JPS61100141U - - Google Patents

Info

Publication number
JPS61100141U
JPS61100141U JP18594784U JP18594784U JPS61100141U JP S61100141 U JPS61100141 U JP S61100141U JP 18594784 U JP18594784 U JP 18594784U JP 18594784 U JP18594784 U JP 18594784U JP S61100141 U JPS61100141 U JP S61100141U
Authority
JP
Japan
Prior art keywords
boat
holding
holding device
heat treatment
vertical semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18594784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18594784U priority Critical patent/JPS61100141U/ja
Publication of JPS61100141U publication Critical patent/JPS61100141U/ja
Pending legal-status Critical Current

Links

JP18594784U 1984-12-07 1984-12-07 Pending JPS61100141U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18594784U JPS61100141U (enrdf_load_stackoverflow) 1984-12-07 1984-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18594784U JPS61100141U (enrdf_load_stackoverflow) 1984-12-07 1984-12-07

Publications (1)

Publication Number Publication Date
JPS61100141U true JPS61100141U (enrdf_load_stackoverflow) 1986-06-26

Family

ID=30743406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18594784U Pending JPS61100141U (enrdf_load_stackoverflow) 1984-12-07 1984-12-07

Country Status (1)

Country Link
JP (1) JPS61100141U (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6447020A (en) * 1987-08-18 1989-02-21 Shinetsu Sekiei Kk Heat treatment device for manufacturing semiconductor
JPH01145807A (ja) * 1987-12-01 1989-06-07 Toshiba Ceramics Co Ltd ウェーハ熱処理用治具
JPH01133728U (enrdf_load_stackoverflow) * 1988-03-07 1989-09-12
JPH01315137A (ja) * 1988-06-15 1989-12-20 Tel Sagami Ltd プラズマ処理方法及び縦型熱処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497264U (enrdf_load_stackoverflow) * 1972-05-02 1974-01-22
JPS5285731A (en) * 1976-01-09 1977-07-16 Hitachi Ltd Heat treatment furnace

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497264U (enrdf_load_stackoverflow) * 1972-05-02 1974-01-22
JPS5285731A (en) * 1976-01-09 1977-07-16 Hitachi Ltd Heat treatment furnace

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6447020A (en) * 1987-08-18 1989-02-21 Shinetsu Sekiei Kk Heat treatment device for manufacturing semiconductor
JPH01145807A (ja) * 1987-12-01 1989-06-07 Toshiba Ceramics Co Ltd ウェーハ熱処理用治具
JPH01133728U (enrdf_load_stackoverflow) * 1988-03-07 1989-09-12
JPH01315137A (ja) * 1988-06-15 1989-12-20 Tel Sagami Ltd プラズマ処理方法及び縦型熱処理装置

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