JPH0318749B2 - - Google Patents
Info
- Publication number
- JPH0318749B2 JPH0318749B2 JP60095574A JP9557485A JPH0318749B2 JP H0318749 B2 JPH0318749 B2 JP H0318749B2 JP 60095574 A JP60095574 A JP 60095574A JP 9557485 A JP9557485 A JP 9557485A JP H0318749 B2 JPH0318749 B2 JP H0318749B2
- Authority
- JP
- Japan
- Prior art keywords
- main discharge
- discharge electrode
- discharge
- main
- gas laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003990 capacitor Substances 0.000 claims description 8
- 238000007664 blowing Methods 0.000 claims description 6
- 230000010355 oscillation Effects 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Description
【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野） 本発明はガスレーザ発振装置に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a gas laser oscillation device.
（従来の技術）
出力が1KW以上になるいわゆる大出力CO2レ
ーザは気密容器内に封入されたガスレーザ媒質を
フアンにより熱交換器を通して循環している。こ
の種の技術としては例えば、、特開昭57−17152号
公報に開示されたものが知られている。この技術
は三軸直交DC.グロー放電型CO2レーザで、第５
図に示すように円筒型の円筒容器１を有し、隔板
２，３によつてブロア４の上流、下流が遮られ、
放電電極５，６に接続されたガス流路の縮小ガイ
ド板７，８、拡大ガイド板９，１０は円筒容器１
の円周曲率を積極的に利用して、圧力損失が最小
になるように設置されている。なお、１１は熱交
換器であり、また、放電電極５は平板状電極、他
方の放電電極６は複数の針状電極で構成されてい
る。上記従来技術ではDC.グロー放電型とあるよ
うに、ガスレーザ媒質の封入圧力が数十トールの
比較的低圧の条件でレーザ発振を行うので、装置
としては放電空間を特に予備放電するための電極
は必要がなかつた。しかし、封入圧力が大気圧と
ほぼ同等の比較的高圧になるTEA
（Transversery Excited
Atomosphericpressure）CO2レーザや、高繰返
しエキシマレーザの場合には安定した主放電を得
るために、予備放電電極を設けている。この予備
放電電極にはコロナ放電、UV放電等が知られて
いる。高繰返しエキシマレーザでは、上記大出力
CO2レーザと同様に、ガスレーザ媒質を循環して
いる。(Prior Art) A so-called high-output CO 2 laser with an output of 1 KW or more circulates a gas laser medium sealed in an airtight container through a heat exchanger using a fan. This type of technique is known, for example, as disclosed in Japanese Patent Laid-Open No. 17152/1983. This technology is a three-axis orthogonal DC. Glow discharge type CO 2 laser, and the fifth
As shown in the figure, it has a cylindrical container 1, and the upstream and downstream sides of the blower 4 are blocked by partition plates 2 and 3.
The reduction guide plates 7 and 8 and the enlargement guide plates 9 and 10 of the gas flow path connected to the discharge electrodes 5 and 6 are connected to the cylindrical container 1.
It is installed so that pressure loss is minimized by actively utilizing the circumferential curvature of. Note that 11 is a heat exchanger, the discharge electrode 5 is a flat electrode, and the other discharge electrode 6 is composed of a plurality of needle-shaped electrodes. In the above-mentioned conventional technology, as described in the DC glow discharge type, laser oscillation is performed under a relatively low pressure condition where the gas laser medium is filled with a pressure of several tens of Torr. There was no need. However, TEA has a relatively high sealing pressure almost equivalent to atmospheric pressure.
(Transversery Excited
In the case of CO 2 laser (Atmospheric pressure) laser or high repetition rate excimer laser, a preliminary discharge electrode is provided to obtain a stable main discharge. Corona discharge, UV discharge, etc. are known for this preliminary discharge electrode. For high repetition excimer lasers, the above-mentioned high output
Similar to CO2 lasers, there is a circulating gas laser medium.
