JPS61198279U - - Google Patents

Info

Publication number
JPS61198279U
JPS61198279U JP7890585U JP7890585U JPS61198279U JP S61198279 U JPS61198279 U JP S61198279U JP 7890585 U JP7890585 U JP 7890585U JP 7890585 U JP7890585 U JP 7890585U JP S61198279 U JPS61198279 U JP S61198279U
Authority
JP
Japan
Prior art keywords
substrate
core tube
reactor core
phase epitaxial
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7890585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7890585U priority Critical patent/JPS61198279U/ja
Publication of JPS61198279U publication Critical patent/JPS61198279U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7890585U 1985-05-27 1985-05-27 Pending JPS61198279U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7890585U JPS61198279U (enrdf_load_stackoverflow) 1985-05-27 1985-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7890585U JPS61198279U (enrdf_load_stackoverflow) 1985-05-27 1985-05-27

Publications (1)

Publication Number Publication Date
JPS61198279U true JPS61198279U (enrdf_load_stackoverflow) 1986-12-11

Family

ID=30623316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7890585U Pending JPS61198279U (enrdf_load_stackoverflow) 1985-05-27 1985-05-27

Country Status (1)

Country Link
JP (1) JPS61198279U (enrdf_load_stackoverflow)

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