JPS6361752U - - Google Patents
Info
- Publication number
- JPS6361752U JPS6361752U JP15763186U JP15763186U JPS6361752U JP S6361752 U JPS6361752 U JP S6361752U JP 15763186 U JP15763186 U JP 15763186U JP 15763186 U JP15763186 U JP 15763186U JP S6361752 U JPS6361752 U JP S6361752U
- Authority
- JP
- Japan
- Prior art keywords
- cup
- beam cup
- wall
- front face
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011156 evaluation Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15763186U JPS6361752U (zh) | 1986-10-14 | 1986-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15763186U JPS6361752U (zh) | 1986-10-14 | 1986-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361752U true JPS6361752U (zh) | 1988-04-23 |
Family
ID=31080360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15763186U Pending JPS6361752U (zh) | 1986-10-14 | 1986-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361752U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008257931A (ja) * | 2007-04-03 | 2008-10-23 | Nissin Ion Equipment Co Ltd | イオンビームのビーム幅、発散角の測定方法およびイオン注入装置 |
-
1986
- 1986-10-14 JP JP15763186U patent/JPS6361752U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008257931A (ja) * | 2007-04-03 | 2008-10-23 | Nissin Ion Equipment Co Ltd | イオンビームのビーム幅、発散角の測定方法およびイオン注入装置 |