（発明が解決しようとする課題）
安定した主放電を行わせるために、例えば上記
従来技術にあるように、主放電電極の一方を針状
電極にして複数個備えさせている。この方式では
針状電極がガスレーザ媒質の流れを阻害する問題
があつた。一方、主放電電極を平板状にした場合
には、上記の流れは円滑になるが、針状電極のよ
うに主放電が安定しない問題があつた。本発明は
このような問題を解決するためになされたもの
で、ガスレーザ媒質の流れを阻害することなく、
安定した主放電が得られるガスレーザ発振装置を
提供することを目的とする。(Problems to be Solved by the Invention) In order to perform stable main discharge, for example, as in the above-mentioned prior art, one of the main discharge electrodes is made into a needle-like electrode and a plurality of them are provided. This method had a problem in that the needle-shaped electrode obstructed the flow of the gas laser medium. On the other hand, when the main discharge electrode is made into a flat plate, the above-mentioned flow becomes smoother, but there is a problem that the main discharge is not stable as in the case of a needle-like electrode. The present invention was made in order to solve such problems, and it is possible to use a gas laser medium without obstructing the flow of the gas laser medium.
An object of the present invention is to provide a gas laser oscillation device that can provide stable main discharge.
［発明の構成］
（課題を解決するための手段と作用）
導電部材からなりガスレーザ媒質を封入した円
筒状の気密容器と、この気密容器内に設置された
陰極および陽極からなる主放電電極と、この主放
電電極による主放電空間を予備電離する予備放電
電極と、上記気密容器内に設けられ上記ガスレー
ザ媒質を循環させる送風手段と、上記主放電電極
に接続されるピーキングキヤパシタと、上記主放
電空間を間にして相対向して配置された光共振器
鏡とを備えたガスレーザ発振装置において、上記
気密容器の内壁に沿つて上記主放電電極および送
風手段を円弧状に包囲し、上記ピーキングキヤパ
シタと主放電電極の他方とに接続した導通板と、
複数のコロナ放電電極からなり上記主放電電極の
放電面に所定ピツチで形成された溝にそれぞれ埋
設された予備放電電極と、上記主放電空間に対し
て送風側に設けられ上記ガスレーザ媒質を主放電
空間に導くガイドとを備えた構成としたもので、
大面積の導通板によつて放電回路のインダクタン
スが小さくなり、放電電荷の流れが早くなる。[Structure of the invention] (Means and effects for solving the problem) A cylindrical airtight container made of a conductive member and enclosing a gas laser medium, a main discharge electrode consisting of a cathode and an anode installed in the airtight container, A preliminary discharge electrode that pre-ionizes the main discharge space by the main discharge electrode, a blowing means provided in the airtight container for circulating the gas laser medium, a peaking capacitor connected to the main discharge electrode, and the main discharge electrode. In a gas laser oscillation device including optical resonator mirrors disposed facing each other with a space in between, the main discharge electrode and the air blowing means are surrounded in an arc shape along the inner wall of the airtight container, and the peaking cap is a conductive plate connected to the pacita and the other of the main discharge electrodes;
A preliminary discharge electrode is formed of a plurality of corona discharge electrodes and is embedded in grooves formed at a predetermined pitch in the discharge surface of the main discharge electrode, and a preliminary discharge electrode is provided on the blowing side with respect to the main discharge space to discharge the gas laser medium into the main discharge. It is configured with a guide that leads to the space,
The large-area conductive plate reduces the inductance of the discharge circuit and speeds up the flow of discharge charge.
