JPH0189965U - - Google Patents

Info

Publication number
JPH0189965U
JPH0189965U JP18677687U JP18677687U JPH0189965U JP H0189965 U JPH0189965 U JP H0189965U JP 18677687 U JP18677687 U JP 18677687U JP 18677687 U JP18677687 U JP 18677687U JP H0189965 U JPH0189965 U JP H0189965U
Authority
JP
Japan
Prior art keywords
melt
substrate holder
substrate
epitaxial growth
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18677687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523585Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18677687U priority Critical patent/JPH0523585Y2/ja
Publication of JPH0189965U publication Critical patent/JPH0189965U/ja
Application granted granted Critical
Publication of JPH0523585Y2 publication Critical patent/JPH0523585Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP18677687U 1987-12-07 1987-12-07 Expired - Lifetime JPH0523585Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18677687U JPH0523585Y2 (enrdf_load_stackoverflow) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18677687U JPH0523585Y2 (enrdf_load_stackoverflow) 1987-12-07 1987-12-07

Publications (2)

Publication Number Publication Date
JPH0189965U true JPH0189965U (enrdf_load_stackoverflow) 1989-06-13
JPH0523585Y2 JPH0523585Y2 (enrdf_load_stackoverflow) 1993-06-16

Family

ID=31477984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18677687U Expired - Lifetime JPH0523585Y2 (enrdf_load_stackoverflow) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH0523585Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0523585Y2 (enrdf_load_stackoverflow) 1993-06-16

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