JPH03253085A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPH03253085A JPH03253085A JP2049476A JP4947690A JPH03253085A JP H03253085 A JPH03253085 A JP H03253085A JP 2049476 A JP2049476 A JP 2049476A JP 4947690 A JP4947690 A JP 4947690A JP H03253085 A JPH03253085 A JP H03253085A
- Authority
- JP
- Japan
- Prior art keywords
- wind tunnel
- dielectric
- laser oscillator
- discharge
- gas laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003989 dielectric material Substances 0.000 claims abstract description 16
- 230000010355 oscillation Effects 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/24—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers of transmitter output stages
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/34—Negative-feedback-circuit arrangements with or without positive feedback
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/02—Transmitters
- H04B1/04—Circuits
- H04B2001/0408—Circuits with power amplifiers
- H04B2001/0433—Circuits with power amplifiers with linearisation using feedback
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は、高周波電圧を放電電極間に印加してレーザを
発振させるガスレーザ発振器に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a gas laser oscillator that oscillates a laser by applying a high frequency voltage between discharge electrodes.
（従来の技術）
高周波電源を用いた従来のガスレーザ発振器の一例を第
４図に示した。即ち、外部風洞１内には、内部が外気に
通じた断面Ｕ型のステンレス製またはアルミニウム製の
内部風洞２が設けられている。(Prior Art) An example of a conventional gas laser oscillator using a high frequency power source is shown in FIG. That is, provided within the external wind tunnel 1 is an internal wind tunnel 2 made of stainless steel or aluminum and having a U-shaped cross section and whose inside communicates with the outside air.
また、外部風洞１の上部中央にはセラミックなどから戊
る第１の誘電体７ａが気密に取付けられ、同様に前記内
部風洞２の上部には、前記第１の誘電体７ａと対向する
位置に第２の誘電体７ｂが取付けられている。そして、
この第２の誘電体７ｂによって前記断面Ｕ型の内部風洞
２の開口部が閉じられている。さらに、前記第１の誘電
体７ａの中央上面には第１の放電電極６ａが、また、前
記第２の誘電体７ｂの中央下面には第２の放電電極６ｂ
が取付けられている。また、前記第１の放電電極６ａは
高周波電源８の片側に接続され、第２の放電電極６ｂは
接地された高周波電源の他側に接続されている。そして
、前記誘電体７ａ、 ７ｂの内面間で放電させて、紙面
垂直方向にレーザ光１０を発生させている。Furthermore, a first dielectric member 7a made of ceramic or the like is airtightly attached to the center of the upper part of the external wind tunnel 1, and similarly, a first dielectric member 7a made of ceramic or the like is installed at a position opposite to the first dielectric member 7a at the upper part of the internal wind tunnel 2. A second dielectric 7b is attached. and,
The opening of the internal wind tunnel 2 having a U-shaped cross section is closed by the second dielectric 7b. Further, a first discharge electrode 6a is provided on the upper center surface of the first dielectric 7a, and a second discharge electrode 6b is provided on the lower center surface of the second dielectric 7b.
is installed. Further, the first discharge electrode 6a is connected to one side of the high frequency power source 8, and the second discharge electrode 6b is connected to the other side of the high frequency power source which is grounded. A discharge is caused between the inner surfaces of the dielectrics 7a and 7b to generate a laser beam 10 in a direction perpendicular to the plane of the paper.
なお、前記外部風洞１と内部風洞２の間には、約６０ｔ
Ｏｒｒの圧力で封入されたレーザガスが風洞内部に配設
された送風機４によって矢印３のように図中時計方向に
循環され、冷却器５によって冷却されている。また、第
４図においては、放電電極は一対であるが、複数対の放
電電極の場合でも同様にしてレーザ光を得ることができ
る。In addition, there is approximately 60 tons between the external wind tunnel 1 and the internal wind tunnel 2.
Laser gas sealed at a pressure of Orr is circulated clockwise in the figure as shown by an arrow 3 by a blower 4 disposed inside the wind tunnel, and is cooled by a cooler 5. Further, in FIG. 4, there is one pair of discharge electrodes, but laser light can be obtained in the same manner even in the case of plural pairs of discharge electrodes.
（発明が解決しようとする課題）
しかしながら、上述した様な従来のガスレーザ発振器に
おいては、以下に述べる様な解決すべき課題があった。(Problems to be Solved by the Invention) However, in the conventional gas laser oscillator as described above, there were problems to be solved as described below.
