JPH01152445U - - Google Patents
Info
- Publication number
- JPH01152445U JPH01152445U JP4952988U JP4952988U JPH01152445U JP H01152445 U JPH01152445 U JP H01152445U JP 4952988 U JP4952988 U JP 4952988U JP 4952988 U JP4952988 U JP 4952988U JP H01152445 U JPH01152445 U JP H01152445U
- Authority
- JP
- Japan
- Prior art keywords
- implantation
- sample
- ions
- amount
- controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002513 implantation Methods 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 6
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4952988U JPH01152445U (ko) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4952988U JPH01152445U (ko) | 1988-04-13 | 1988-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01152445U true JPH01152445U (ko) | 1989-10-20 |
Family
ID=31275622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4952988U Pending JPH01152445U (ko) | 1988-04-13 | 1988-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01152445U (ko) |
-
1988
- 1988-04-13 JP JP4952988U patent/JPH01152445U/ja active Pending
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