JPH0187545U - - Google Patents
Info
- Publication number
- JPH0187545U JPH0187545U JP18426387U JP18426387U JPH0187545U JP H0187545 U JPH0187545 U JP H0187545U JP 18426387 U JP18426387 U JP 18426387U JP 18426387 U JP18426387 U JP 18426387U JP H0187545 U JPH0187545 U JP H0187545U
- Authority
- JP
- Japan
- Prior art keywords
- layer wiring
- insulating film
- upper layer
- interlayer insulating
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 5
- 239000011229 interlayer Substances 0.000 claims description 2
- 230000000295 complement effect Effects 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第１図は本考案の多層配線構造の一実施例を示
す図、第２図は従来の多層配線構造の一例を示す
図である。 １……上層回路配線、２……層間絶縁膜、３…
…上層配線、４……遮光効果を得るための下層配
線。
す図、第２図は従来の多層配線構造の一例を示す
図である。 １……上層回路配線、２……層間絶縁膜、３…
…上層配線、４……遮光効果を得るための下層配
線。
Claims (1)
- 層間絶縁膜が有機絶縁物で構成される多層配線
構造において、上層配線に部分的に穴又はスリツ
トを設け、この位置に相補的に下層配線を設けた
ことを特徴とする多層配線構造。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18426387U JPH0187545U (ja) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18426387U JPH0187545U (ja) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187545U true JPH0187545U (ja) | 1989-06-09 |
Family
ID=31475636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18426387U Pending JPH0187545U (ja) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187545U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226165A (en) * | 1975-08-25 | 1977-02-26 | Hitachi Ltd | Electrode construction |
| JPS5727047A (en) * | 1980-07-25 | 1982-02-13 | Seiko Epson Corp | Semiconductor device |
-
1987
- 1987-12-01 JP JP18426387U patent/JPH0187545U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226165A (en) * | 1975-08-25 | 1977-02-26 | Hitachi Ltd | Electrode construction |
| JPS5727047A (en) * | 1980-07-25 | 1982-02-13 | Seiko Epson Corp | Semiconductor device |