即ち、誘電体７ａ、７ｂとしては風洞内外の圧力差に耐
える厚い材料を使用する必要があるため、それらの外側
に配設された放電電極６ａ、６ｂ間に印加する電圧も高
くする必要がある。そのため、第２の放電電極６ｂと内
部風洞２との所要沿面距離が増え、第２の誘電体７ｂの
幅も増えるので、内部風洞２が大形化するたけでなく、
耐圧上、誘電体７ａ、７ｂよりも誘電率の高い材料から
構成する必要かある。That is, since it is necessary to use a thick material for the dielectrics 7a and 7b that can withstand the pressure difference inside and outside the wind tunnel, it is also necessary to increase the voltage applied between the discharge electrodes 6a and 6b arranged on the outside thereof. . Therefore, the required creepage distance between the second discharge electrode 6b and the internal wind tunnel 2 increases, and the width of the second dielectric 7b also increases, so not only does the internal wind tunnel 2 become larger;
In terms of withstand voltage, it is necessary to construct the dielectrics from a material having a higher dielectric constant than the dielectrics 7a and 7b.
本発明は、ｌｘ記の様な問題点を解決するためになされ
たちのてあり、その目的は、構造が簡単で、発振効率の
高い、小形のガスレーザ発振器を提供することにある。The present invention has been made to solve the problems mentioned above, and its purpose is to provide a compact gas laser oscillator with a simple structure and high oscillation efficiency.
［発明の構成］
（課題を解決するための手段）
本発明は、風洞内に一対または複数対の放電電極を対向
配置して放電部を形成し、この放電部内にレーザ媒質を
流しながら前記電極間に高周波電圧を印加し、前記各電
極の近傍に配設された対を成す誘電体を隔てて高周波放
電を発生させ、前記レーザ媒質を励起してレーザを発生
させるガスレーザ発振器において、前記対を成す誘電体
の少なくともいずれか一方を筒状に構成し、その内部に
放電電極を配置したことを特徴とするものである。[Structure of the Invention] (Means for Solving the Problems) The present invention includes forming a discharge section by arranging one or more pairs of discharge electrodes in a wind tunnel, and discharging the electrodes while flowing a laser medium into the discharge section. In a gas laser oscillator, in which a high frequency voltage is applied between the pairs of electrodes, a high frequency discharge is generated across a pair of dielectrics disposed near each of the electrodes, and the laser medium is excited and the laser is generated. The present invention is characterized in that at least one of the dielectrics is formed into a cylindrical shape, and a discharge electrode is disposed inside the cylindrical shape.
（作用）
以−Ｌの構成を有する本発明のガスレーザ発振器におい
ては、筒状の誘電体を外部風洞内に挿入し、その内部に
放電電極を取付けるため、外部風洞自体を小さくするこ
とができ、ガスレーザ発振器の小形化及び構造の簡略化
が図れる。また、誘電体を筒型に構成することにより、
その強度を向１．できるので、誘電体の厚みを薄くする
ことができ、放電電極間に印加される電圧の周波数を低
減することができる。(Function) In the gas laser oscillator of the present invention having the configuration as described below, the cylindrical dielectric is inserted into the external wind tunnel and the discharge electrode is installed inside it, so the external wind tunnel itself can be made small. The gas laser oscillator can be made smaller and its structure can be simplified. In addition, by configuring the dielectric in a cylindrical shape,
Its strength is 1. Therefore, the thickness of the dielectric can be reduced, and the frequency of the voltage applied between the discharge electrodes can be reduced.
（実施例）
以下、本発明の一実施例を第１図及び第２図に基づいて
具体的に説明する。なお、第４図に示した従来型と同一
の部材には同一の符号を付して、説明は省略する。(Example) Hereinafter, an example of the present invention will be specifically described based on FIGS. 1 and 2. Incidentally, the same members as those of the conventional type shown in FIG. 4 are given the same reference numerals, and the description thereof will be omitted.
