JPH0187157U - - Google Patents
Info
- Publication number
- JPH0187157U JPH0187157U JP18040387U JP18040387U JPH0187157U JP H0187157 U JPH0187157 U JP H0187157U JP 18040387 U JP18040387 U JP 18040387U JP 18040387 U JP18040387 U JP 18040387U JP H0187157 U JPH0187157 U JP H0187157U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- tray
- forming apparatus
- film forming
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 8
- 230000008021 deposition Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180403U JPH0519329Y2 (en, 2012) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180403U JPH0519329Y2 (en, 2012) | 1987-11-26 | 1987-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0187157U true JPH0187157U (en, 2012) | 1989-06-08 |
| JPH0519329Y2 JPH0519329Y2 (en, 2012) | 1993-05-21 |
Family
ID=31471925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987180403U Expired - Lifetime JPH0519329Y2 (en, 2012) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519329Y2 (en, 2012) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5852680U (ja) * | 1981-10-05 | 1983-04-09 | 松下電器産業株式会社 | ビデオカセツト |
| JPS6255558U (en, 2012) * | 1985-09-24 | 1987-04-06 |
-
1987
- 1987-11-26 JP JP1987180403U patent/JPH0519329Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5852680U (ja) * | 1981-10-05 | 1983-04-09 | 松下電器産業株式会社 | ビデオカセツト |
| JPS6255558U (en, 2012) * | 1985-09-24 | 1987-04-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519329Y2 (en, 2012) | 1993-05-21 |
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