JPH0183256U - - Google Patents
Info
- Publication number
- JPH0183256U JPH0183256U JP1987179296U JP17929687U JPH0183256U JP H0183256 U JPH0183256 U JP H0183256U JP 1987179296 U JP1987179296 U JP 1987179296U JP 17929687 U JP17929687 U JP 17929687U JP H0183256 U JPH0183256 U JP H0183256U
- Authority
- JP
- Japan
- Prior art keywords
- ions
- electrostatic
- tube
- accelerator
- accelerates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 9
- 230000001133 acceleration Effects 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 230000005686 electrostatic field Effects 0.000 claims 1
- 239000000284 extract Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179296U JPH0183256U (ko) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179296U JPH0183256U (ko) | 1987-11-24 | 1987-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183256U true JPH0183256U (ko) | 1989-06-02 |
Family
ID=31470856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987179296U Pending JPH0183256U (ko) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183256U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220285126A1 (en) * | 2021-03-04 | 2022-09-08 | Sumitomo Heavy Industries Ion Technology Co., Ltd. | Ion implanter and ion implantation method |
-
1987
- 1987-11-24 JP JP1987179296U patent/JPH0183256U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220285126A1 (en) * | 2021-03-04 | 2022-09-08 | Sumitomo Heavy Industries Ion Technology Co., Ltd. | Ion implanter and ion implantation method |
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