JPH0160352U - - Google Patents
Info
- Publication number
- JPH0160352U JPH0160352U JP15475887U JP15475887U JPH0160352U JP H0160352 U JPH0160352 U JP H0160352U JP 15475887 U JP15475887 U JP 15475887U JP 15475887 U JP15475887 U JP 15475887U JP H0160352 U JPH0160352 U JP H0160352U
- Authority
- JP
- Japan
- Prior art keywords
- lens
- vacuum
- proton beam
- sample
- scattered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001133 acceleration Effects 0.000 claims description 5
- 238000005211 surface analysis Methods 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15475887U JPH0622915Y2 (ja) | 1987-10-07 | 1987-10-07 | 表面解析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15475887U JPH0622915Y2 (ja) | 1987-10-07 | 1987-10-07 | 表面解析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160352U true JPH0160352U (zh) | 1989-04-17 |
| JPH0622915Y2 JPH0622915Y2 (ja) | 1994-06-15 |
Family
ID=31431775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15475887U Expired - Lifetime JPH0622915Y2 (ja) | 1987-10-07 | 1987-10-07 | 表面解析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622915Y2 (zh) |
-
1987
- 1987-10-07 JP JP15475887U patent/JPH0622915Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0622915Y2 (ja) | 1994-06-15 |
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