JPS63182562U - - Google Patents
Info
- Publication number
- JPS63182562U JPS63182562U JP7301487U JP7301487U JPS63182562U JP S63182562 U JPS63182562 U JP S63182562U JP 7301487 U JP7301487 U JP 7301487U JP 7301487 U JP7301487 U JP 7301487U JP S63182562 U JPS63182562 U JP S63182562U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- cylindrical
- laser tube
- repetition
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 4
- 239000011358 absorbing material Substances 0.000 claims description 2
Landscapes
- Lasers (AREA)
Description
第１図及び第２図は、それぞれ本考案の第１及
び第２の実施例を示す模式的な横断面図である。
１……円筒型レーザ管、２，１２……小孔、３
，１３……多数の小孔の開いた部分、４，１４…
…開口部、５，１５……円筒型隔壁、６，１６…
…吸音材、７……放電電極対、８……ガス循環器
、９……放電空間、１０……ガス流、１１……隔
壁。
1 and 2 are schematic cross-sectional views showing first and second embodiments of the present invention, respectively. 1... Cylindrical laser tube, 2, 12... Small hole, 3
, 13... part with many small holes, 4, 14...
...Opening, 5, 15... Cylindrical partition, 6, 16...
... Sound absorbing material, 7 ... Discharge electrode pair, 8 ... Gas circulator, 9 ... Discharge space, 10 ... Gas flow, 11 ... Partition wall.
Claims (1)
出を可能にする放電を行う放電電極対と、前記放
電電極対の間隙に高速なガス流を作り出すための
ガス循環器を少なくとも備えた高繰り返しエキシ
マレーザ装置において、前記レーザ管として円筒
レーザ管を用い、多数の小孔の開いた部分を持つ
円筒型隔壁を、前記円筒型レーザ管内部に設置し
、前記円筒型隔壁の前記多数の小孔の開いた部分
に吸音材を設置したことを特徴とする高繰り返し
エキシマレーザ装置。 A high-repetition excimer laser comprising at least a laser tube that encloses a laser gas, a pair of discharge electrodes that performs a discharge that enables stimulated emission of light, and a gas circulator that creates a high-speed gas flow in a gap between the pair of discharge electrodes. In the apparatus, a cylindrical laser tube is used as the laser tube, a cylindrical partition wall having a portion with a large number of small holes is installed inside the cylindrical laser tube, and the large number of small holes in the cylindrical partition wall are opened. A high-repetition excimer laser device characterized by having sound-absorbing material installed in the exposed area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7301487U JPH073652Y2 (en) | 1987-05-18 | 1987-05-18 | High repeatability excimer laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7301487U JPH073652Y2 (en) | 1987-05-18 | 1987-05-18 | High repeatability excimer laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63182562U true JPS63182562U (en) | 1988-11-24 |
| JPH073652Y2 JPH073652Y2 (en) | 1995-01-30 |
Family
ID=30916973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7301487U Expired - Lifetime JPH073652Y2 (en) | 1987-05-18 | 1987-05-18 | High repeatability excimer laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073652Y2 (en) |
-
1987
- 1987-05-18 JP JP7301487U patent/JPH073652Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073652Y2 (en) | 1995-01-30 |
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