JPH0165872U - - Google Patents
Info
- Publication number
- JPH0165872U JPH0165872U JP1987162190U JP16219087U JPH0165872U JP H0165872 U JPH0165872 U JP H0165872U JP 1987162190 U JP1987162190 U JP 1987162190U JP 16219087 U JP16219087 U JP 16219087U JP H0165872 U JPH0165872 U JP H0165872U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- epitaxial growth
- elements
- group
- transported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 2
- 229910001882 dioxygen Inorganic materials 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 239000012535 impurity Substances 0.000 claims 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- -1 hydrogen compound Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す断面図である
。 １……反応管、２……加熱炉、３……Ｉｎソー
ス、４……ソースボート、５……基板保持治具、
６……ＩｎＰ基板、７……バイパス管、８……酸
素ガス導入管。
。 １……反応管、２……加熱炉、３……Ｉｎソー
ス、４……ソースボート、５……基板保持治具、
６……ＩｎＰ基板、７……バイパス管、８……酸
素ガス導入管。
Claims (1)
- 族元素を塩化物ガスとして輸送する―族
化合物半導体の気相エピタキシアル成長装置にお
いて、不純物元素の水素化合物ガス及び酸素ガス
の２つの不純物濃度制御用ガス導入ラインを有す
ることを特徴とする気相エピタキシアル成長装置
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162190U JPH0165872U (ja) | 1987-10-23 | 1987-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162190U JPH0165872U (ja) | 1987-10-23 | 1987-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165872U true JPH0165872U (ja) | 1989-04-27 |
Family
ID=31445792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162190U Pending JPH0165872U (ja) | 1987-10-23 | 1987-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165872U (ja) |
-
1987
- 1987-10-23 JP JP1987162190U patent/JPH0165872U/ja active Pending
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