JPH0171440U - - Google Patents
Info
- Publication number
- JPH0171440U JPH0171440U JP1987168082U JP16808287U JPH0171440U JP H0171440 U JPH0171440 U JP H0171440U JP 1987168082 U JP1987168082 U JP 1987168082U JP 16808287 U JP16808287 U JP 16808287U JP H0171440 U JPH0171440 U JP H0171440U
- Authority
- JP
- Japan
- Prior art keywords
- rocking
- cassette
- rotating
- etching
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Description
第１図ａ，ｂは、本考案の揺動装置の正面より
見た断面図と動力部を表わした側面図及び断面図
。第２図は、本考案の一実施例を示す斜視図であ
る。
１……外槽、２……エツチング槽、３……カセ
ツト、４……カセツト取付治具、５……回転揺動
レバー、６……クランクレバー、７……クランク
ピン、８……回転軸、９……ギヤー、１０……モ
ーター、１１……回転板、１２……検出器、１３
……カセツト置き台、１４……揺動装置部、１５
……水洗槽、１６……仕上水洗槽、１７……乾燥
装置、１８……除材台、１９……ロボツト搬送機
構部。
FIGS. 1a and 1b are a cross-sectional view of the rocking device of the present invention as seen from the front, and a side view and a cross-sectional view showing the power section. FIG. 2 is a perspective view showing an embodiment of the present invention. 1... Outer tank, 2... Etching tank, 3... Cassette, 4... Cassette mounting jig, 5... Rotating swing lever, 6... Crank lever, 7... Crank pin, 8... Rotating shaft , 9... Gear, 10... Motor, 11... Rotating plate, 12... Detector, 13
...Cassette stand, 14...Rocking device section, 15
...Washing tank, 16... Finish washing tank, 17... Drying device, 18... Wood removal table, 19... Robot transport mechanism section.
Claims (1)
薬液によるエツチング、洗浄において、液槽内の
カセツトを回転揺動と定角停止機能を有すること
を特徴とする揺動装置。 A rocking device having a function of rotating and rocking a cassette in a liquid tank and stopping it at a fixed angle when etching or cleaning semiconductor silicon wafers, glass wafers, etc. with a chemical liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168082U JPH0171440U (en) | 1987-11-02 | 1987-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168082U JPH0171440U (en) | 1987-11-02 | 1987-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171440U true JPH0171440U (en) | 1989-05-12 |
Family
ID=31456949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168082U Pending JPH0171440U (en) | 1987-11-02 | 1987-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171440U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0631142U (en) * | 1992-09-25 | 1994-04-22 | 大日本スクリーン製造株式会社 | Substrate cleaning equipment |
| JPH07211689A (en) * | 1994-01-18 | 1995-08-11 | Shin Etsu Handotai Co Ltd | Wafer holder |
| JP2019125657A (en) * | 2018-01-15 | 2019-07-25 | ジャパンクリエイト株式会社 | Semiconductor wafer processing device |
-
1987
- 1987-11-02 JP JP1987168082U patent/JPH0171440U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0631142U (en) * | 1992-09-25 | 1994-04-22 | 大日本スクリーン製造株式会社 | Substrate cleaning equipment |
| JPH07211689A (en) * | 1994-01-18 | 1995-08-11 | Shin Etsu Handotai Co Ltd | Wafer holder |
| JP2019125657A (en) * | 2018-01-15 | 2019-07-25 | ジャパンクリエイト株式会社 | Semiconductor wafer processing device |