JPH04306891A - Gas laser oscillator - Google Patents

Abstract

PURPOSE:To eliminate a dead space from a discharge space between discharge electrodes so as to miniaturize a gas laser oscillator by a method wherein dielectric flat plates provided with a discharge electrode are laminated. CONSTITUTION:Dielectric flat plates 11a, 11b, 12a, 12b, 13a, 12b, 14a, and 14b formed in U-shaped in cross section by bending both the ends of them are divided in the lengthwise direction and laminated in two stages. The dielectric plates 11a, 11b, 12a, 12b, 13a, 12b, 14a, and 14b are provided so as to enable them to confront each other respectively, and metal discharge electrodes 15a, 15b, 16a, 16b, 17a, 17b, 18a, and 18b formed by frame spraying are provided to the rear sides of the electric plates opposite to the confronting sides. Furthermore, the dielectrics 11a and 11b and the dielectrics 13a and 13b are separated from each other by a barrier 19, and also the dielectrics 12a and 12b and the dielectrics 14a and 14b are separated from each other by a barrier 19, whereby discharges occurring in regions are prevented from interfering with each other.

Description

[Detailed description of the invention]

[Purpose of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas laser oscillator that oscillates laser light by applying a high frequency voltage between discharge electrodes.

0002

2. Description of the Related Art An example of a conventional gas laser oscillator using a high frequency power source is shown in FIG. Inside the external wind tunnel 1, an internal wind tunnel 2 made of stainless steel or aluminum and having a U-shaped cross section and communicating with the outside air is provided.

[0003] Furthermore, a first dielectric body 3a made of ceramic or the like is airtightly attached to the center of the upper part of the external wind tunnel 1.
Similarly, in the upper part of the internal wind tunnel 2, the first dielectric 3a is
A second dielectric 3b is attached at a position opposite to. The opening of the internal wind tunnel 2 having a U-shaped cross section is closed by the second dielectric 3b. Furthermore, a first discharge electrode 4a is attached to the upper center surface of the first dielectric 3a, and a second discharge electrode 4b is attached to the lower center surface of the second dielectric 3b. Further, the first discharge electrode 4a is connected to one side of the high frequency power source 5, and the second discharge electrode 4b is connected to the other side of the grounded high frequency power source. A discharge is caused between the inner surfaces of the dielectrics 3a and 3b to generate laser light 6 in a direction perpendicular to the plane of the paper.

Note that between the external wind tunnel 1 and the internal wind tunnel 2, a laser gas sealed at a pressure of about 60 torr is circulated clockwise in the figure as shown by arrow A by a blower 7 disposed inside the wind tunnel. and is cooled by a cooler (not shown).

[0005]

[Problems to be Solved by the Invention] However, in conventional gas laser oscillators, when the discharge section is enlarged in order to increase the capacity, there is a dead space between the discharge electrodes.
The device itself has become large and cannot meet the market's need for miniaturization, which has become an extremely fatal problem.

Therefore, in view of the above-mentioned problems, the gas laser oscillator of the present invention effectively utilizes the dead space between the discharge electrodes even when the discharge section is enlarged, and meets market needs without increasing the size of the device itself. The purpose is to provide a gas laser oscillator that is compatible with the following. [Structure of the invention]

[0007]

[Means for Solving the Problems] In order to achieve the above object, a gas laser oscillator of the present invention includes a dielectric body having a discharge electrode formed by thermally spraying metal on a predetermined portion, and a dielectric body disposed facing each other, and a high-frequency power supply that applies a high-frequency voltage to the dielectrics disposed opposite to each other; a blowing means for blowing a laser medium into a gap between the dielectrics disposed opposite to each other; and a resonance means configured by combining a plurality of mirrors; It is characterized by stacking the bodies in multiple stages.

[0008]

[Function] The gas laser oscillator of the present invention constructed in this manner is constructed by stacking a plurality of flat dielectrics each having a discharge electrode formed by spraying metal, which is different from conventional gas laser oscillators. Since there is no dead space between the discharge electrodes, the device can be made smaller.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

As shown in FIG. 1, the gas laser oscillator of this embodiment has flat dielectric members 11a, 11b, 12a, 12b, 13a, 1 with bent ends and a U-shaped cross section.
3b, 14a, and 14b are divided into two in the longitudinal direction and further stacked in two stages. Moreover, the dielectrics 11a and 11b,
12a and 12b, 13a and 13b, and 14a and 14b are provided to face each other, and discharge electrodes 15a, 15b, 15a and 15b are respectively formed by spraying metal on the back surface of the opposing surface.
It has 16a, 16b, 17a, 17b, 18a, and 18b.

