JPH019153Y2 - - Google Patents

Info

Publication number
JPH019153Y2
JPH019153Y2 JP17820280U JP17820280U JPH019153Y2 JP H019153 Y2 JPH019153 Y2 JP H019153Y2 JP 17820280 U JP17820280 U JP 17820280U JP 17820280 U JP17820280 U JP 17820280U JP H019153 Y2 JPH019153 Y2 JP H019153Y2
Authority
JP
Japan
Prior art keywords
susceptor
vapor phase
growth gas
semiconductor
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17820280U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57102133U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17820280U priority Critical patent/JPH019153Y2/ja
Publication of JPS57102133U publication Critical patent/JPS57102133U/ja
Application granted granted Critical
Publication of JPH019153Y2 publication Critical patent/JPH019153Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP17820280U 1980-12-12 1980-12-12 Expired JPH019153Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17820280U JPH019153Y2 (enrdf_load_stackoverflow) 1980-12-12 1980-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17820280U JPH019153Y2 (enrdf_load_stackoverflow) 1980-12-12 1980-12-12

Publications (2)

Publication Number Publication Date
JPS57102133U JPS57102133U (enrdf_load_stackoverflow) 1982-06-23
JPH019153Y2 true JPH019153Y2 (enrdf_load_stackoverflow) 1989-03-13

Family

ID=29972779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17820280U Expired JPH019153Y2 (enrdf_load_stackoverflow) 1980-12-12 1980-12-12

Country Status (1)

Country Link
JP (1) JPH019153Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS57102133U (enrdf_load_stackoverflow) 1982-06-23

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