本実施例においては、第１図及び第２図に示した様に、
断面長方形の外部風洞１内に、断面円形の筒状の誘電体
１１が気密に設けられ、内部風洞１２が構成されている
。また、この筒状の誘電体１１の内部は外気に通じてい
る。さらに、筒状の誘電体１１の内部中央上面には、棒
状の放電電極］３が取付けられている。また、外部風洞
１の外側に配設、された第１の放電電極６ａは高周波電
源８の片側に接続され、本発明に係る棒状の放電電極１
３は接地された高周波電源の他側に接続されている。そ
して、前記誘電体７ａ、１１の間で放電させて、紙面垂
直方向にレーザ光１０を発生させるように構成されてい
る。なお、前記棒状の放電電極１３には、冷却水を流す
ための貫通孔（図示せず）が形成されている。In this embodiment, as shown in FIGS. 1 and 2,
A cylindrical dielectric body 11 with a circular cross section is airtightly provided in an external wind tunnel 1 with a rectangular cross section, thereby forming an internal wind tunnel 12. Moreover, the inside of this cylindrical dielectric body 11 communicates with the outside air. Furthermore, a rod-shaped discharge electrode] 3 is attached to the upper central surface of the inside of the cylindrical dielectric 11. Further, the first discharge electrode 6a disposed outside the external wind tunnel 1 is connected to one side of the high frequency power source 8, and the rod-shaped discharge electrode 1 according to the present invention is connected to one side of the high frequency power source 8.
3 is connected to the other side of the grounded high frequency power source. The device is configured to generate a discharge between the dielectrics 7a and 11 to generate a laser beam 10 in a direction perpendicular to the plane of the drawing. Note that the rod-shaped discharge electrode 13 is formed with a through hole (not shown) through which cooling water flows.
この様に構成された本実施例のガスレーザ発振器におい
ては、外部風洞１内に配設する内部風洞１２を、筒状の
誘電体１１から構成することによりその強度が増すため
、誘電体の板厚を薄くすることができる。その結果、放
電電極６ａ、１３間に印加される電圧の周波数を低減す
ることが可能となる。さらに、筒状の誘電体１１を外部
風洞１内に挿入し、その内部に放電電極１３を取付けて
いるため、外部風洞１自体を小さくすることかでき、ガ
スレーザ発振器の小形化及び構造の簡略化が図れる。さ
らに、放電電極６ａ、１３間に印加される高周波電圧の
周波数を低減することで、電源から電極までの配線のり
アクタンスか減少するので、配線が容易なものとなる。In the gas laser oscillator of this embodiment configured in this way, the internal wind tunnel 12 disposed in the external wind tunnel 1 is constructed from the cylindrical dielectric material 11, thereby increasing its strength. can be made thinner. As a result, it becomes possible to reduce the frequency of the voltage applied between the discharge electrodes 6a and 13. Furthermore, since the cylindrical dielectric body 11 is inserted into the external wind tunnel 1 and the discharge electrode 13 is attached therein, the external wind tunnel 1 itself can be made smaller, and the gas laser oscillator can be downsized and the structure simplified. can be achieved. Furthermore, by reducing the frequency of the high-frequency voltage applied between the discharge electrodes 6a and 13, the actance of the wiring from the power supply to the electrodes is reduced, making wiring easier.
また、筒状の誘電体１１から構成された内部風洞１２内
の放電電極１３は棒状であり、」二下の位置を容易に変
えることかできるため、放電部の一部に放電の点弧しに
くい箇所があった場合に、放電電極１３を近付けたり遠
ざけたりすることによって、均一で安定した放電を得る
ことができ、ガスレーザ発振器の発振効率を大幅に向」
ニすることができる。In addition, the discharge electrode 13 in the internal wind tunnel 12 composed of the cylindrical dielectric material 11 is rod-shaped, and its position can be easily changed. If there is a difficult spot, by moving the discharge electrode 13 closer or further away, it is possible to obtain a uniform and stable discharge, which greatly improves the oscillation efficiency of the gas laser oscillator.
can be done.
この様に、本実施的によれは、小形で発振効率の良いガ
スレーザ発振器を得ることができる。In this way, according to this embodiment, a small gas laser oscillator with high oscillation efficiency can be obtained.