Furthermore, dielectrics 11a, 11b and 13a,
13b and the dielectrics 12a, 12b and 14a, 14b are separated by a barrier 19 to prevent discharges generated in each area from interfering with each other.

[0012] Each of the four discharge sections configured as described above is provided with a high frequency power source 20, 21, 22, and 23, respectively. That is, the discharge electrode 15a is connected to one side of the high frequency power source 20, the other discharge electrode 15b is connected to the other side of the grounded high frequency power source 20, and the discharge electrode 16a is connected to one side of the high frequency power source 21 and the other discharge electrode 16b is connected to the other side of the grounded high frequency power source 21, and the discharge electrode 17
a, 18a are each connected to one side of the high frequency power source 22, 23, and the other discharge electrode 17b, 18b is connected to the high frequency power source 2, respectively.
2 and 23 are connected to the other side.

[0013] Between each discharge electrode 15a and 15b, 1
By applying a high frequency voltage between 6a and 16b, between 17a and 17b, and between 18a and 18b, each of the opposing dielectrics 11a and 11b, 12a and 12b, 13a and 13b, 1
A glow discharge is generated through 4a and 14b to generate a laser. In addition, dielectrics 11a, 11b, 13a13b
and dielectrics 12a, 12b, 14a, 14b are airtightly provided in the same wind tunnels 24, 25, respectively.
Axial fans 26 and 27 are provided in the upper part of the dielectric bodies 11a and 13a and the lower part of the dielectric bodies 12b and 14b, respectively, in the interior of the dielectric body 25. 1 between 13a and 13b
The heated gas circulated in the direction of arrow A between fans 26 and 14b is cooled by coolers 28 and 29 located upstream of fans 26 and 27.

Note that between the dielectrics 11a and 11b and between the dielectrics 13a and 13a,
The direction of the gas flow between the dielectrics 12a and 12b and the direction of the gas flow between the dielectrics 12a and 12b and between the dielectrics 14a and 14b are opposite directions. Further, mirrors 30, 31, 32 are provided at one end of each dielectric.
, 33 are provided, and the optical axes of the mirrors 32 and 33 are inclined at 45 degrees with respect to the optical axes of the mirrors 30 and 31.

As described above, according to this embodiment, since the discharge section formed by the discharge electrode and the dielectric has a two-layer structure, the device can be made smaller. In addition, since the gas flow directions in the upper and lower layers are opposite, distortion of the laser beam due to gas density gradient can be eliminated.Furthermore, the mirrors in the upper and lower layers are shifted by 45 degrees to create a 45 degree polarization plane, so the circularly polarized light unit This eliminates the need for cost reduction and miniaturization of the device. In this embodiment, the discharge section has a two-layer structure, but it is not limited to this, and may have a three-layer, four-layer, etc. structure.

[0016]

[Effects of the Invention] As described above, according to the present invention, a structure is adopted in which a plurality of dielectric bodies, that is, discharge parts, are stacked in a plurality of stages, which are arranged opposite to each other, so that a large capacity output is possible and the device itself can be miniaturized. This has an extremely useful effect.

[Brief explanation of the drawing]

FIG. 1 is a left sectional view showing an embodiment of a gas laser oscillator of the present invention.

FIG. 2 is a perspective view of the embodiment shown in FIG. 1;

FIG. 3 is a cross-sectional view showing an outline of a conventional gas laser oscillator.

[Explanation of symbols]

11a, 11b, 12a, 12b, 13a, 13b, 1
4a, 14b...Dielectric 15a, 15b, 16a, 16b, 17a, 17b, 1
8a, 18b...Discharge electrode 20, 21, 22, 23...High frequency power source 26, 27...Axial flow fan 30, 31, 32, 33...Mirror

Claims (1)

[Claims] 1. A dielectric material disposed opposite to each other having a discharge electrode formed by spraying metal on a predetermined portion, a high frequency power source for applying a high frequency voltage to the discharge electrode, and a dielectric material disposed opposite to each other in a gap between the dielectric materials disposed oppositely to each other and having a discharge electrode formed by spraying metal on a predetermined portion. 1. A gas laser oscillator comprising a blowing means for blowing a laser medium and a resonating means configured by combining a plurality of mirrors, and comprising a plurality of stacked dielectrics arranged facing each other.