JPS6214730U - - Google Patents

Info

Publication number
JPS6214730U
JPS6214730U JP10416485U JP10416485U JPS6214730U JP S6214730 U JPS6214730 U JP S6214730U JP 10416485 U JP10416485 U JP 10416485U JP 10416485 U JP10416485 U JP 10416485U JP S6214730 U JPS6214730 U JP S6214730U
Authority
JP
Japan
Prior art keywords
flange
sides
side surfaces
wafer carrier
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10416485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10416485U priority Critical patent/JPS6214730U/ja
Publication of JPS6214730U publication Critical patent/JPS6214730U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP10416485U 1985-07-10 1985-07-10 Pending JPS6214730U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10416485U JPS6214730U (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10416485U JPS6214730U (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Publications (1)

Publication Number Publication Date
JPS6214730U true JPS6214730U (enrdf_load_stackoverflow) 1987-01-29

Family

ID=30977406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10416485U Pending JPS6214730U (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Country Status (1)

Country Link
JP (1) JPS6214730U (enrdf_load_stackoverflow)

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