（実施例）
以下、実施例を示す図面に基づいて本発明を説
明する。第１図、第２図において、２０は気密容
器の主要部である円筒状の本体で、一端は底部２
１となつて閉塞し他端は開口している。この開口
側にはフランジ部が形成されていて、これに蓋体
２２がＯリング２３を介してボルト（図示せず）
によつて着脱自在に取付けられている。底部２１
および蓋体２２の中央部にはそれぞれ通過孔２４
ａ，２４ｂが形成されていて、これらは上記取付
け時において、本体１の中心軸線とほぼ同軸に対
向している。また、一方の通過孔２４ａの外側に
は光共振器を構成する出力鏡２５がベローズ２６
ａを介して気密に取付けられている。反対側の通
過孔２４ｂの外側には光共振器を構成する高反射
鏡２７がベローズ２６ｂを介して気密に取付けら
れている。本体２０の内部には、共にこの本体２
０軸線を長手方向平板状のとするのほぼ同形で、
主放電電極を構成する陰極３０と陽極３１とが所
定の間隔をおいて対向配置されている。これら電
極はアルミニユウム等の導電材製の支持板３２，
３３にそれぞれ取付けられている。支持板３２，
３３は蓋体２２と、本体２０内への挿入時に底部
２１に近接しかつ本体２０の内径より若干小の直
径の円板３４とに固着されている。この円板３４
には通過孔２４ｃが他の通過孔２４ａ，２４ｂと
ほぼ同軸に形成されている。陰極３０の放電面に
は複数の溝が刻設され、これら溝にコロナ放電す
る予備放電電極３６が設けられている。陰極３０
と支持板３２との間には複数のピーキングキヤパ
シタ３７が設けられている。一方、陽極３１の背
面側には送風機として複数の小型フアン３８が支
持板３３上に台３９を介して設けられている。こ
れら小型フアン３８の両側には熱交換器４０ａ，
４０ｂが設けられている。また、小型フアン３８
の吹き出し側になる熱交換器４０ａにガスレーザ
媒質を主放電空間４１に導く電気絶縁部材製のダ
クト４２が取付けられている。上記構成要素の
内、陰極３０、陽極３１、予備放電電極３６、ピ
ーキングキヤパシタ３７、小型フアン３８、熱交
換器４０ａおよびダクト４２を囲つた導通板４３
ａ，４３ｂが設けられている。導通板４３ａ，４
３ｂは本体２０の内壁に沿うように円弧状になつ
て一方の支持板３２と小型フアン３８とに支持さ
れている。上記構成の電気的回路について第３図
にて説明する。すなわち、陰極３０と陽極３１と
は、パルス電圧を供給する電源４５に接続されて
いる。予備放電電極３６はガラスパイプ４６内に
銅の芯線４７を納めた構造になり、各々の芯線４
７は一括して陽極３１に接続されている。また、
ぴーキングキヤパシタ３７は導通板４３ａ，４３
ｂにより短絡する形で陰極３０、陽極３１との間
に設けられている。(Example) Hereinafter, the present invention will be described based on drawings showing examples. In FIGS. 1 and 2, 20 is a cylindrical body that is the main part of the airtight container, and one end is the bottom 2.
1 and is closed, and the other end is open. A flange portion is formed on this opening side, and the lid body 22 is attached to the flange portion via an O-ring 23 with a bolt (not shown).
It is removably attached. bottom 21
and a passage hole 24 in the center of the lid body 22.
a and 24b are formed, and these are substantially coaxially opposed to the central axis of the main body 1 at the time of attachment. Further, an output mirror 25 constituting an optical resonator is located outside one of the passage holes 24a, and a bellows 26
It is airtightly attached via a. A high reflection mirror 27 constituting an optical resonator is airtightly attached to the outside of the passage hole 24b on the opposite side via a bellows 26b. Inside the main body 20, this main body 2
It is almost the same shape as the 0 axis is a flat plate in the longitudinal direction,
A cathode 30 and an anode 31, which constitute a main discharge electrode, are arranged to face each other with a predetermined interval. These electrodes include a support plate 32 made of a conductive material such as aluminum,
33 respectively. support plate 32,
33 is fixed to the lid 22 and a disk 34 which is close to the bottom 21 when inserted into the main body 20 and has a diameter slightly smaller than the inner diameter of the main body 20. This disk 34
A passage hole 24c is formed substantially coaxially with other passage holes 24a and 24b. A plurality of grooves are carved in the discharge surface of the cathode 30, and preliminary discharge electrodes 36 for corona discharge are provided in these grooves. Cathode 30
A plurality of peaking capacitors 37 are provided between the support plate 32 and the support plate 32 . On the other hand, on the back side of the anode 31, a plurality of small fans 38 as blowers are provided on a support plate 33 via a stand 39. On both sides of these small fans 38, heat exchangers 40a,
40b is provided. Also, small fan 38
A duct 42 made of an electrically insulating material is attached to the heat exchanger 40a on the outlet side of the duct 42 for guiding the gas laser medium to the main discharge space 41. Among the above components, a conduction plate 43 surrounding the cathode 30, anode 31, preliminary discharge electrode 36, peaking capacitor 37, small fan 38, heat exchanger 40a and duct 42
a, 43b are provided. Conductive plates 43a, 4
3b has an arcuate shape along the inner wall of the main body 20 and is supported by one support plate 32 and a small fan 38. The electrical circuit having the above configuration will be explained with reference to FIG. That is, the cathode 30 and the anode 31 are connected to a power source 45 that supplies a pulse voltage. The preliminary discharge electrode 36 has a structure in which a copper core wire 47 is housed in a glass pipe 46, and each core wire 4
7 are collectively connected to the anode 31. Also,
The peaking capacitor 37 is connected to the conduction plates 43a, 43
It is provided between the cathode 30 and the anode 31 in a short-circuited manner by b.
