JPH04286172A - Gas laser oscillator - Google Patents

Abstract

PURPOSE:To thin the plate thickness of a dielectric, and to improve oscillation efficiency. CONSTITUTION:First and second cylindrical dielectrics 12a, 12b are arranged in parallel in a vessel 11, in which a laser gas is circulated, respectively, and first and second discharge electrodes 16a, 16b are mounted onto the internal surfaces of each dielectric 12b, 12b so as to be mutually faced oppositely. Strength can be made larger than a plate-shaped dielectric by cylindrically forming both dielectrics 12a, 12b at that time, and plate thickness can be thinned only by the increase of strength, thus lowering the voltage applied between both discharge electrodes 16a, 16b.

Description

[Detailed description of the invention]

[Purpose of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas laser oscillator that oscillates laser light by applying a high frequency voltage between discharge electrodes.

0002

2. Description of the Related Art An example of a conventional configuration of this type of gas laser oscillator is shown in FIG. In the figure, an internal wind tunnel 2 made of stainless steel or aluminum and having a substantially concave cross-section is provided within an external wind tunnel 1 having a rectangular cross-section. A flat plate-shaped first dielectric 3a made of ceramic or the like is airtightly attached to the center of the upper surface of the external wind tunnel 1, and a flat plate-shaped dielectric 3a paired with the first dielectric 3a is attached to the upper part of the internal wind tunnel 2. The second dielectric 3b is airtightly attached opposite to the first dielectric 3a with a predetermined distance therebetween. The upper opening of the internal wind tunnel 2 is closed by a second dielectric 3b.

Further, a first discharge electrode 4a is attached to the center of the upper surface of the first dielectric 3a, and a first discharge electrode 4a is attached to the center of the upper surface of the first dielectric 3a.
A second discharge electrode 4b, which makes a pair with the first discharge electrode 4a, is attached to the center of the lower surface. Among these, the first discharge electrode 4a is connected to one terminal of the high frequency power source 5, and the second discharge electrode 4b is connected to the other terminal of the high frequency power source 5 via an electric wire whose one end is grounded. and,
Gas as a laser medium is sealed in the space between the external wind tunnel 1 and the internal wind tunnel 2 at a pressure of about 60 torr, and the gas is blown in the direction of arrow A by a blower 6 disposed below the internal wind tunnel 2. After circulating in the external wind tunnel 1 along the internal wind tunnel 2 and the second dielectric body 3b, it is cooled by the heat exchanger 7.

[0004] In the above configuration, the high frequency power source 5
When a high frequency voltage is applied between the first and second discharge electrodes 4a and 4b, a high frequency discharge occurs between them via the first and second dielectrics 3a and 3b, and the first and second The gas flowing between the dielectrics 3a and 3b is excited, and laser light 8 is generated in a direction perpendicular to the plane of the drawing.

[0005]

[Problems to be Solved by the Invention] However, in the above-described conventional configuration, the first and second dielectrics 3a, 3
For b, it is necessary to use a thick material that can withstand the pressure difference inside and outside the wind tunnels 1 and 2, and for this reason, both dielectrics 3a
, 3b, first and second discharge electrodes 4a provided on the outer surfaces of
, 4b needs to be increased, resulting in a problem of low oscillation efficiency.

The present invention has been made in view of the above-mentioned circumstances, and its object is to provide a gas laser oscillator in which the thickness of the dielectric material can be reduced and, as a result, the oscillation efficiency can be improved. [Structure of the invention]

[0007]

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a cylindrical first dielectric in a container in which a laser medium circulates, and a cylindrical first dielectric. A second dielectric is arranged in parallel with the first dielectric in a state where a flow path for the laser medium is formed between the first dielectric and the second dielectric. It is characterized in that the first and second discharge electrodes to which a voltage is applied are provided facing each other.

[0008]

According to the above means, since both the first and second dielectrics are formed in a cylindrical shape, their strength is greater than that in a simple plate-like structure. Therefore, it becomes possible to withstand a large pressure difference, and the plate thicknesses of both dielectrics can be reduced, and accordingly, the voltage applied between the discharge electrodes can also be reduced.

[0009]

[Example] The following is an example of the present invention shown in FIGS. 1 and 2.
Explain with reference to. A cylindrical first dielectric member 12a having a circular cross section is disposed at the center of the rectangular box-shaped container 11. This first dielectric 12a is a support member 1
3 and 14 in the container 11, and the inside thereof communicates with the outside air (therefore, the inside of the first dielectric 12a is at atmospheric pressure). This first dielectric 1
A cylindrical second dielectric 12b having a circular cross section is disposed above 2a, similar to the first dielectric 12a. This second dielectric 12b forms a flow path 15 between it and the first dielectric 12a.
It is placed parallel to a. The inside of this second dielectric 12b also communicates with the outside air (therefore, the inside of the second dielectric 12b is at atmospheric pressure).

