stackoverflow) 1989-03-13

Family

ID=30674443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11547384U Granted JPS6133442U (ja) 1984-07-28 1984-07-28 ウエハ用キヤリヤのハンドリング治具

Country Status (1)

Country Link
JP (1) JPS6133442U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH019163Y2 (enrdf_load_stackoverflow) 1989-03-13

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