次に、上記構成の作用について説明する。主放
電開始前に矢印Ａに示すガスレーザ媒質の循環流
のもとに、まず、予備放電電極３６の予備放電に
より、主放電空間４１における陰極３０表面近傍
に予備電離作用が生じ、次いで、陰極３０、陽極
３１間で均一な主放電が生じる。この場合、電源
４５に蓄えられた電荷は、予備放電の期間に一
旦、ピーキンキヤパシタ３７に蓄積される。この
ピーキングキヤパシタ３７の電荷は導通板４３
ａ，４３ｂを介して放電部へ流れ込み、主放電が
発生する。 Next, the operation of the above configuration will be explained. Before starting the main discharge, under the circulating flow of the gas laser medium shown by the arrow A, a preliminary discharge occurs in the preliminary discharge electrode 36, causing a preliminary ionization effect near the surface of the cathode 30 in the main discharge space 41, and then , a uniform main discharge occurs between the anodes 31. In this case, the charges stored in the power supply 45 are temporarily stored in the peakin capacitor 37 during the preliminary discharge period. The electric charge of this peaking capacitor 37 is
It flows into the discharge section via a and 43b, and a main discharge is generated.
第４図は、本実施例によつて得られたパルス繰
返し数とレーザ出力戸の関係を示した図である。
同図に見られるように、レーザ出力は繰返し数が
増加すると共に直線的に増加し、高い繰返し時に
おいても１パルス当りのレーザ出力はほとんど変
化していない。 FIG. 4 is a diagram showing the relationship between the pulse repetition rate and the laser output power obtained in this example.
As seen in the figure, the laser output increases linearly as the number of repetitions increases, and the laser output per pulse hardly changes even at high repetitions.
［発明の効果］
主放電の電荷を主放電電極に供給する導通板４
３ａ，４３ｂを本体２０の内壁に沿うように円弧
状に形成して面積が大きしたため・放電回路にお
けるインダクタンスを小さくすることができた。
したがつて、上記電荷は放電部に素早く流れ込む
と共に、予備放電電極を溝に埋め込ませたので、
主放電空間４１にはガスレーザ媒質が円滑に流
れ、パルス放電の繰返し数を大幅に増大すること
ができた。また、導通板４３ａ，４３ｂによつて
気密容器内が二重構造となり、導通板４３ａ，４
３ｂと気密容器は電気的に絶縁されているため、
気密容器は電磁シールドの役目をし、放電部の閉
回路に流れる短く大きな電流パルスで発生した強
い電磁波ノイズの気密容器外への漏れを防ぐこと
ができた。[Effect of the invention] Conductive plate 4 that supplies the main discharge charge to the main discharge electrode
3a and 43b are formed in an arcuate shape along the inner wall of the main body 20 so that the area is increased, and the inductance in the discharge circuit can be reduced.
Therefore, the charge flows quickly into the discharge section, and since the preliminary discharge electrode is embedded in the groove,
The gas laser medium flowed smoothly in the main discharge space 41, making it possible to significantly increase the number of pulse discharge repetitions. Furthermore, the inside of the airtight container has a double structure due to the conduction plates 43a and 43b.
