JPH01122252U - - Google Patents
Info
- Publication number
- JPH01122252U JPH01122252U JP1859488U JP1859488U JPH01122252U JP H01122252 U JPH01122252 U JP H01122252U JP 1859488 U JP1859488 U JP 1859488U JP 1859488 U JP1859488 U JP 1859488U JP H01122252 U JPH01122252 U JP H01122252U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- power source
- ion source
- deceleration
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1859488U JPH01122252U (ko) | 1988-02-15 | 1988-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1859488U JPH01122252U (ko) | 1988-02-15 | 1988-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01122252U true JPH01122252U (ko) | 1989-08-18 |
Family
ID=31233380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1859488U Pending JPH01122252U (ko) | 1988-02-15 | 1988-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01122252U (ko) |
-
1988
- 1988-02-15 JP JP1859488U patent/JPH01122252U/ja active Pending