JPH03118600U - - Google Patents
Info
- Publication number
- JPH03118600U JPH03118600U JP2714990U JP2714990U JPH03118600U JP H03118600 U JPH03118600 U JP H03118600U JP 2714990 U JP2714990 U JP 2714990U JP 2714990 U JP2714990 U JP 2714990U JP H03118600 U JPH03118600 U JP H03118600U
- Authority
- JP
- Japan
- Prior art keywords
- accelerator tube
- magnetic field
- ion accelerator
- electrostatic
- accelerating electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2714990U JPH03118600U (ko) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2714990U JPH03118600U (ko) | 1990-03-19 | 1990-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03118600U true JPH03118600U (ko) | 1991-12-06 |
Family
ID=31530017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2714990U Pending JPH03118600U (ko) | 1990-03-19 | 1990-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03118600U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015137150A1 (ja) * | 2014-03-12 | 2015-09-17 | 株式会社アルバック | イオン照射装置、イオン照射方法 |
-
1990
- 1990-03-19 JP JP2714990U patent/JPH03118600U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015137150A1 (ja) * | 2014-03-12 | 2015-09-17 | 株式会社アルバック | イオン照射装置、イオン照射方法 |
| JP5877936B1 (ja) * | 2014-03-12 | 2016-03-08 | 株式会社アルバック | イオン照射装置、イオン照射方法 |
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