Since 3b and the airtight container are electrically insulated,
The airtight container acted as an electromagnetic shield, preventing strong electromagnetic noise generated by short, large current pulses flowing through the closed circuit of the discharge section from leaking out of the airtight container.
第１図は本発明の一実施例を示す横断面図、第
２図は同じく縦断面図、第３図は同じく回路図、
第４図はパルス繰返し数とレーザ出力を示す図、
第５図は従来例を示す断面図である。
２０……本体、３０……陰極、３１……陽極、
３６……予備放電電極、３８……小型フアン（送
風機）、４０ａ，４０ｂ……熱交換器、４３ａ，
４３ｂ……導通板。
FIG. 1 is a cross-sectional view showing an embodiment of the present invention, FIG. 2 is a longitudinal sectional view, and FIG. 3 is a circuit diagram.
Figure 4 is a diagram showing the pulse repetition rate and laser output,
FIG. 5 is a sectional view showing a conventional example. 20... Main body, 30... Cathode, 31... Anode,
36...Preliminary discharge electrode, 38...Small fan (air blower), 40a, 40b...Heat exchanger, 43a,
43b...Conduction plate.
Claims (1)
円筒状の気密容器と、この気密容器内に設置され
た陰極および陽極からなる主放電電極と、この主
放電電極による主放電空間を予備電離する予備放
電電極と、上記気密容器内に設けられ上記ガスレ
ーザ媒質を循環させる送風手段と、上記主放電電
極に接続されるピーキングキヤパシタと、上記主
放電空間を間にして相対向して配置された光共振
器鏡とを備えたガスレーザ発振装置において、上
記気密容器の内壁に沿つて上記主放電電極および
送風手段を円弧状に包囲し、上記ピーキングキヤ
パシタと主放電電極の他方とに接続した導通板
と、複数のコロナ放電電極からなり上記主放電電
極の放電面に所定ピツチで形成された溝にそれぞ
れ埋設された予備放電電極と、上記主放電空間に
対して送風側に設けられ上記ガスレーザ媒質を主
放電空間に導くガイドとを備えたことを特徴とす
るガスレーザ発振装置。1. A cylindrical airtight container made of a conductive material and enclosing a gas laser medium, a main discharge electrode consisting of a cathode and an anode installed in this airtight container, and a preliminary discharge electrode that pre-ionizes the main discharge space by this main discharge electrode. , a blowing means provided in the airtight container for circulating the gas laser medium, a peaking capacitor connected to the main discharge electrode, and an optical resonator disposed facing each other with the main discharge space in between. a conductive plate that surrounds the main discharge electrode and the blowing means in an arc shape along the inner wall of the airtight container and is connected to the peaking capacitor and the other of the main discharge electrode; A preliminary discharge electrode is formed of a plurality of corona discharge electrodes and is embedded in grooves formed at a predetermined pitch in the discharge surface of the main discharge electrode, and a preliminary discharge electrode is provided on the blowing side with respect to the main discharge space to discharge the gas laser medium into the main discharge. A gas laser oscillation device characterized by comprising a guide that leads into space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9557485A JPS61253875A (en) | 1985-05-07 | 1985-05-07 | Gas laser oscillation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9557485A JPS61253875A (en) | 1985-05-07 | 1985-05-07 | Gas laser oscillation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61253875A JPS61253875A (en) | 1986-11-11 |
| JPH0318749B2 true JPH0318749B2 (en) | 1991-03-13 |
Family
ID=14141358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9557485A Granted JPS61253875A (en) | 1985-05-07 | 1985-05-07 | Gas laser oscillation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61253875A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63313883A (en) * | 1987-06-17 | 1988-12-21 | Power Reactor & Nuclear Fuel Dev Corp | High atmospheric pressure transverse discharge excitation type metal vapor laser |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5498592A (en) * | 1978-01-23 | 1979-08-03 | Mitsubishi Electric Corp | Gas laser unit |
-
1985
- 1985-05-07 JP JP9557485A patent/JPS61253875A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5498592A (en) * | 1978-01-23 | 1979-08-03 | Mitsubishi Electric Corp | Gas laser unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61253875A (en) | 1986-11-11 |
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