JPH0190044U - - Google Patents
Info
- Publication number
- JPH0190044U JPH0190044U JP18543387U JP18543387U JPH0190044U JP H0190044 U JPH0190044 U JP H0190044U JP 18543387 U JP18543387 U JP 18543387U JP 18543387 U JP18543387 U JP 18543387U JP H0190044 U JPH0190044 U JP H0190044U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- support frame
- outer periphery
- grip
- shaped grip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18543387U JPH0190044U (pt-PT) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18543387U JPH0190044U (pt-PT) | 1987-12-07 | 1987-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0190044U true JPH0190044U (pt-PT) | 1989-06-14 |
Family
ID=31476751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18543387U Pending JPH0190044U (pt-PT) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0190044U (pt-PT) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002318451A (ja) * | 2001-04-24 | 2002-10-31 | Asahi Kasei Electronics Co Ltd | ペリクル用枠体及びその製造方法 |
| JP2007304491A (ja) * | 2006-05-15 | 2007-11-22 | Shin Etsu Chem Co Ltd | ペリクルおよびペリクル剥離装置 |
| JP2011007935A (ja) * | 2009-06-24 | 2011-01-13 | Shin-Etsu Chemical Co Ltd | ペリクルフレーム及びリソグラフィ用ペリクル |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6249153B2 (pt-PT) * | 1982-10-15 | 1987-10-17 | Mitsubishi Electric Corp |
-
1987
- 1987-12-07 JP JP18543387U patent/JPH0190044U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6249153B2 (pt-PT) * | 1982-10-15 | 1987-10-17 | Mitsubishi Electric Corp |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002318451A (ja) * | 2001-04-24 | 2002-10-31 | Asahi Kasei Electronics Co Ltd | ペリクル用枠体及びその製造方法 |
| JP2007304491A (ja) * | 2006-05-15 | 2007-11-22 | Shin Etsu Chem Co Ltd | ペリクルおよびペリクル剥離装置 |
| JP4637053B2 (ja) * | 2006-05-15 | 2011-02-23 | 信越化学工業株式会社 | ペリクルおよびペリクル剥離装置 |
| JP2011007935A (ja) * | 2009-06-24 | 2011-01-13 | Shin-Etsu Chemical Co Ltd | ペリクルフレーム及びリソグラフィ用ペリクル |