JPH0161170B2 - - Google Patents

Info

Publication number
JPH0161170B2
JPH0161170B2 JP22746282A JP22746282A JPH0161170B2 JP H0161170 B2 JPH0161170 B2 JP H0161170B2 JP 22746282 A JP22746282 A JP 22746282A JP 22746282 A JP22746282 A JP 22746282A JP H0161170 B2 JPH0161170 B2 JP H0161170B2
Authority
JP
Japan
Prior art keywords
probe
pedestal
detection
vibration detection
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22746282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59120923A (ja
Inventor
Minoru Nomura
Yoshuki Kitamura
Tsutomu Watanabe
Noburo Tanii
Keizo Myake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP22746282A priority Critical patent/JPS59120923A/ja
Publication of JPS59120923A publication Critical patent/JPS59120923A/ja
Publication of JPH0161170B2 publication Critical patent/JPH0161170B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP22746282A 1982-12-28 1982-12-28 振動検出プロ−ブ Granted JPS59120923A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22746282A JPS59120923A (ja) 1982-12-28 1982-12-28 振動検出プロ−ブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22746282A JPS59120923A (ja) 1982-12-28 1982-12-28 振動検出プロ−ブ

Publications (2)

Publication Number Publication Date
JPS59120923A JPS59120923A (ja) 1984-07-12
JPH0161170B2 true JPH0161170B2 (en, 2012) 1989-12-27

Family

ID=16861248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22746282A Granted JPS59120923A (ja) 1982-12-28 1982-12-28 振動検出プロ−ブ

Country Status (1)

Country Link
JP (1) JPS59120923A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7319692B2 (ja) * 2021-02-08 2023-08-02 株式会社ミヤワキ 計測装置およびその製造方法
JP7411237B2 (ja) * 2021-02-09 2024-01-11 株式会社ミヤワキ 振動プローブおよび計測装置

Also Published As

Publication number Publication date
JPS59120923A (ja) 1984-07-12

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