JPH0171457U - - Google Patents
Info
- Publication number
- JPH0171457U JPH0171457U JP1987166297U JP16629787U JPH0171457U JP H0171457 U JPH0171457 U JP H0171457U JP 1987166297 U JP1987166297 U JP 1987166297U JP 16629787 U JP16629787 U JP 16629787U JP H0171457 U JPH0171457 U JP H0171457U
- Authority
- JP
- Japan
- Prior art keywords
- electrode pair
- laser
- main electrode
- ionization
- peaking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 230000005284 excitation Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図は本考案実施例の構成図で、レーザ光放
出方向に直交する方向に切断して示すレーザチヤ
ンバ１の内部構造と、励起回路図を併記した図、
第２図はその主電極対ＥｄのカソードＥｄｃと予
備電離用電極対Ｅｐの関係を示す要部斜視図、第
３図はその等価回路図である。第４図は本考案の
他の実施例の要部構成図である。第５図は放電励
起エキシマレーザの一般的な励起回路を示す等価
回路図、第６図は自動予備電離型レーザの一般的
な励起回路を示す等価回路図、第７図は従来のコ
ンデンサ内蔵型レーザの構成図である。
１……レーザチヤンバ、１１……本体、１２…
…フランジ部、１３……絶縁体、１４，１４……
支柱、１５……支持板、２……フアン、３，３…
…熱交換器、４……ガイド板、Ｃ２……ピーキン
グコンデンサ、Ｅｄ……主電極対、Ｅｄｃ……カ
ソード、Ｅｄａ……アノード、Ｅｐ……予備電離
用電極対、Ｅｐｌ……板状電極、Ｅｐｉ……ヒン
電極。
FIG. 1 is a configuration diagram of an embodiment of the present invention, which shows the internal structure of a laser chamber 1 cut in a direction perpendicular to the laser beam emission direction, and also shows an excitation circuit diagram.
FIG. 2 is a perspective view of a main part showing the relationship between the cathode E dc of the main electrode pair E d and the pre-ionization electrode pair E p , and FIG. 3 is an equivalent circuit diagram thereof. FIG. 4 is a block diagram of main parts of another embodiment of the present invention. Fig. 5 is an equivalent circuit diagram showing a general excitation circuit of a discharge-pumped excimer laser, Fig. 6 is an equivalent circuit diagram showing a general excitation circuit of an automatic pre-ionization laser, and Fig. 7 is a conventional capacitor built-in type laser. FIG. 2 is a configuration diagram of a laser. 1... Laser chamber, 11... Main body, 12...
...Flange part, 13... Insulator, 14, 14...
Pillar, 15...Support plate, 2...Fan, 3,3...
...Heat exchanger, 4...Guide plate, C2 ...Peaking capacitor, E d ...Main electrode pair, E dc ...Cathode, E da ...Anode, E p ...Preliminary ionization electrode pair, E pl ...Plate electrode, E pi ...Hin electrode.
Claims (1)
ーザ放電用の主電極対と、この主電極対の放電に
先立つて放電する予備電離用電極対と、この予備
電離用電極対に直列接続されるピーキングコンデ
ンサと、上記主電極対間にガス流を与えるための
フアンを内蔵したレーザ装置において、上記主電
極対のカソード側を上記レーザチヤンバの壁体に
近接配置するとともに、上記予備電離用電極対お
よび上記ピーキングコンデンサを上記主電極対の
カソード側に近接配置し、かつ、上記ピーキング
コンデンサを上記レーザチヤンバの壁体に支承し
、上記予備電離用電極対はその一方の電極を上記
ガス流をガイドし得る板状電極で、他方を複数の
ピン状電極で構成したことを特徴とする、エキシ
マレーザ装置。 A laser chamber filled with a medium gas includes a main electrode pair for laser discharge, a pre-ionization electrode pair that discharges prior to discharging the main electrode pair, and a peaking capacitor connected in series to this pre-ionization electrode pair. and a laser device having a built-in fan for applying a gas flow between the main electrode pair, in which the cathode side of the main electrode pair is disposed close to the wall of the laser chamber, and the pre-ionization electrode pair and the peaking A capacitor is disposed close to the cathode side of the main electrode pair, the peaking capacitor is supported on the wall of the laser chamber, and the pre-ionization electrode pair has one electrode shaped like a plate capable of guiding the gas flow. An excimer laser device characterized in that one electrode is composed of a plurality of pin-shaped electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166297U JPH0726855Y2 (en) | 1987-10-30 | 1987-10-30 | Excimer laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166297U JPH0726855Y2 (en) | 1987-10-30 | 1987-10-30 | Excimer laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0171457U true JPH0171457U (en) | 1989-05-12 |
| JPH0726855Y2 JPH0726855Y2 (en) | 1995-06-14 |
Family
ID=31453555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987166297U Expired - Lifetime JPH0726855Y2 (en) | 1987-10-30 | 1987-10-30 | Excimer laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726855Y2 (en) |
-
1987
- 1987-10-30 JP JP1987166297U patent/JPH0726855Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0726855Y2 (en) | 1995-06-14 |