First and second discharge electrodes 16a and 16b are provided on the inner surfaces of the first and second dielectrics 12a and 12b so as to face each other. Both discharge electrodes 1
6a and 16b are formed by thermal spraying metal. Among these, the first discharge electrode 16a is connected to one terminal of the high frequency power source 17, and the second discharge electrode 16b
is connected to the other terminal of a high frequency power source 17 via an electric wire whose one end is grounded, so that the high frequency power source 17 applies a high frequency voltage between the discharge electrodes 16a and 16b.

[0011] Gas as a laser medium is sealed in the container 11 at a pressure of about 60 torr. Further, inside the container 11, a blower 18 for circulating the gas and a heat exchanger 19 for cooling the gas are disposed.

Next, the operation of the above configuration will be explained. The gas sealed in the container 11 is constantly circulated in the direction of arrow B by the blower 18 while being cooled by the heat exchanger 19. In this state, the high frequency power supply 17 causes the first
, When a high frequency voltage is applied between the second discharge electrodes 16a and 16b, a glow discharge is generated between them via the first and second dielectrics 12a and 12b, and flows through the flow path 15. The gas is excited and laser light 20 is generated in a direction perpendicular to the plane of the paper in FIG.

In this embodiment, the first and second
Since the dielectrics 12a and 12b are both formed in a cylindrical shape, the strength is greater than that in a flat plate, so the thickness of both the dielectrics 12a and 12b can be made thinner. Along with this, the first and second discharge electrodes 16a, 1
Since the voltage applied to 6b can be lowered, oscillation efficiency can be improved, and the reactance of the wires from the high frequency power source 17 to each discharge electrode 16a, 16b is reduced, making wiring easier. Furthermore, both dielectrics 12a and 12b
are formed in a cylindrical shape, so the discharge electrodes 16a, 16
The position of b can be easily adjusted.

Note that in the above embodiment, the second dielectric 12b
Although the second dielectric 12b is arranged so as to be in contact with the upper surface inside the container 11, for example, the second dielectric 12b may be arranged so that the upper part protrudes outside the container 11. Furthermore, a configuration may be adopted in which a cooling medium flows inside the first and second dielectrics 12a and 12b. Thereby, the gas flowing into the discharge portion can be particularly cooled.

Further, in the above embodiment, the ground potential may be set to either the first or second discharge electrode 16a, 16b, or the ground potential may be set between the two electrodes. In other words, the first or second discharge electrode 1
One of 6a and 16b does not necessarily have to be at ground potential, and can be at any potential.

Further, in the above embodiment, the first and second dielectrics 12a and 12b are cylindrical with a circular cross section, but for example, as shown in FIG. The second dielectrics 22a and 22b may be cylindrical with an oval cross section, and as shown in FIG. 4, the first and second dielectrics 23a and 23b may be cylindrical with a rectangular cross section.

[0017]

As is clear from the above description, according to the present invention, since the first and second dielectric bodies on which the discharge electrodes are provided are formed in a cylindrical shape, the difference between these two dielectric bodies is The thickness can be made thinner than in the past, and accordingly, the voltage applied between the discharge electrodes can be lowered than in the past, and as a result, the oscillation efficiency can be improved, which is an excellent effect.

[Brief explanation of the drawing]

[Fig. 1] A vertical cross-sectional view showing one embodiment of the present invention.

[Fig. 2] Partially cut away perspective view

FIG. 3 is a vertical cross-sectional view of a dielectric portion showing different embodiments of the present invention.

FIG. 4 is a diagram corresponding to FIG. 3 showing still another embodiment of the present invention.

[
Figure 5: Vertical cross-sectional view showing a conventional example

[Explanation of symbols]

11 is a container, 12a, 22a, 23a are first dielectrics,
12b, 22b, 23b are second dielectrics, 15 is a flow path, 16a is a first discharge electrode, 16b is a second discharge electrode,
17 indicates a high frequency power source.

Claims (1)

[Claims] [Claim 1] A container in which a laser medium circulates;
A first dielectric having a cylindrical shape disposed within the container and being disposed parallel to the first dielectric so as to form a flow path for the laser medium between the first dielectric and the first dielectric. A second dielectric body having a cylindrical shape, and first and second discharge electrodes that are provided facing each other on the inner surfaces of the first and second dielectric bodies and to which a high frequency voltage is applied. A gas laser oscillator.