JPH0189952U - - Google Patents
Info
- Publication number
- JPH0189952U JPH0189952U JP18636987U JP18636987U JPH0189952U JP H0189952 U JPH0189952 U JP H0189952U JP 18636987 U JP18636987 U JP 18636987U JP 18636987 U JP18636987 U JP 18636987U JP H0189952 U JPH0189952 U JP H0189952U
- Authority
- JP
- Japan
- Prior art keywords
- cluster
- organic
- ion
- accelerating electrode
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 239000011368 organic material Substances 0.000 claims 2
- 239000005416 organic matter Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18636987U JPH0189952U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-09 | 1987-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18636987U JPH0189952U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-09 | 1987-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189952U true JPH0189952U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-13 |
Family
ID=31477599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18636987U Pending JPH0189952U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-09 | 1987-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189952U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60255971A (ja) * | 1984-05-30 | 1985-12-17 | Mitsubishi Electric Corp | 薄膜形成装置 |
-
1987
- 1987-12-09 JP JP18636987U patent/JPH0189952U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60255971A (ja) * | 1984-05-30 | 1985-12-17 | Mitsubishi Electric Corp | 薄膜形成装置 |
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