JPH0190044U - - Google Patents

Info

Publication number
JPH0190044U
JPH0190044U JP18543387U JP18543387U JPH0190044U JP H0190044 U JPH0190044 U JP H0190044U JP 18543387 U JP18543387 U JP 18543387U JP 18543387 U JP18543387 U JP 18543387U JP H0190044 U JPH0190044 U JP H0190044U
Authority
JP
Japan
Prior art keywords
pellicle
support frame
outer periphery
grip
shaped grip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18543387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18543387U priority Critical patent/JPH0190044U/ja
Publication of JPH0190044U publication Critical patent/JPH0190044U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP18543387U 1987-12-07 1987-12-07 Pending JPH0190044U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18543387U JPH0190044U (zh) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18543387U JPH0190044U (zh) 1987-12-07 1987-12-07

Publications (1)

Publication Number Publication Date
JPH0190044U true JPH0190044U (zh) 1989-06-14

Family

ID=31476751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18543387U Pending JPH0190044U (zh) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH0190044U (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002318451A (ja) * 2001-04-24 2002-10-31 Asahi Kasei Electronics Co Ltd ペリクル用枠体及びその製造方法
JP2007304491A (ja) * 2006-05-15 2007-11-22 Shin Etsu Chem Co Ltd ペリクルおよびペリクル剥離装置
JP2011007935A (ja) * 2009-06-24 2011-01-13 Shin-Etsu Chemical Co Ltd ペリクルフレーム及びリソグラフィ用ペリクル

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6249153B2 (zh) * 1982-10-15 1987-10-17 Mitsubishi Electric Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6249153B2 (zh) * 1982-10-15 1987-10-17 Mitsubishi Electric Corp

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002318451A (ja) * 2001-04-24 2002-10-31 Asahi Kasei Electronics Co Ltd ペリクル用枠体及びその製造方法
JP2007304491A (ja) * 2006-05-15 2007-11-22 Shin Etsu Chem Co Ltd ペリクルおよびペリクル剥離装置
JP4637053B2 (ja) * 2006-05-15 2011-02-23 信越化学工業株式会社 ペリクルおよびペリクル剥離装置
JP2011007935A (ja) * 2009-06-24 2011-01-13 Shin-Etsu Chemical Co Ltd ペリクルフレーム及びリソグラフィ用ペリクル

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