なお、本発明は上述した実施例に限定されるものではな
く、放電電極は一対であっても、複数対であっても良い
。また、第３図に示した様に、上下の放電電極共、その
内部が外気に通じている筒状の誘電体の内部に収納して
も良い。即ち、断面長方形の外部風洞１内に、断面円形
の第１及び第２の筒状の誘電体２１．２２が気密に設け
られ、第１の内部風洞２３及び第２の内部風洞２４が構
成されている。なお、これら第１及び第２の筒状の誘電
体２１．２２の内部はそれぞれ外気に通じている。さら
に、第１の筒状の誘電体２１の内部中央上面には、第１
の棒状の放電電極２５が取付けられ、一方、第２の筒状
の誘電体２２の内部中央下面には、第２の棒状の放電電
極２６が取（−１けられている。また、この第２の棒状
の放電電極２６は高周波電源８の片側に接続され、第１
の棒状の放電電極２５は接地された高周波電源の他側に
接続されている。そして、前記第１及び第２の筒状の誘
電体２１．２２の間で放電させて、紙面垂直方向にレー
ザ光１０を発生させるように構成されている。なお、前
記第１及び第２の棒状の放電電極２５．２６には、冷却
水を流すための貫通孔（図示せず）が形成されている。Note that the present invention is not limited to the embodiments described above, and the number of discharge electrodes may be one pair or multiple pairs. Further, as shown in FIG. 3, both the upper and lower discharge electrodes may be housed inside a cylindrical dielectric whose inside is open to the outside air. That is, first and second cylindrical dielectrics 21 and 22 with a circular cross section are airtightly provided in an external wind tunnel 1 with a rectangular cross section, thereby forming a first internal wind tunnel 23 and a second internal wind tunnel 24. ing. Note that the interiors of the first and second cylindrical dielectrics 21 and 22 are each communicated with the outside air. Further, on the inner central upper surface of the first cylindrical dielectric body 21, a first
A rod-shaped discharge electrode 25 is attached, and a second rod-shaped discharge electrode 26 is attached to the lower surface of the inner center of the second cylindrical dielectric 22. The second rod-shaped discharge electrode 26 is connected to one side of the high frequency power source 8, and the first
The rod-shaped discharge electrode 25 is connected to the other side of the grounded high frequency power source. The structure is such that a discharge is caused between the first and second cylindrical dielectrics 21 and 22 to generate laser light 10 in a direction perpendicular to the plane of the paper. Note that the first and second rod-shaped discharge electrodes 25 and 26 are formed with through holes (not shown) through which cooling water flows.
この場合も、第１図に示した実施例と同様の効果が得ら
れるはかりでなく、上下の放電電極共棒状に構成され、
筒状の誘電体２１．２２の内部に収納されているため、
その位置を調整することが容易であり、より均一で効率
の良い放電を得ることができる。また、第３図に示した
実施例においては、接地電位は第１あるいは第２の棒状
の放電電極２５．２６のいずれか一方にしても良いし、
また、画電極電位の間を接地電位としても良い。つまり
、第１あるいは第２の棒状の放電電極２５．２６は、必
ずしも一方を接地電位とする必要はなく、任意の型砕と
することができる。さらに、内部に放電電極を収納する
誘電体の断面形状は、円形でなくても楕円形、長方形で
も良い。たたし、強度的には断面円形か好ましい。In this case as well, the scale does not provide the same effect as the embodiment shown in FIG. 1, but the upper and lower discharge electrodes are both rod-shaped.
Because it is housed inside the cylindrical dielectric 21 and 22,
It is easy to adjust its position, and more uniform and efficient discharge can be obtained. Further, in the embodiment shown in FIG. 3, the ground potential may be applied to either the first or second rod-shaped discharge electrode 25, 26,
Alternatively, the potential between the picture electrodes may be set to the ground potential. In other words, one of the first or second rod-shaped discharge electrodes 25, 26 does not necessarily have to be at ground potential, and can be formed into any desired shape. Further, the cross-sectional shape of the dielectric body housing the discharge electrode therein may not be circular but may be oval or rectangular. However, in terms of strength, a circular cross section is preferable.
［発明の効果］
以上説明した様に、本発明によれば、各放電電極の近傍
に配設される対を成す誘電体の少なくともいずれか一方
を筒状に構成し、その内部に放電電極を配置するという
簡単な手段によって、構造が簡単で、発振効率の高い、
小形のガスレーザ発振器を提供することができる。[Effects of the Invention] As explained above, according to the present invention, at least one of the pair of dielectrics disposed near each discharge electrode is formed into a cylindrical shape, and the discharge electrode is disposed inside the dielectric. The structure is simple and the oscillation efficiency is high due to the simple arrangement.
A small gas laser oscillator can be provided.
第１図は本発明のガスレーザ発振器の一実施例を示す断
面図、第２図は第１図の斜視図、第３図は本発明の他の
実施例を示す断面図、第４図は従来のガスレーザ発振器
の一例を示す断面図である。
１・・・外部風洞、２・・・内部風洞、３・・・ガス循
環方向、４・・・送風機、５・・・冷却器、６ａ・・・
第１の放電電極、６ｂ・・・第２の放電電極、７ａ・・
・第１の誘電体、７ｂ・・第２の誘電体、８・・・高周
波電源、１０・・・レーザ光、１１・・・筒状の誘電体
、１２・・・内部風洞、１３・・・棒状の放電電極、２
１・・・第１の筒状の誘電体、２２・・・第２の筒状の
誘電体、２３・・・第１の内部風洞、２４・・・第２の
内部風洞、２５・・・第１の棒状の放電電極、２６・・
・第２の棒状の放電電極。FIG. 1 is a sectional view showing one embodiment of the gas laser oscillator of the present invention, FIG. 2 is a perspective view of FIG. 1, FIG. 3 is a sectional view showing another embodiment of the present invention, and FIG. 4 is a conventional gas laser oscillator. 1 is a cross-sectional view showing an example of a gas laser oscillator. 1... External wind tunnel, 2... Internal wind tunnel, 3... Gas circulation direction, 4... Blower, 5... Cooler, 6a...
First discharge electrode, 6b...Second discharge electrode, 7a...
- First dielectric, 7b... Second dielectric, 8... High frequency power supply, 10... Laser light, 11... Cylindrical dielectric, 12... Internal wind tunnel, 13...・Rod-shaped discharge electrode, 2
DESCRIPTION OF SYMBOLS 1... First cylindrical dielectric, 22... Second cylindrical dielectric, 23... First internal wind tunnel, 24... Second internal wind tunnel, 25... First rod-shaped discharge electrode, 26...
-Second rod-shaped discharge electrode.
Claims (1)
電部を形成し、この放電部内にレーザ媒質を流しながら
前記電極間に高周波電圧を印加し、前記各電極の近傍に
配設された対を成す誘電体を隔てて高周波放電を発生さ
せ、前記レーザ媒質を励起してレーザを発生させるガス
レーザ発振器において、 前記対を成す誘電体の少なくともいずれか一方を筒状に
構成し、その内部に放電電極を配置したことを特徴とす
るガスレーザ発振器。[Claims] A discharge section is formed by arranging one or more pairs of discharge electrodes facing each other in a wind tunnel, and a high frequency voltage is applied between the electrodes while flowing a laser medium into the discharge section. In a gas laser oscillator that generates a high-frequency discharge across a pair of dielectrics disposed nearby to excite the laser medium to generate laser, at least one of the dielectrics in the pair is shaped like a tube. What is claimed is: 1. A gas laser oscillator characterized in that a discharge electrode is arranged inside the gas laser oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2049476A JPH03253085A (en) | 1990-03-02 | 1990-03-02 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2049476A JPH03253085A (en) | 1990-03-02 | 1990-03-02 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03253085A true JPH03253085A (en) | 1991-11-12 |
Family
ID=12832209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2049476A Pending JPH03253085A (en) | 1990-03-02 | 1990-03-02 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03253085A (en) |
-
1990
- 1990-03-02 JP JP2049476A patent/JPH03253085A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4375690A (en) | Multi-phase silent discharge gas laser apparatus | |
| JPH0210783A (en) | Inductance distribution rf exciting type waveguide gas laser apparatus | |
| JPH07192639A (en) | Line type electron beam tube structure | |
| US4597086A (en) | Coaxial type laser oscillator for excitation by silent discharge | |
| JPH03253085A (en) | Gas laser oscillator | |
| US4907241A (en) | Gas laser device | |
| US5454003A (en) | Gas laser oscillator | |
| JPH03276780A (en) | Gas laser oscillator | |
| JPH04307978A (en) | High-frequency exciting gas laser having flow in longitudinal direction | |
| JPH04286172A (en) | Gas laser oscillator | |
| JPH02129977A (en) | Gas laser oscillator | |
| JPH0239870B2 (en) | ||
| JP2636478B2 (en) | Laser device | |
| JP3131255B2 (en) | High frequency discharge pumped three-axis orthogonal gas laser oscillator | |
| KR930020781A (en) | Gas laser device | |
| JPH05327067A (en) | Laser device | |
| JPH038381A (en) | Gas laser device | |
| JP2000003676A (en) | Variable oscillating frequency type magnetron | |
| JP2003101105A (en) | Gas laser oscillator | |
| JPS622678A (en) | Gas laser oscillator | |
| JPH05327087A (en) | Discharge stabilizing structure for laser | |
| JPH03246980A (en) | Gas laser oscillator | |
| JPH04306891A (en) | Gas laser oscillator | |
| JPS6240877B2 (en) | ||
| JPH04256387A (en) | Gas laser device |